Structural characterization of μc-Si:H films produced by R.F. magnetron sputtering

Detalhes bibliográficos
Autor(a) principal: Cerqueira, M. F.
Data de Publicação: 1998
Outros Autores: Ferreira, J. A., Andritschky, M., Costa, Manuel F. M.
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/1822/14191
Resumo: Microcrystalline silicon thin films were produced by R.F. magnetron sputtering. The microstructure of these films has been studied by X-ray diffraction, transmission electron microscopy (TEM) and Raman spectroscopy. Average values of crystalline size and strain obtained by the different tecnhiques used are critically compared and the reasons for the differences are discussed.
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spelling Structural characterization of μc-Si:H films produced by R.F. magnetron sputteringMicrocrystalline-siliconRamanX-rayTEMScience & TechnologyMicrocrystalline silicon thin films were produced by R.F. magnetron sputtering. The microstructure of these films has been studied by X-ray diffraction, transmission electron microscopy (TEM) and Raman spectroscopy. Average values of crystalline size and strain obtained by the different tecnhiques used are critically compared and the reasons for the differences are discussed.ElsevierUniversidade do MinhoCerqueira, M. F.Ferreira, J. A.Andritschky, M.Costa, Manuel F. M.19981998-01-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/14191eng0167-931710.1016/S0167-9317(98)00236-6http://dl.acm.org/citation.cfm?id=298445info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:24:47ZPortal AgregadorONG
dc.title.none.fl_str_mv Structural characterization of μc-Si:H films produced by R.F. magnetron sputtering
title Structural characterization of μc-Si:H films produced by R.F. magnetron sputtering
spellingShingle Structural characterization of μc-Si:H films produced by R.F. magnetron sputtering
Cerqueira, M. F.
Microcrystalline-silicon
Raman
X-ray
TEM
Science & Technology
title_short Structural characterization of μc-Si:H films produced by R.F. magnetron sputtering
title_full Structural characterization of μc-Si:H films produced by R.F. magnetron sputtering
title_fullStr Structural characterization of μc-Si:H films produced by R.F. magnetron sputtering
title_full_unstemmed Structural characterization of μc-Si:H films produced by R.F. magnetron sputtering
title_sort Structural characterization of μc-Si:H films produced by R.F. magnetron sputtering
author Cerqueira, M. F.
author_facet Cerqueira, M. F.
Ferreira, J. A.
Andritschky, M.
Costa, Manuel F. M.
author_role author
author2 Ferreira, J. A.
Andritschky, M.
Costa, Manuel F. M.
author2_role author
author
author
dc.contributor.none.fl_str_mv Universidade do Minho
dc.contributor.author.fl_str_mv Cerqueira, M. F.
Ferreira, J. A.
Andritschky, M.
Costa, Manuel F. M.
dc.subject.por.fl_str_mv Microcrystalline-silicon
Raman
X-ray
TEM
Science & Technology
topic Microcrystalline-silicon
Raman
X-ray
TEM
Science & Technology
description Microcrystalline silicon thin films were produced by R.F. magnetron sputtering. The microstructure of these films has been studied by X-ray diffraction, transmission electron microscopy (TEM) and Raman spectroscopy. Average values of crystalline size and strain obtained by the different tecnhiques used are critically compared and the reasons for the differences are discussed.
publishDate 1998
dc.date.none.fl_str_mv 1998
1998-01-01T00:00:00Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/1822/14191
url http://hdl.handle.net/1822/14191
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 0167-9317
10.1016/S0167-9317(98)00236-6
http://dl.acm.org/citation.cfm?id=298445
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Elsevier
publisher.none.fl_str_mv Elsevier
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
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instacron_str RCAAP
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collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv
repository.mail.fl_str_mv
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