Properties of amorphous SiC coatings deposited on WC-Co substrates

Detalhes bibliográficos
Autor(a) principal: Costa,A.K.
Data de Publicação: 2003
Outros Autores: Camargo Jr,S.S.
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Materials research (São Carlos. Online)
Texto Completo: http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392003000100007
Resumo: In this work, silicon carbide films were deposited onto tungsten carbide from a sintered SiC target on a r.f. magnetron sputtering system. Based on previous results about the influence of r.f. power and argon pressure upon the properties of films deposited on silicon substrates, suitable conditions were chosen to produce high quality films on WC-Co pieces. Deposition parameters were chosen in order to obtain high deposition rates (about 30 nm/min at 400 W rf power) and acceptable residual stresses (1.5 GPa). Argon pressure affects the energy of particles so that films with higher hardness (30 GPa) were obtained at low pressures (0.05 Pa). Wear rates of the coated pieces against a chromium steel ball in a diamond suspension medium were found to be about half of the uncoated ones. Hardness and wear resistance measurements were done also in thermally annealed (200-800 °C) samples revealing the effectiveness of SiC coatings to protect tool material against severe mechanical degradation resulting of high temperature (above 500 °C) oxidation.
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spelling Properties of amorphous SiC coatings deposited on WC-Co substratessilicon carbide coatingstungsten carbide toolsIn this work, silicon carbide films were deposited onto tungsten carbide from a sintered SiC target on a r.f. magnetron sputtering system. Based on previous results about the influence of r.f. power and argon pressure upon the properties of films deposited on silicon substrates, suitable conditions were chosen to produce high quality films on WC-Co pieces. Deposition parameters were chosen in order to obtain high deposition rates (about 30 nm/min at 400 W rf power) and acceptable residual stresses (1.5 GPa). Argon pressure affects the energy of particles so that films with higher hardness (30 GPa) were obtained at low pressures (0.05 Pa). Wear rates of the coated pieces against a chromium steel ball in a diamond suspension medium were found to be about half of the uncoated ones. Hardness and wear resistance measurements were done also in thermally annealed (200-800 °C) samples revealing the effectiveness of SiC coatings to protect tool material against severe mechanical degradation resulting of high temperature (above 500 °C) oxidation.ABM, ABC, ABPol2003-01-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersiontext/htmlhttp://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392003000100007Materials Research v.6 n.1 2003reponame:Materials research (São Carlos. Online)instname:Universidade Federal de São Carlos (UFSCAR)instacron:ABM ABC ABPOL10.1590/S1516-14392003000100007info:eu-repo/semantics/openAccessCosta,A.K.Camargo Jr,S.S.eng2003-03-25T00:00:00Zoai:scielo:S1516-14392003000100007Revistahttp://www.scielo.br/mrPUBhttps://old.scielo.br/oai/scielo-oai.phpdedz@power.ufscar.br1980-53731516-1439opendoar:2003-03-25T00:00Materials research (São Carlos. Online) - Universidade Federal de São Carlos (UFSCAR)false
dc.title.none.fl_str_mv Properties of amorphous SiC coatings deposited on WC-Co substrates
title Properties of amorphous SiC coatings deposited on WC-Co substrates
spellingShingle Properties of amorphous SiC coatings deposited on WC-Co substrates
Costa,A.K.
silicon carbide coatings
tungsten carbide tools
title_short Properties of amorphous SiC coatings deposited on WC-Co substrates
title_full Properties of amorphous SiC coatings deposited on WC-Co substrates
title_fullStr Properties of amorphous SiC coatings deposited on WC-Co substrates
title_full_unstemmed Properties of amorphous SiC coatings deposited on WC-Co substrates
title_sort Properties of amorphous SiC coatings deposited on WC-Co substrates
author Costa,A.K.
author_facet Costa,A.K.
Camargo Jr,S.S.
author_role author
author2 Camargo Jr,S.S.
author2_role author
dc.contributor.author.fl_str_mv Costa,A.K.
Camargo Jr,S.S.
dc.subject.por.fl_str_mv silicon carbide coatings
tungsten carbide tools
topic silicon carbide coatings
tungsten carbide tools
description In this work, silicon carbide films were deposited onto tungsten carbide from a sintered SiC target on a r.f. magnetron sputtering system. Based on previous results about the influence of r.f. power and argon pressure upon the properties of films deposited on silicon substrates, suitable conditions were chosen to produce high quality films on WC-Co pieces. Deposition parameters were chosen in order to obtain high deposition rates (about 30 nm/min at 400 W rf power) and acceptable residual stresses (1.5 GPa). Argon pressure affects the energy of particles so that films with higher hardness (30 GPa) were obtained at low pressures (0.05 Pa). Wear rates of the coated pieces against a chromium steel ball in a diamond suspension medium were found to be about half of the uncoated ones. Hardness and wear resistance measurements were done also in thermally annealed (200-800 °C) samples revealing the effectiveness of SiC coatings to protect tool material against severe mechanical degradation resulting of high temperature (above 500 °C) oxidation.
publishDate 2003
dc.date.none.fl_str_mv 2003-01-01
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392003000100007
url http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392003000100007
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 10.1590/S1516-14392003000100007
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv text/html
dc.publisher.none.fl_str_mv ABM, ABC, ABPol
publisher.none.fl_str_mv ABM, ABC, ABPol
dc.source.none.fl_str_mv Materials Research v.6 n.1 2003
reponame:Materials research (São Carlos. Online)
instname:Universidade Federal de São Carlos (UFSCAR)
instacron:ABM ABC ABPOL
instname_str Universidade Federal de São Carlos (UFSCAR)
instacron_str ABM ABC ABPOL
institution ABM ABC ABPOL
reponame_str Materials research (São Carlos. Online)
collection Materials research (São Carlos. Online)
repository.name.fl_str_mv Materials research (São Carlos. Online) - Universidade Federal de São Carlos (UFSCAR)
repository.mail.fl_str_mv dedz@power.ufscar.br
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