Modification of plasma polymer films by ion implantation

Detalhes bibliográficos
Autor(a) principal: Santos, Deborah Cristina Ribeiro Dos [UNESP]
Data de Publicação: 2004
Outros Autores: Rangel, Rita De Cássia Cipriano [UNESP], Mota, Rogério Pinto [UNESP], Cruz, Nilson Cristino Da [UNESP], Schreiner, Wido Herwig, Rangel, Elidiane Cipriano [UNESP]
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Institucional da UNESP
Texto Completo: http://dx.doi.org/10.1590/S1516-14392004000300019
http://hdl.handle.net/11449/212963
Resumo: In this work, thin polymer films were prepared from acetylene and argon radiofrequency (13.56 MHz, 80 W) glow discharges. Post-deposition treatment was performed by plasma immersion ion implantation in nitrogen or helium glow discharges (13.56 MHz, 70 W). In these cases, samples were biased with 25 kV negative pulses. Exposure time to the bombardment plasma, t, ranged from 900 to 7200 s. Chemical composition of the film surfaces was investigated by X-ray Photoelectron Spectroscopy and the resistance to oxidation by the etching process, in reactive oxygen plasmas. Oxygen and nitrogen were detected in all the samples. While the concentration of the former continuously changed with t, that of N kept practically constant in small proportions. The film is predominantly formed by sp² states, but the proportion of sp³ hybridization slightly increased with t. The etching rate dropped under certain conditions of nitrogen bombardment whereas helium implantation has not significantly improved it. These results are ascribed to the crosslinking degree of the polymeric chains, ruled by the total amount of energy delivered to the film.
id UNSP_a8e96e2ccb8d9d1533fec7c7f3f0e880
oai_identifier_str oai:repositorio.unesp.br:11449/212963
network_acronym_str UNSP
network_name_str Repositório Institucional da UNESP
repository_id_str 2946
spelling Modification of plasma polymer films by ion implantationplasma polymerplasma immersion ion implantationXPSetching rateIn this work, thin polymer films were prepared from acetylene and argon radiofrequency (13.56 MHz, 80 W) glow discharges. Post-deposition treatment was performed by plasma immersion ion implantation in nitrogen or helium glow discharges (13.56 MHz, 70 W). In these cases, samples were biased with 25 kV negative pulses. Exposure time to the bombardment plasma, t, ranged from 900 to 7200 s. Chemical composition of the film surfaces was investigated by X-ray Photoelectron Spectroscopy and the resistance to oxidation by the etching process, in reactive oxygen plasmas. Oxygen and nitrogen were detected in all the samples. While the concentration of the former continuously changed with t, that of N kept practically constant in small proportions. The film is predominantly formed by sp² states, but the proportion of sp³ hybridization slightly increased with t. The etching rate dropped under certain conditions of nitrogen bombardment whereas helium implantation has not significantly improved it. These results are ascribed to the crosslinking degree of the polymeric chains, ruled by the total amount of energy delivered to the film.Universidade Estadual Paulista, Departamento de Física e QuímicaUniversidade Federal do Paraná, Departamento de FísicaUniversidade Estadual PaulistaUniversidade Estadual Paulista, Departamento de Física e QuímicaUniversidade Estadual PaulistaABM, ABC, ABPolUniversidade Estadual Paulista (Unesp)Universidade Federal do ParanáSantos, Deborah Cristina Ribeiro Dos [UNESP]Rangel, Rita De Cássia Cipriano [UNESP]Mota, Rogério Pinto [UNESP]Cruz, Nilson Cristino Da [UNESP]Schreiner, Wido HerwigRangel, Elidiane Cipriano [UNESP]2021-07-14T10:47:52Z2021-07-14T10:47:52Z2004-09info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/article493-497application/pdfhttp://dx.doi.org/10.1590/S1516-14392004000300019Materials Research. São Carlos, SP, Brazil: ABM, ABC, ABPol, v. 7, n. 3, p. 493-497, 2004.1516-14391980-5373http://hdl.handle.net/11449/21296310.1590/S1516-14392004000300019S1516-14392004000300019S1516-14392004000300019.pdfSciELOreponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPengMaterials Researchinfo:eu-repo/semantics/openAccess2024-07-01T20:52:07Zoai:repositorio.unesp.br:11449/212963Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462024-08-05T15:54:01.142550Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false
dc.title.none.fl_str_mv Modification of plasma polymer films by ion implantation
title Modification of plasma polymer films by ion implantation
spellingShingle Modification of plasma polymer films by ion implantation
Santos, Deborah Cristina Ribeiro Dos [UNESP]
plasma polymer
plasma immersion ion implantation
XPS
etching rate
title_short Modification of plasma polymer films by ion implantation
title_full Modification of plasma polymer films by ion implantation
title_fullStr Modification of plasma polymer films by ion implantation
title_full_unstemmed Modification of plasma polymer films by ion implantation
title_sort Modification of plasma polymer films by ion implantation
author Santos, Deborah Cristina Ribeiro Dos [UNESP]
author_facet Santos, Deborah Cristina Ribeiro Dos [UNESP]
Rangel, Rita De Cássia Cipriano [UNESP]
Mota, Rogério Pinto [UNESP]
Cruz, Nilson Cristino Da [UNESP]
Schreiner, Wido Herwig
Rangel, Elidiane Cipriano [UNESP]
author_role author
author2 Rangel, Rita De Cássia Cipriano [UNESP]
Mota, Rogério Pinto [UNESP]
Cruz, Nilson Cristino Da [UNESP]
Schreiner, Wido Herwig
Rangel, Elidiane Cipriano [UNESP]
author2_role author
author
author
author
author
dc.contributor.none.fl_str_mv Universidade Estadual Paulista (Unesp)
Universidade Federal do Paraná
dc.contributor.author.fl_str_mv Santos, Deborah Cristina Ribeiro Dos [UNESP]
Rangel, Rita De Cássia Cipriano [UNESP]
Mota, Rogério Pinto [UNESP]
Cruz, Nilson Cristino Da [UNESP]
Schreiner, Wido Herwig
Rangel, Elidiane Cipriano [UNESP]
dc.subject.por.fl_str_mv plasma polymer
plasma immersion ion implantation
XPS
etching rate
topic plasma polymer
plasma immersion ion implantation
XPS
etching rate
description In this work, thin polymer films were prepared from acetylene and argon radiofrequency (13.56 MHz, 80 W) glow discharges. Post-deposition treatment was performed by plasma immersion ion implantation in nitrogen or helium glow discharges (13.56 MHz, 70 W). In these cases, samples were biased with 25 kV negative pulses. Exposure time to the bombardment plasma, t, ranged from 900 to 7200 s. Chemical composition of the film surfaces was investigated by X-ray Photoelectron Spectroscopy and the resistance to oxidation by the etching process, in reactive oxygen plasmas. Oxygen and nitrogen were detected in all the samples. While the concentration of the former continuously changed with t, that of N kept practically constant in small proportions. The film is predominantly formed by sp² states, but the proportion of sp³ hybridization slightly increased with t. The etching rate dropped under certain conditions of nitrogen bombardment whereas helium implantation has not significantly improved it. These results are ascribed to the crosslinking degree of the polymeric chains, ruled by the total amount of energy delivered to the film.
publishDate 2004
dc.date.none.fl_str_mv 2004-09
2021-07-14T10:47:52Z
2021-07-14T10:47:52Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://dx.doi.org/10.1590/S1516-14392004000300019
Materials Research. São Carlos, SP, Brazil: ABM, ABC, ABPol, v. 7, n. 3, p. 493-497, 2004.
1516-1439
1980-5373
http://hdl.handle.net/11449/212963
10.1590/S1516-14392004000300019
S1516-14392004000300019
S1516-14392004000300019.pdf
url http://dx.doi.org/10.1590/S1516-14392004000300019
http://hdl.handle.net/11449/212963
identifier_str_mv Materials Research. São Carlos, SP, Brazil: ABM, ABC, ABPol, v. 7, n. 3, p. 493-497, 2004.
1516-1439
1980-5373
10.1590/S1516-14392004000300019
S1516-14392004000300019
S1516-14392004000300019.pdf
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv Materials Research
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv 493-497
application/pdf
dc.publisher.none.fl_str_mv ABM, ABC, ABPol
publisher.none.fl_str_mv ABM, ABC, ABPol
dc.source.none.fl_str_mv SciELO
reponame:Repositório Institucional da UNESP
instname:Universidade Estadual Paulista (UNESP)
instacron:UNESP
instname_str Universidade Estadual Paulista (UNESP)
instacron_str UNESP
institution UNESP
reponame_str Repositório Institucional da UNESP
collection Repositório Institucional da UNESP
repository.name.fl_str_mv Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)
repository.mail.fl_str_mv
_version_ 1808128222480564224