Tribological behavior of hydrogenated W-C/a-C:H coatings deposited by three different sputtering techniques
Autor(a) principal: | |
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Data de Publicação: | 2019 |
Outros Autores: | , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Cerâmica (São Paulo. Online) |
Texto Completo: | http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0366-69132019000500058 |
Resumo: | Abstract The evolution of structure, mechanical properties and friction behavior of DC magnetron sputtered (DCMS), high power impulse magnetron sputtered (HiPIMS) and high target utilization sputtered (HiTUS) W-C:H coatings was investigated as a function of the addition of acetylene and hydrogen into Ar atmosphere. The gradual addition of reactive gases caused a transition from PVD toward hybrid PVD-PECVD and even PECVD dominant processes. The coating structure evolved from nanocrystalline toward nanocomposite and amorphous structure with the increase of acetylene addition. Deposition rates in all techniques increased linearly with the increase of acetylene flow until certain saturation limit due to the limited energy available for acetylene fragmentation during hybrid PVD-PECVD deposition. Hardness and coefficient of friction in DCMS and HiTUS W-C:H coatings deposited in this regime followed standard congruent tendencies whereas PECVD dominated deposition process produced coatings with different dependencies. In contrary, HiPIMS W-C:H coatings showed low sensitivity to the influence of acetylene and hydrogen additions. Lower coefficients of friction (<0.1) and moderate hardness (around 20 GPa) of HiPIMS W-C:H coatings over a wide range of acetylene additions seem to be a principal advantage of HiPIMS compared to DCMS and HiTUS techniques in this class of coatings. |
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USP-29 |
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Cerâmica (São Paulo. Online) |
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Tribological behavior of hydrogenated W-C/a-C:H coatings deposited by three different sputtering techniquesW-C:H coatingsDC magnetron sputtering (DCMS)high power impulse magnetron sputtering (HiPIMS)high target utilization sputtering (HiTUS)hardnesscoefficient of frictionAbstract The evolution of structure, mechanical properties and friction behavior of DC magnetron sputtered (DCMS), high power impulse magnetron sputtered (HiPIMS) and high target utilization sputtered (HiTUS) W-C:H coatings was investigated as a function of the addition of acetylene and hydrogen into Ar atmosphere. The gradual addition of reactive gases caused a transition from PVD toward hybrid PVD-PECVD and even PECVD dominant processes. The coating structure evolved from nanocrystalline toward nanocomposite and amorphous structure with the increase of acetylene addition. Deposition rates in all techniques increased linearly with the increase of acetylene flow until certain saturation limit due to the limited energy available for acetylene fragmentation during hybrid PVD-PECVD deposition. Hardness and coefficient of friction in DCMS and HiTUS W-C:H coatings deposited in this regime followed standard congruent tendencies whereas PECVD dominated deposition process produced coatings with different dependencies. In contrary, HiPIMS W-C:H coatings showed low sensitivity to the influence of acetylene and hydrogen additions. Lower coefficients of friction (<0.1) and moderate hardness (around 20 GPa) of HiPIMS W-C:H coatings over a wide range of acetylene additions seem to be a principal advantage of HiPIMS compared to DCMS and HiTUS techniques in this class of coatings.Associação Brasileira de Cerâmica2019-01-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersiontext/htmlhttp://old.scielo.br/scielo.php?script=sci_arttext&pid=S0366-69132019000500058Cerâmica v.65 suppl.1 2019reponame:Cerâmica (São Paulo. Online)instname:Universidade de São Paulo (USP)instacron:USP10.1590/0366-6913201965s12577info:eu-repo/semantics/openAccessLofaj,F.Kabátová,M.Klich,M.Medveď,D.Girman,V.eng2019-03-18T00:00:00Zoai:scielo:S0366-69132019000500058Revistahttps://www.scielo.br/j/ce/PUBhttps://old.scielo.br/oai/scielo-oai.phpceram.abc@gmail.com||ceram.abc@gmail.com1678-45530366-6913opendoar:2019-03-18T00:00Cerâmica (São Paulo. Online) - Universidade de São Paulo (USP)false |
dc.title.none.fl_str_mv |
Tribological behavior of hydrogenated W-C/a-C:H coatings deposited by three different sputtering techniques |
title |
Tribological behavior of hydrogenated W-C/a-C:H coatings deposited by three different sputtering techniques |
spellingShingle |
Tribological behavior of hydrogenated W-C/a-C:H coatings deposited by three different sputtering techniques Lofaj,F. W-C:H coatings DC magnetron sputtering (DCMS) high power impulse magnetron sputtering (HiPIMS) high target utilization sputtering (HiTUS) hardness coefficient of friction |
title_short |
Tribological behavior of hydrogenated W-C/a-C:H coatings deposited by three different sputtering techniques |
title_full |
Tribological behavior of hydrogenated W-C/a-C:H coatings deposited by three different sputtering techniques |
title_fullStr |
Tribological behavior of hydrogenated W-C/a-C:H coatings deposited by three different sputtering techniques |
title_full_unstemmed |
Tribological behavior of hydrogenated W-C/a-C:H coatings deposited by three different sputtering techniques |
title_sort |
Tribological behavior of hydrogenated W-C/a-C:H coatings deposited by three different sputtering techniques |
author |
Lofaj,F. |
author_facet |
Lofaj,F. Kabátová,M. Klich,M. Medveď,D. Girman,V. |
author_role |
author |
author2 |
Kabátová,M. Klich,M. Medveď,D. Girman,V. |
author2_role |
author author author author |
dc.contributor.author.fl_str_mv |
Lofaj,F. Kabátová,M. Klich,M. Medveď,D. Girman,V. |
dc.subject.por.fl_str_mv |
W-C:H coatings DC magnetron sputtering (DCMS) high power impulse magnetron sputtering (HiPIMS) high target utilization sputtering (HiTUS) hardness coefficient of friction |
topic |
W-C:H coatings DC magnetron sputtering (DCMS) high power impulse magnetron sputtering (HiPIMS) high target utilization sputtering (HiTUS) hardness coefficient of friction |
description |
Abstract The evolution of structure, mechanical properties and friction behavior of DC magnetron sputtered (DCMS), high power impulse magnetron sputtered (HiPIMS) and high target utilization sputtered (HiTUS) W-C:H coatings was investigated as a function of the addition of acetylene and hydrogen into Ar atmosphere. The gradual addition of reactive gases caused a transition from PVD toward hybrid PVD-PECVD and even PECVD dominant processes. The coating structure evolved from nanocrystalline toward nanocomposite and amorphous structure with the increase of acetylene addition. Deposition rates in all techniques increased linearly with the increase of acetylene flow until certain saturation limit due to the limited energy available for acetylene fragmentation during hybrid PVD-PECVD deposition. Hardness and coefficient of friction in DCMS and HiTUS W-C:H coatings deposited in this regime followed standard congruent tendencies whereas PECVD dominated deposition process produced coatings with different dependencies. In contrary, HiPIMS W-C:H coatings showed low sensitivity to the influence of acetylene and hydrogen additions. Lower coefficients of friction (<0.1) and moderate hardness (around 20 GPa) of HiPIMS W-C:H coatings over a wide range of acetylene additions seem to be a principal advantage of HiPIMS compared to DCMS and HiTUS techniques in this class of coatings. |
publishDate |
2019 |
dc.date.none.fl_str_mv |
2019-01-01 |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0366-69132019000500058 |
url |
http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0366-69132019000500058 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
10.1590/0366-6913201965s12577 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
text/html |
dc.publisher.none.fl_str_mv |
Associação Brasileira de Cerâmica |
publisher.none.fl_str_mv |
Associação Brasileira de Cerâmica |
dc.source.none.fl_str_mv |
Cerâmica v.65 suppl.1 2019 reponame:Cerâmica (São Paulo. Online) instname:Universidade de São Paulo (USP) instacron:USP |
instname_str |
Universidade de São Paulo (USP) |
instacron_str |
USP |
institution |
USP |
reponame_str |
Cerâmica (São Paulo. Online) |
collection |
Cerâmica (São Paulo. Online) |
repository.name.fl_str_mv |
Cerâmica (São Paulo. Online) - Universidade de São Paulo (USP) |
repository.mail.fl_str_mv |
ceram.abc@gmail.com||ceram.abc@gmail.com |
_version_ |
1748936784632348672 |