Coupling rate measurement of a novel multi-actuated piezoelectric device using optical interferometry
Autor(a) principal: | |
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Data de Publicação: | 2010 |
Outros Autores: | , , , , |
Tipo de documento: | Artigo de conferência |
Idioma: | eng |
Título da fonte: | Repositório Institucional da UNESP |
Texto Completo: | http://dx.doi.org/10.1109/INDUSCON.2010.5740065 http://hdl.handle.net/11449/72051 |
Resumo: | The class of piezoelectric actuators considered in this paper consists of a multi-flexible structure actuated by two or more piezoceramic devices that must generate different output displacements and forces at different specified points of the domain and in different directions. The devices were modeled by finite element using the software ANSYS and the topology optimization method. The following XY actuators were build to achieve maximum displacement in the X and Y directions with a minimum crosstalk between them. The actuator prototypes are composed of an aluminum structure, manufactured by using a wire Electrical Discharge Machining, which are bonded to rectangular PZT5A piezoceramic blocks by using epoxy resin. Multi-actuator piezoelectric device displacements can be measured by using optical interferometry, since it allows dynamic measurements in the kHz range, which is of the order of the first resonance frequency of these piezomechanisms. A Michelson-type interferometer, with a He-Ne laser source, is used to measure the displacement amplitudes in nanometric range. A new optical phase demodulation technique is applied, based on the properties of the triangular waveform drive voltage applied to the XY piezoelectric nanopositioner. This is a low-phase-modulation-depth-like technique that allows the rapid interferometer auto-calibration. The measurements were performed at 100 Hz frequency, and revealed that the device is linear voltage range utilized in this work. The ratio between the generated and coupled output displacements and the drive voltages is equal to 10.97 nm/V and 1.76 nm/V, respectively, which corresponds to a 16% coupling rate. © 2010 IEEE. |
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Coupling rate measurement of a novel multi-actuated piezoelectric device using optical interferometryAluminum structuresAuto calibrationCoupling rateDisplacement amplitudesDrive voltageDynamic measurementFinite ElementHe-Ne lasersMaximum displacementMichelson-type interferometersMulti-actuated piezoelectric devicesNano-positionerNanometric rangesOptical interferometryOptical phasePiezoceramicPiezoceramic devicesResonance frequenciesSoftware ANSYSTopology Optimization MethodTriangular waveformVoltage rangesWire electrical discharge machiningElectric discharge machiningElectric dischargesEpoxy resinsFinite element methodFlexible structuresInterferometersInterferometryNeonOptimizationPiezoelectricityResinsResonancePiezoelectric actuatorsThe class of piezoelectric actuators considered in this paper consists of a multi-flexible structure actuated by two or more piezoceramic devices that must generate different output displacements and forces at different specified points of the domain and in different directions. The devices were modeled by finite element using the software ANSYS and the topology optimization method. The following XY actuators were build to achieve maximum displacement in the X and Y directions with a minimum crosstalk between them. The actuator prototypes are composed of an aluminum structure, manufactured by using a wire Electrical Discharge Machining, which are bonded to rectangular PZT5A piezoceramic blocks by using epoxy resin. Multi-actuator piezoelectric device displacements can be measured by using optical interferometry, since it allows dynamic measurements in the kHz range, which is of the order of the first resonance frequency of these piezomechanisms. A Michelson-type interferometer, with a He-Ne laser source, is used to measure the displacement amplitudes in nanometric range. A new optical phase demodulation technique is applied, based on the properties of the triangular waveform drive voltage applied to the XY piezoelectric nanopositioner. This is a low-phase-modulation-depth-like technique that allows the rapid interferometer auto-calibration. The measurements were performed at 100 Hz frequency, and revealed that the device is linear voltage range utilized in this work. The ratio between the generated and coupled output displacements and the drive voltages is equal to 10.97 nm/V and 1.76 nm/V, respectively, which corresponds to a 16% coupling rate. © 2010 IEEE.Department of Electrical Engineering Universidade Estadual Paulista UNESP, P.O. Box 31, 15385-00 Ilha Solteira, SPDepartment of Mechatronics and Mechanical Systems Engineering Escola Politécnica Universidade de São Paulo, Av. Prof. Mello Moraes 2231, 05508-900 São Paulo, SPDepartment of Electrical Engineering Universidade Estadual Paulista UNESP, P.O. Box 31, 15385-00 Ilha Solteira, SPUniversidade Estadual Paulista (Unesp)Universidade de São Paulo (USP)De Assis Andrade Barbosa, Francisco [UNESP]Takiy, Aline Emy [UNESP]Higuti, Ricardo Tokio [UNESP]Carbonari, Ronny CalixtoKitano, Cláudio [UNESP]Silva, Emílio Carlos Nelli2014-05-27T11:25:20Z2014-05-27T11:25:20Z2010-12-01info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/conferenceObjecthttp://dx.doi.org/10.1109/INDUSCON.2010.57400652010 9th IEEE/IAS International Conference on Industry Applications, INDUSCON 2010.http://hdl.handle.net/11449/7205110.1109/INDUSCON.2010.57400652-s2.0-79955139713640533951088320328834403518951670000-0003-4201-56170000-0001-6320-755XScopusreponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPeng2010 9th IEEE/IAS International Conference on Industry Applications, INDUSCON 2010info:eu-repo/semantics/openAccess2024-07-04T19:11:17Zoai:repositorio.unesp.br:11449/72051Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462024-08-05T14:26:33.728125Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false |
dc.title.none.fl_str_mv |
Coupling rate measurement of a novel multi-actuated piezoelectric device using optical interferometry |
title |
Coupling rate measurement of a novel multi-actuated piezoelectric device using optical interferometry |
spellingShingle |
Coupling rate measurement of a novel multi-actuated piezoelectric device using optical interferometry De Assis Andrade Barbosa, Francisco [UNESP] Aluminum structures Auto calibration Coupling rate Displacement amplitudes Drive voltage Dynamic measurement Finite Element He-Ne lasers Maximum displacement Michelson-type interferometers Multi-actuated piezoelectric devices Nano-positioner Nanometric ranges Optical interferometry Optical phase Piezoceramic Piezoceramic devices Resonance frequencies Software ANSYS Topology Optimization Method Triangular waveform Voltage ranges Wire electrical discharge machining Electric discharge machining Electric discharges Epoxy resins Finite element method Flexible structures Interferometers Interferometry Neon Optimization Piezoelectricity Resins Resonance Piezoelectric actuators |
title_short |
Coupling rate measurement of a novel multi-actuated piezoelectric device using optical interferometry |
title_full |
Coupling rate measurement of a novel multi-actuated piezoelectric device using optical interferometry |
title_fullStr |
Coupling rate measurement of a novel multi-actuated piezoelectric device using optical interferometry |
title_full_unstemmed |
Coupling rate measurement of a novel multi-actuated piezoelectric device using optical interferometry |
title_sort |
Coupling rate measurement of a novel multi-actuated piezoelectric device using optical interferometry |
author |
De Assis Andrade Barbosa, Francisco [UNESP] |
author_facet |
De Assis Andrade Barbosa, Francisco [UNESP] Takiy, Aline Emy [UNESP] Higuti, Ricardo Tokio [UNESP] Carbonari, Ronny Calixto Kitano, Cláudio [UNESP] Silva, Emílio Carlos Nelli |
author_role |
author |
author2 |
Takiy, Aline Emy [UNESP] Higuti, Ricardo Tokio [UNESP] Carbonari, Ronny Calixto Kitano, Cláudio [UNESP] Silva, Emílio Carlos Nelli |
author2_role |
author author author author author |
dc.contributor.none.fl_str_mv |
Universidade Estadual Paulista (Unesp) Universidade de São Paulo (USP) |
dc.contributor.author.fl_str_mv |
De Assis Andrade Barbosa, Francisco [UNESP] Takiy, Aline Emy [UNESP] Higuti, Ricardo Tokio [UNESP] Carbonari, Ronny Calixto Kitano, Cláudio [UNESP] Silva, Emílio Carlos Nelli |
dc.subject.por.fl_str_mv |
Aluminum structures Auto calibration Coupling rate Displacement amplitudes Drive voltage Dynamic measurement Finite Element He-Ne lasers Maximum displacement Michelson-type interferometers Multi-actuated piezoelectric devices Nano-positioner Nanometric ranges Optical interferometry Optical phase Piezoceramic Piezoceramic devices Resonance frequencies Software ANSYS Topology Optimization Method Triangular waveform Voltage ranges Wire electrical discharge machining Electric discharge machining Electric discharges Epoxy resins Finite element method Flexible structures Interferometers Interferometry Neon Optimization Piezoelectricity Resins Resonance Piezoelectric actuators |
topic |
Aluminum structures Auto calibration Coupling rate Displacement amplitudes Drive voltage Dynamic measurement Finite Element He-Ne lasers Maximum displacement Michelson-type interferometers Multi-actuated piezoelectric devices Nano-positioner Nanometric ranges Optical interferometry Optical phase Piezoceramic Piezoceramic devices Resonance frequencies Software ANSYS Topology Optimization Method Triangular waveform Voltage ranges Wire electrical discharge machining Electric discharge machining Electric discharges Epoxy resins Finite element method Flexible structures Interferometers Interferometry Neon Optimization Piezoelectricity Resins Resonance Piezoelectric actuators |
description |
The class of piezoelectric actuators considered in this paper consists of a multi-flexible structure actuated by two or more piezoceramic devices that must generate different output displacements and forces at different specified points of the domain and in different directions. The devices were modeled by finite element using the software ANSYS and the topology optimization method. The following XY actuators were build to achieve maximum displacement in the X and Y directions with a minimum crosstalk between them. The actuator prototypes are composed of an aluminum structure, manufactured by using a wire Electrical Discharge Machining, which are bonded to rectangular PZT5A piezoceramic blocks by using epoxy resin. Multi-actuator piezoelectric device displacements can be measured by using optical interferometry, since it allows dynamic measurements in the kHz range, which is of the order of the first resonance frequency of these piezomechanisms. A Michelson-type interferometer, with a He-Ne laser source, is used to measure the displacement amplitudes in nanometric range. A new optical phase demodulation technique is applied, based on the properties of the triangular waveform drive voltage applied to the XY piezoelectric nanopositioner. This is a low-phase-modulation-depth-like technique that allows the rapid interferometer auto-calibration. The measurements were performed at 100 Hz frequency, and revealed that the device is linear voltage range utilized in this work. The ratio between the generated and coupled output displacements and the drive voltages is equal to 10.97 nm/V and 1.76 nm/V, respectively, which corresponds to a 16% coupling rate. © 2010 IEEE. |
publishDate |
2010 |
dc.date.none.fl_str_mv |
2010-12-01 2014-05-27T11:25:20Z 2014-05-27T11:25:20Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/conferenceObject |
format |
conferenceObject |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://dx.doi.org/10.1109/INDUSCON.2010.5740065 2010 9th IEEE/IAS International Conference on Industry Applications, INDUSCON 2010. http://hdl.handle.net/11449/72051 10.1109/INDUSCON.2010.5740065 2-s2.0-79955139713 6405339510883203 2883440351895167 0000-0003-4201-5617 0000-0001-6320-755X |
url |
http://dx.doi.org/10.1109/INDUSCON.2010.5740065 http://hdl.handle.net/11449/72051 |
identifier_str_mv |
2010 9th IEEE/IAS International Conference on Industry Applications, INDUSCON 2010. 10.1109/INDUSCON.2010.5740065 2-s2.0-79955139713 6405339510883203 2883440351895167 0000-0003-4201-5617 0000-0001-6320-755X |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
2010 9th IEEE/IAS International Conference on Industry Applications, INDUSCON 2010 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.source.none.fl_str_mv |
Scopus reponame:Repositório Institucional da UNESP instname:Universidade Estadual Paulista (UNESP) instacron:UNESP |
instname_str |
Universidade Estadual Paulista (UNESP) |
instacron_str |
UNESP |
institution |
UNESP |
reponame_str |
Repositório Institucional da UNESP |
collection |
Repositório Institucional da UNESP |
repository.name.fl_str_mv |
Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP) |
repository.mail.fl_str_mv |
|
_version_ |
1808128360459534336 |