Conducting indium oxide films on plastic substrates by plasma enhanced reactive thermal evaporation

Detalhes bibliográficos
Autor(a) principal: Vygranenko, Yuri
Data de Publicação: 2019
Outros Autores: Fernandes, Miguel, Vieira, Manuela, Lavareda, Guilherme, CARVALHO, CARLOS, Brogueira, P., Amaral, Ana
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/10400.21/11428
Resumo: Este trabalho foi financiado pelo Concurso Anual para Projetos de Investigação, Desenvolvimento, Inovação e Criação Artística (IDI&CA) 2016 do Instituto Politécnico de Lisboa. Código de referência IPL/2016/SolWin_ISEL
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spelling Conducting indium oxide films on plastic substrates by plasma enhanced reactive thermal evaporationFlexible electronicsIndium oxideThin-filmsReactive thermal evaporationElectrical propertiesOptical propertiesEste trabalho foi financiado pelo Concurso Anual para Projetos de Investigação, Desenvolvimento, Inovação e Criação Artística (IDI&CA) 2016 do Instituto Politécnico de Lisboa. Código de referência IPL/2016/SolWin_ISELThis work reports on low temperature deposition of conducing indium oxide films by a radio-frequency plasma enhanced reactive thermal evaporation (rf-PERTE) technique. The films were deposited on polyethylene terephthalate (PET) without intentional heating of the substrate and at elevated temperatures up to 150 degrees C. The material stoichiometry was accurately controlled by adjusting deposition conditions including the oxygen flow, process pressure, pumping speed, and RF-power. Besides, fine turning of the critical deposition parameters during the deposition was implemented by measuring the variation of film conductance in-situ. The film morphology was analyzed by scanning electron microscopy. Hall effect measurements were also performed to determine the relation between the deposition conditions and the electrical properties of the films. A resistivity of 4 x 10(-4) Omega-cm was reached under optimized deposition conditions. A 250 nm-thick coating with 16 Omega/sq sheet resistance shows an 82% peak value of transmittance in the visible spectral range.ElsevierRCIPLVygranenko, YuriFernandes, MiguelVieira, ManuelaLavareda, GuilhermeCARVALHO, CARLOSBrogueira, P.Amaral, Ana2020-04-07T15:57:05Z2019-12-012019-12-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/10400.21/11428engVYGRANENKO, Yuri.; [et al] – Conducting indium oxide films on plastic substrates by plasma enhanced reactive thermal evaporation. Thin Solid Films. ISSN 0040-6090. Vol. 691 (2019), pp. 1-40040-609010.1016/j.tsf.2019.137604metadata only accessinfo:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-08-03T10:02:40Zoai:repositorio.ipl.pt:10400.21/11428Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T20:19:40.981378Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv Conducting indium oxide films on plastic substrates by plasma enhanced reactive thermal evaporation
title Conducting indium oxide films on plastic substrates by plasma enhanced reactive thermal evaporation
spellingShingle Conducting indium oxide films on plastic substrates by plasma enhanced reactive thermal evaporation
Vygranenko, Yuri
Flexible electronics
Indium oxide
Thin-films
Reactive thermal evaporation
Electrical properties
Optical properties
title_short Conducting indium oxide films on plastic substrates by plasma enhanced reactive thermal evaporation
title_full Conducting indium oxide films on plastic substrates by plasma enhanced reactive thermal evaporation
title_fullStr Conducting indium oxide films on plastic substrates by plasma enhanced reactive thermal evaporation
title_full_unstemmed Conducting indium oxide films on plastic substrates by plasma enhanced reactive thermal evaporation
title_sort Conducting indium oxide films on plastic substrates by plasma enhanced reactive thermal evaporation
author Vygranenko, Yuri
author_facet Vygranenko, Yuri
Fernandes, Miguel
Vieira, Manuela
Lavareda, Guilherme
CARVALHO, CARLOS
Brogueira, P.
Amaral, Ana
author_role author
author2 Fernandes, Miguel
Vieira, Manuela
Lavareda, Guilherme
CARVALHO, CARLOS
Brogueira, P.
Amaral, Ana
author2_role author
author
author
author
author
author
dc.contributor.none.fl_str_mv RCIPL
dc.contributor.author.fl_str_mv Vygranenko, Yuri
Fernandes, Miguel
Vieira, Manuela
Lavareda, Guilherme
CARVALHO, CARLOS
Brogueira, P.
Amaral, Ana
dc.subject.por.fl_str_mv Flexible electronics
Indium oxide
Thin-films
Reactive thermal evaporation
Electrical properties
Optical properties
topic Flexible electronics
Indium oxide
Thin-films
Reactive thermal evaporation
Electrical properties
Optical properties
description Este trabalho foi financiado pelo Concurso Anual para Projetos de Investigação, Desenvolvimento, Inovação e Criação Artística (IDI&CA) 2016 do Instituto Politécnico de Lisboa. Código de referência IPL/2016/SolWin_ISEL
publishDate 2019
dc.date.none.fl_str_mv 2019-12-01
2019-12-01T00:00:00Z
2020-04-07T15:57:05Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/10400.21/11428
url http://hdl.handle.net/10400.21/11428
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv VYGRANENKO, Yuri.; [et al] – Conducting indium oxide films on plastic substrates by plasma enhanced reactive thermal evaporation. Thin Solid Films. ISSN 0040-6090. Vol. 691 (2019), pp. 1-4
0040-6090
10.1016/j.tsf.2019.137604
dc.rights.driver.fl_str_mv metadata only access
info:eu-repo/semantics/openAccess
rights_invalid_str_mv metadata only access
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Elsevier
publisher.none.fl_str_mv Elsevier
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
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reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
repository.mail.fl_str_mv
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