Caracteriza????o de filmes finos de TiOsub(2) crescidos sobre borossilicato

Detalhes bibliográficos
Autor(a) principal: MARCELLO, B.A.
Data de Publicação: 2015
Outros Autores: GERIBOLA, G.A., PILLIS, M.F., CONGRESSO BRASILEIRO DE ENGENHARIA E CI??NCIAS DOS MATERIAIS, 21.
Tipo de documento: Artigo de conferência
Título da fonte: Repositório Institucional do IPEN
Texto Completo: http://repositorio.ipen.br/handle/123456789/23717
id IPEN_76eda1c4987d4ecea834f9bd8adfb689
oai_identifier_str oai:repositorio.ipen.br:123456789/23717
network_acronym_str IPEN
network_name_str Repositório Institucional do IPEN
repository_id_str 4510
spelling 2015-06-10T14:28:39Z2015-06-10T14:28:39Z9-13 de novembro, 2014http://repositorio.ipen.br/handle/123456789/23717Submitted by Claudinei Pracidelli (cpracide@ipen.br) on 2015-06-10T14:28:39Z No. of bitstreams: 1 20759.pdf: 431884 bytes, checksum: e3dc257e6ef3272ca797a940b1984eea (MD5)Made available in DSpace on 2015-06-10T14:28:39Z (GMT). No. of bitstreams: 1 20759.pdf: 431884 bytes, checksum: e3dc257e6ef3272ca797a940b1984eea (MD5)768-775thin filmstitaniumchemical vapor depositionboron silicatesgrowthscanning electron microscopyx-ray diffractionCaracteriza????o de filmes finos de TiOsub(2) crescidos sobre borossilicatoinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/conferenceObjectCBECIMAT 2014NCuiaba, MTMARCELLO, B.A.GERIBOLA, G.A.PILLIS, M.F.CONGRESSO BRASILEIRO DE ENGENHARIA E CI??NCIAS DOS MATERIAIS, 21.info:eu-repo/semantics/openAccessreponame:Repositório Institucional do IPENinstname:Instituto de Pesquisas Energéticas e Nucleares (IPEN)instacron:IPEN207592014MARCELLO, B.A.GERIBOLA, G.A.PILLIS, M.F.15-06Anais8682758GERIBOLA, G.A.:8682:-1:NPILLIS, M.F.:758:-1:NORIGINAL20759.pdf20759.pdfapplication/pdf431884http://repositorio.ipen.br/bitstream/123456789/23717/1/20759.pdfe3dc257e6ef3272ca797a940b1984eeaMD51LICENSElicense.txtlicense.txttext/plain; charset=utf-81748http://repositorio.ipen.br/bitstream/123456789/23717/2/license.txt8a4605be74aa9ea9d79846c1fba20a33MD52123456789/237172015-07-02 12:58:47.829oai:repositorio.ipen.br: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Repositório InstitucionalPUBhttp://repositorio.ipen.br/oai/requestbibl@ipen.bropendoar:45102015-07-02T12:58:47Repositório Institucional do IPEN - Instituto de Pesquisas Energéticas e Nucleares (IPEN)false
dc.title.pt_BR.fl_str_mv Caracteriza????o de filmes finos de TiOsub(2) crescidos sobre borossilicato
title Caracteriza????o de filmes finos de TiOsub(2) crescidos sobre borossilicato
spellingShingle Caracteriza????o de filmes finos de TiOsub(2) crescidos sobre borossilicato
MARCELLO, B.A.
thin films
titanium
chemical vapor deposition
boron silicates
growth
scanning electron microscopy
x-ray diffraction
title_short Caracteriza????o de filmes finos de TiOsub(2) crescidos sobre borossilicato
title_full Caracteriza????o de filmes finos de TiOsub(2) crescidos sobre borossilicato
title_fullStr Caracteriza????o de filmes finos de TiOsub(2) crescidos sobre borossilicato
title_full_unstemmed Caracteriza????o de filmes finos de TiOsub(2) crescidos sobre borossilicato
title_sort Caracteriza????o de filmes finos de TiOsub(2) crescidos sobre borossilicato
author MARCELLO, B.A.
author_facet MARCELLO, B.A.
GERIBOLA, G.A.
PILLIS, M.F.
CONGRESSO BRASILEIRO DE ENGENHARIA E CI??NCIAS DOS MATERIAIS, 21.
author_role author
author2 GERIBOLA, G.A.
PILLIS, M.F.
CONGRESSO BRASILEIRO DE ENGENHARIA E CI??NCIAS DOS MATERIAIS, 21.
author2_role author
author
author
dc.contributor.author.fl_str_mv MARCELLO, B.A.
GERIBOLA, G.A.
PILLIS, M.F.
CONGRESSO BRASILEIRO DE ENGENHARIA E CI??NCIAS DOS MATERIAIS, 21.
dc.subject.por.fl_str_mv thin films
titanium
chemical vapor deposition
boron silicates
growth
scanning electron microscopy
x-ray diffraction
topic thin films
titanium
chemical vapor deposition
boron silicates
growth
scanning electron microscopy
x-ray diffraction
publishDate 2015
dc.date.evento.pt_BR.fl_str_mv 9-13 de novembro, 2014
dc.date.accessioned.fl_str_mv 2015-06-10T14:28:39Z
dc.date.available.fl_str_mv 2015-06-10T14:28:39Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/conferenceObject
format conferenceObject
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://repositorio.ipen.br/handle/123456789/23717
url http://repositorio.ipen.br/handle/123456789/23717
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv 768-775
dc.coverage.pt_BR.fl_str_mv N
dc.source.none.fl_str_mv reponame:Repositório Institucional do IPEN
instname:Instituto de Pesquisas Energéticas e Nucleares (IPEN)
instacron:IPEN
instname_str Instituto de Pesquisas Energéticas e Nucleares (IPEN)
instacron_str IPEN
institution IPEN
reponame_str Repositório Institucional do IPEN
collection Repositório Institucional do IPEN
bitstream.url.fl_str_mv http://repositorio.ipen.br/bitstream/123456789/23717/1/20759.pdf
http://repositorio.ipen.br/bitstream/123456789/23717/2/license.txt
bitstream.checksum.fl_str_mv e3dc257e6ef3272ca797a940b1984eea
8a4605be74aa9ea9d79846c1fba20a33
bitstream.checksumAlgorithm.fl_str_mv MD5
MD5
repository.name.fl_str_mv Repositório Institucional do IPEN - Instituto de Pesquisas Energéticas e Nucleares (IPEN)
repository.mail.fl_str_mv bibl@ipen.br
_version_ 1767254234476052480

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