Enhancement on the hardness and oxidation resistance property of TiN/Ag composite films for high temperature applications by addition of Si
Autor(a) principal: | |
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Data de Publicação: | 2022 |
Outros Autores: | , , , , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | http://hdl.handle.net/10400.22/24557 |
Resumo: | Titanium nitride and silver (TiN/Ag) composite films exhibited the excellent self-lubricating properties in a wide temperature range due to the formation of the Ag rich tribolayer in the contact. However, Ag addition usually reduces the hardness and oxidation resistance properties of the films. In this paper, TiN/Ag/Si3N4 composite films were deposited using RF magnetron co-sputtering system to improve the mechanical and oxidation resistance properties of the TiN/Ag film. XRD and TEM analysis revealed that three-phases could be identified on the TiN/Ag/Si3N4 films: face-centered cubic (fcc) TiN, fcc-Ag and amorphous Si3N4 phases. The hardness of the TiN/ Ag film increased from ~16 GPa to ~24 GPa for TiN/Ag/Si3N4 with 15.3 at.% of Si due to the formation of the nanocomposite structure. The addition of Si allowed a significant improvement on the oxidation resistance temperature, and effectively avoiding of Ag diffusion, and thereby contributing the stability of the hardness of the film after annealing treatment. |
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Enhancement on the hardness and oxidation resistance property of TiN/Ag composite films for high temperature applications by addition of SiRF magnetron sputteringTiN/Ag/Si3N4 filmsHardnessOxidation resistanceTitanium nitride and silver (TiN/Ag) composite films exhibited the excellent self-lubricating properties in a wide temperature range due to the formation of the Ag rich tribolayer in the contact. However, Ag addition usually reduces the hardness and oxidation resistance properties of the films. In this paper, TiN/Ag/Si3N4 composite films were deposited using RF magnetron co-sputtering system to improve the mechanical and oxidation resistance properties of the TiN/Ag film. XRD and TEM analysis revealed that three-phases could be identified on the TiN/Ag/Si3N4 films: face-centered cubic (fcc) TiN, fcc-Ag and amorphous Si3N4 phases. The hardness of the TiN/ Ag film increased from ~16 GPa to ~24 GPa for TiN/Ag/Si3N4 with 15.3 at.% of Si due to the formation of the nanocomposite structure. The addition of Si allowed a significant improvement on the oxidation resistance temperature, and effectively avoiding of Ag diffusion, and thereby contributing the stability of the hardness of the film after annealing treatment.Elsevier Ltd.Repositório Científico do Instituto Politécnico do PortoJu, HongboXu, LuyaoLuan, JingGeng, YaoxiangXu, JunhuaYu, LihuaYang, JunfengFernandes, Filipe2024-01-19T11:22:28Z2022-12-232022-12-23T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/10400.22/24557eng10.1016/j.vacuum.2022.111752info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2024-01-24T01:50:31Zoai:recipp.ipp.pt:10400.22/24557Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-20T01:56:44.694045Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
Enhancement on the hardness and oxidation resistance property of TiN/Ag composite films for high temperature applications by addition of Si |
title |
Enhancement on the hardness and oxidation resistance property of TiN/Ag composite films for high temperature applications by addition of Si |
spellingShingle |
Enhancement on the hardness and oxidation resistance property of TiN/Ag composite films for high temperature applications by addition of Si Ju, Hongbo RF magnetron sputtering TiN/Ag/Si3N4 films Hardness Oxidation resistance |
title_short |
Enhancement on the hardness and oxidation resistance property of TiN/Ag composite films for high temperature applications by addition of Si |
title_full |
Enhancement on the hardness and oxidation resistance property of TiN/Ag composite films for high temperature applications by addition of Si |
title_fullStr |
Enhancement on the hardness and oxidation resistance property of TiN/Ag composite films for high temperature applications by addition of Si |
title_full_unstemmed |
Enhancement on the hardness and oxidation resistance property of TiN/Ag composite films for high temperature applications by addition of Si |
title_sort |
Enhancement on the hardness and oxidation resistance property of TiN/Ag composite films for high temperature applications by addition of Si |
author |
Ju, Hongbo |
author_facet |
Ju, Hongbo Xu, Luyao Luan, Jing Geng, Yaoxiang Xu, Junhua Yu, Lihua Yang, Junfeng Fernandes, Filipe |
author_role |
author |
author2 |
Xu, Luyao Luan, Jing Geng, Yaoxiang Xu, Junhua Yu, Lihua Yang, Junfeng Fernandes, Filipe |
author2_role |
author author author author author author author |
dc.contributor.none.fl_str_mv |
Repositório Científico do Instituto Politécnico do Porto |
dc.contributor.author.fl_str_mv |
Ju, Hongbo Xu, Luyao Luan, Jing Geng, Yaoxiang Xu, Junhua Yu, Lihua Yang, Junfeng Fernandes, Filipe |
dc.subject.por.fl_str_mv |
RF magnetron sputtering TiN/Ag/Si3N4 films Hardness Oxidation resistance |
topic |
RF magnetron sputtering TiN/Ag/Si3N4 films Hardness Oxidation resistance |
description |
Titanium nitride and silver (TiN/Ag) composite films exhibited the excellent self-lubricating properties in a wide temperature range due to the formation of the Ag rich tribolayer in the contact. However, Ag addition usually reduces the hardness and oxidation resistance properties of the films. In this paper, TiN/Ag/Si3N4 composite films were deposited using RF magnetron co-sputtering system to improve the mechanical and oxidation resistance properties of the TiN/Ag film. XRD and TEM analysis revealed that three-phases could be identified on the TiN/Ag/Si3N4 films: face-centered cubic (fcc) TiN, fcc-Ag and amorphous Si3N4 phases. The hardness of the TiN/ Ag film increased from ~16 GPa to ~24 GPa for TiN/Ag/Si3N4 with 15.3 at.% of Si due to the formation of the nanocomposite structure. The addition of Si allowed a significant improvement on the oxidation resistance temperature, and effectively avoiding of Ag diffusion, and thereby contributing the stability of the hardness of the film after annealing treatment. |
publishDate |
2022 |
dc.date.none.fl_str_mv |
2022-12-23 2022-12-23T00:00:00Z 2024-01-19T11:22:28Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/10400.22/24557 |
url |
http://hdl.handle.net/10400.22/24557 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
10.1016/j.vacuum.2022.111752 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.publisher.none.fl_str_mv |
Elsevier Ltd. |
publisher.none.fl_str_mv |
Elsevier Ltd. |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
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Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
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RCAAP |
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RCAAP |
reponame_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
collection |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository.name.fl_str_mv |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
repository.mail.fl_str_mv |
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1799137055469469696 |