Enhancement on the hardness and oxidation resistance property of TiN/Ag composite films for high temperature applications by addition of Si

Detalhes bibliográficos
Autor(a) principal: Ju, Hongbo
Data de Publicação: 2022
Outros Autores: Xu, Luyao, Luan, Jing, Geng, Yaoxiang, Xu, Junhua, Yu, Lihua, Yang, Junfeng, Fernandes, Filipe
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/10400.22/24557
Resumo: Titanium nitride and silver (TiN/Ag) composite films exhibited the excellent self-lubricating properties in a wide temperature range due to the formation of the Ag rich tribolayer in the contact. However, Ag addition usually reduces the hardness and oxidation resistance properties of the films. In this paper, TiN/Ag/Si3N4 composite films were deposited using RF magnetron co-sputtering system to improve the mechanical and oxidation resistance properties of the TiN/Ag film. XRD and TEM analysis revealed that three-phases could be identified on the TiN/Ag/Si3N4 films: face-centered cubic (fcc) TiN, fcc-Ag and amorphous Si3N4 phases. The hardness of the TiN/ Ag film increased from ~16 GPa to ~24 GPa for TiN/Ag/Si3N4 with 15.3 at.% of Si due to the formation of the nanocomposite structure. The addition of Si allowed a significant improvement on the oxidation resistance temperature, and effectively avoiding of Ag diffusion, and thereby contributing the stability of the hardness of the film after annealing treatment.
id RCAP_705547c91d8dcf208208637962fe33c5
oai_identifier_str oai:recipp.ipp.pt:10400.22/24557
network_acronym_str RCAP
network_name_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository_id_str 7160
spelling Enhancement on the hardness and oxidation resistance property of TiN/Ag composite films for high temperature applications by addition of SiRF magnetron sputteringTiN/Ag/Si3N4 filmsHardnessOxidation resistanceTitanium nitride and silver (TiN/Ag) composite films exhibited the excellent self-lubricating properties in a wide temperature range due to the formation of the Ag rich tribolayer in the contact. However, Ag addition usually reduces the hardness and oxidation resistance properties of the films. In this paper, TiN/Ag/Si3N4 composite films were deposited using RF magnetron co-sputtering system to improve the mechanical and oxidation resistance properties of the TiN/Ag film. XRD and TEM analysis revealed that three-phases could be identified on the TiN/Ag/Si3N4 films: face-centered cubic (fcc) TiN, fcc-Ag and amorphous Si3N4 phases. The hardness of the TiN/ Ag film increased from ~16 GPa to ~24 GPa for TiN/Ag/Si3N4 with 15.3 at.% of Si due to the formation of the nanocomposite structure. The addition of Si allowed a significant improvement on the oxidation resistance temperature, and effectively avoiding of Ag diffusion, and thereby contributing the stability of the hardness of the film after annealing treatment.Elsevier Ltd.Repositório Científico do Instituto Politécnico do PortoJu, HongboXu, LuyaoLuan, JingGeng, YaoxiangXu, JunhuaYu, LihuaYang, JunfengFernandes, Filipe2024-01-19T11:22:28Z2022-12-232022-12-23T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/10400.22/24557eng10.1016/j.vacuum.2022.111752info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2024-01-24T01:50:31Zoai:recipp.ipp.pt:10400.22/24557Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-20T01:56:44.694045Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv Enhancement on the hardness and oxidation resistance property of TiN/Ag composite films for high temperature applications by addition of Si
title Enhancement on the hardness and oxidation resistance property of TiN/Ag composite films for high temperature applications by addition of Si
spellingShingle Enhancement on the hardness and oxidation resistance property of TiN/Ag composite films for high temperature applications by addition of Si
Ju, Hongbo
RF magnetron sputtering
TiN/Ag/Si3N4 films
Hardness
Oxidation resistance
title_short Enhancement on the hardness and oxidation resistance property of TiN/Ag composite films for high temperature applications by addition of Si
title_full Enhancement on the hardness and oxidation resistance property of TiN/Ag composite films for high temperature applications by addition of Si
title_fullStr Enhancement on the hardness and oxidation resistance property of TiN/Ag composite films for high temperature applications by addition of Si
title_full_unstemmed Enhancement on the hardness and oxidation resistance property of TiN/Ag composite films for high temperature applications by addition of Si
title_sort Enhancement on the hardness and oxidation resistance property of TiN/Ag composite films for high temperature applications by addition of Si
author Ju, Hongbo
author_facet Ju, Hongbo
Xu, Luyao
Luan, Jing
Geng, Yaoxiang
Xu, Junhua
Yu, Lihua
Yang, Junfeng
Fernandes, Filipe
author_role author
author2 Xu, Luyao
Luan, Jing
Geng, Yaoxiang
Xu, Junhua
Yu, Lihua
Yang, Junfeng
Fernandes, Filipe
author2_role author
author
author
author
author
author
author
dc.contributor.none.fl_str_mv Repositório Científico do Instituto Politécnico do Porto
dc.contributor.author.fl_str_mv Ju, Hongbo
Xu, Luyao
Luan, Jing
Geng, Yaoxiang
Xu, Junhua
Yu, Lihua
Yang, Junfeng
Fernandes, Filipe
dc.subject.por.fl_str_mv RF magnetron sputtering
TiN/Ag/Si3N4 films
Hardness
Oxidation resistance
topic RF magnetron sputtering
TiN/Ag/Si3N4 films
Hardness
Oxidation resistance
description Titanium nitride and silver (TiN/Ag) composite films exhibited the excellent self-lubricating properties in a wide temperature range due to the formation of the Ag rich tribolayer in the contact. However, Ag addition usually reduces the hardness and oxidation resistance properties of the films. In this paper, TiN/Ag/Si3N4 composite films were deposited using RF magnetron co-sputtering system to improve the mechanical and oxidation resistance properties of the TiN/Ag film. XRD and TEM analysis revealed that three-phases could be identified on the TiN/Ag/Si3N4 films: face-centered cubic (fcc) TiN, fcc-Ag and amorphous Si3N4 phases. The hardness of the TiN/ Ag film increased from ~16 GPa to ~24 GPa for TiN/Ag/Si3N4 with 15.3 at.% of Si due to the formation of the nanocomposite structure. The addition of Si allowed a significant improvement on the oxidation resistance temperature, and effectively avoiding of Ag diffusion, and thereby contributing the stability of the hardness of the film after annealing treatment.
publishDate 2022
dc.date.none.fl_str_mv 2022-12-23
2022-12-23T00:00:00Z
2024-01-19T11:22:28Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/10400.22/24557
url http://hdl.handle.net/10400.22/24557
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 10.1016/j.vacuum.2022.111752
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Elsevier Ltd.
publisher.none.fl_str_mv Elsevier Ltd.
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
repository.mail.fl_str_mv
_version_ 1799137055469469696

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