Structural characterization of μc-Si:H films produced by R.F. magnetron sputtering
Autor(a) principal: | |
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Data de Publicação: | 1998 |
Outros Autores: | , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | http://hdl.handle.net/1822/14191 |
Resumo: | Microcrystalline silicon thin films were produced by R.F. magnetron sputtering. The microstructure of these films has been studied by X-ray diffraction, transmission electron microscopy (TEM) and Raman spectroscopy. Average values of crystalline size and strain obtained by the different tecnhiques used are critically compared and the reasons for the differences are discussed. |
id |
RCAP_a1d8e1b7560b555b6b33cec6e1e17785 |
---|---|
oai_identifier_str |
oai:repositorium.sdum.uminho.pt:1822/14191 |
network_acronym_str |
RCAP |
network_name_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository_id_str |
7160 |
spelling |
Structural characterization of μc-Si:H films produced by R.F. magnetron sputteringMicrocrystalline-siliconRamanX-rayTEMScience & TechnologyMicrocrystalline silicon thin films were produced by R.F. magnetron sputtering. The microstructure of these films has been studied by X-ray diffraction, transmission electron microscopy (TEM) and Raman spectroscopy. Average values of crystalline size and strain obtained by the different tecnhiques used are critically compared and the reasons for the differences are discussed.ElsevierUniversidade do MinhoCerqueira, M. F.Ferreira, J. A.Andritschky, M.Costa, Manuel F. M.19981998-01-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/14191eng0167-931710.1016/S0167-9317(98)00236-6http://dl.acm.org/citation.cfm?id=298445info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:24:47Zoai:repositorium.sdum.uminho.pt:1822/14191Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T19:18:52.662060Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
Structural characterization of μc-Si:H films produced by R.F. magnetron sputtering |
title |
Structural characterization of μc-Si:H films produced by R.F. magnetron sputtering |
spellingShingle |
Structural characterization of μc-Si:H films produced by R.F. magnetron sputtering Cerqueira, M. F. Microcrystalline-silicon Raman X-ray TEM Science & Technology |
title_short |
Structural characterization of μc-Si:H films produced by R.F. magnetron sputtering |
title_full |
Structural characterization of μc-Si:H films produced by R.F. magnetron sputtering |
title_fullStr |
Structural characterization of μc-Si:H films produced by R.F. magnetron sputtering |
title_full_unstemmed |
Structural characterization of μc-Si:H films produced by R.F. magnetron sputtering |
title_sort |
Structural characterization of μc-Si:H films produced by R.F. magnetron sputtering |
author |
Cerqueira, M. F. |
author_facet |
Cerqueira, M. F. Ferreira, J. A. Andritschky, M. Costa, Manuel F. M. |
author_role |
author |
author2 |
Ferreira, J. A. Andritschky, M. Costa, Manuel F. M. |
author2_role |
author author author |
dc.contributor.none.fl_str_mv |
Universidade do Minho |
dc.contributor.author.fl_str_mv |
Cerqueira, M. F. Ferreira, J. A. Andritschky, M. Costa, Manuel F. M. |
dc.subject.por.fl_str_mv |
Microcrystalline-silicon Raman X-ray TEM Science & Technology |
topic |
Microcrystalline-silicon Raman X-ray TEM Science & Technology |
description |
Microcrystalline silicon thin films were produced by R.F. magnetron sputtering. The microstructure of these films has been studied by X-ray diffraction, transmission electron microscopy (TEM) and Raman spectroscopy. Average values of crystalline size and strain obtained by the different tecnhiques used are critically compared and the reasons for the differences are discussed. |
publishDate |
1998 |
dc.date.none.fl_str_mv |
1998 1998-01-01T00:00:00Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/1822/14191 |
url |
http://hdl.handle.net/1822/14191 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
0167-9317 10.1016/S0167-9317(98)00236-6 http://dl.acm.org/citation.cfm?id=298445 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.publisher.none.fl_str_mv |
Elsevier |
publisher.none.fl_str_mv |
Elsevier |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
instname_str |
Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
instacron_str |
RCAAP |
institution |
RCAAP |
reponame_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
collection |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository.name.fl_str_mv |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
repository.mail.fl_str_mv |
|
_version_ |
1799132644911349760 |