Properties of amorphous SiC coatings deposited on WC-Co substrates
Autor(a) principal: | |
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Data de Publicação: | 2003 |
Outros Autores: | |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Materials research (São Carlos. Online) |
Texto Completo: | http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392003000100007 |
Resumo: | In this work, silicon carbide films were deposited onto tungsten carbide from a sintered SiC target on a r.f. magnetron sputtering system. Based on previous results about the influence of r.f. power and argon pressure upon the properties of films deposited on silicon substrates, suitable conditions were chosen to produce high quality films on WC-Co pieces. Deposition parameters were chosen in order to obtain high deposition rates (about 30 nm/min at 400 W rf power) and acceptable residual stresses (1.5 GPa). Argon pressure affects the energy of particles so that films with higher hardness (30 GPa) were obtained at low pressures (0.05 Pa). Wear rates of the coated pieces against a chromium steel ball in a diamond suspension medium were found to be about half of the uncoated ones. Hardness and wear resistance measurements were done also in thermally annealed (200-800 °C) samples revealing the effectiveness of SiC coatings to protect tool material against severe mechanical degradation resulting of high temperature (above 500 °C) oxidation. |
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Properties of amorphous SiC coatings deposited on WC-Co substratessilicon carbide coatingstungsten carbide toolsIn this work, silicon carbide films were deposited onto tungsten carbide from a sintered SiC target on a r.f. magnetron sputtering system. Based on previous results about the influence of r.f. power and argon pressure upon the properties of films deposited on silicon substrates, suitable conditions were chosen to produce high quality films on WC-Co pieces. Deposition parameters were chosen in order to obtain high deposition rates (about 30 nm/min at 400 W rf power) and acceptable residual stresses (1.5 GPa). Argon pressure affects the energy of particles so that films with higher hardness (30 GPa) were obtained at low pressures (0.05 Pa). Wear rates of the coated pieces against a chromium steel ball in a diamond suspension medium were found to be about half of the uncoated ones. Hardness and wear resistance measurements were done also in thermally annealed (200-800 °C) samples revealing the effectiveness of SiC coatings to protect tool material against severe mechanical degradation resulting of high temperature (above 500 °C) oxidation.ABM, ABC, ABPol2003-01-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersiontext/htmlhttp://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392003000100007Materials Research v.6 n.1 2003reponame:Materials research (São Carlos. Online)instname:Universidade Federal de São Carlos (UFSCAR)instacron:ABM ABC ABPOL10.1590/S1516-14392003000100007info:eu-repo/semantics/openAccessCosta,A.K.Camargo Jr,S.S.eng2003-03-25T00:00:00Zoai:scielo:S1516-14392003000100007Revistahttp://www.scielo.br/mrPUBhttps://old.scielo.br/oai/scielo-oai.phpdedz@power.ufscar.br1980-53731516-1439opendoar:2003-03-25T00:00Materials research (São Carlos. Online) - Universidade Federal de São Carlos (UFSCAR)false |
dc.title.none.fl_str_mv |
Properties of amorphous SiC coatings deposited on WC-Co substrates |
title |
Properties of amorphous SiC coatings deposited on WC-Co substrates |
spellingShingle |
Properties of amorphous SiC coatings deposited on WC-Co substrates Costa,A.K. silicon carbide coatings tungsten carbide tools |
title_short |
Properties of amorphous SiC coatings deposited on WC-Co substrates |
title_full |
Properties of amorphous SiC coatings deposited on WC-Co substrates |
title_fullStr |
Properties of amorphous SiC coatings deposited on WC-Co substrates |
title_full_unstemmed |
Properties of amorphous SiC coatings deposited on WC-Co substrates |
title_sort |
Properties of amorphous SiC coatings deposited on WC-Co substrates |
author |
Costa,A.K. |
author_facet |
Costa,A.K. Camargo Jr,S.S. |
author_role |
author |
author2 |
Camargo Jr,S.S. |
author2_role |
author |
dc.contributor.author.fl_str_mv |
Costa,A.K. Camargo Jr,S.S. |
dc.subject.por.fl_str_mv |
silicon carbide coatings tungsten carbide tools |
topic |
silicon carbide coatings tungsten carbide tools |
description |
In this work, silicon carbide films were deposited onto tungsten carbide from a sintered SiC target on a r.f. magnetron sputtering system. Based on previous results about the influence of r.f. power and argon pressure upon the properties of films deposited on silicon substrates, suitable conditions were chosen to produce high quality films on WC-Co pieces. Deposition parameters were chosen in order to obtain high deposition rates (about 30 nm/min at 400 W rf power) and acceptable residual stresses (1.5 GPa). Argon pressure affects the energy of particles so that films with higher hardness (30 GPa) were obtained at low pressures (0.05 Pa). Wear rates of the coated pieces against a chromium steel ball in a diamond suspension medium were found to be about half of the uncoated ones. Hardness and wear resistance measurements were done also in thermally annealed (200-800 °C) samples revealing the effectiveness of SiC coatings to protect tool material against severe mechanical degradation resulting of high temperature (above 500 °C) oxidation. |
publishDate |
2003 |
dc.date.none.fl_str_mv |
2003-01-01 |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392003000100007 |
url |
http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392003000100007 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
10.1590/S1516-14392003000100007 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
text/html |
dc.publisher.none.fl_str_mv |
ABM, ABC, ABPol |
publisher.none.fl_str_mv |
ABM, ABC, ABPol |
dc.source.none.fl_str_mv |
Materials Research v.6 n.1 2003 reponame:Materials research (São Carlos. Online) instname:Universidade Federal de São Carlos (UFSCAR) instacron:ABM ABC ABPOL |
instname_str |
Universidade Federal de São Carlos (UFSCAR) |
instacron_str |
ABM ABC ABPOL |
institution |
ABM ABC ABPOL |
reponame_str |
Materials research (São Carlos. Online) |
collection |
Materials research (São Carlos. Online) |
repository.name.fl_str_mv |
Materials research (São Carlos. Online) - Universidade Federal de São Carlos (UFSCAR) |
repository.mail.fl_str_mv |
dedz@power.ufscar.br |
_version_ |
1754212657285562368 |