Pulsed power modulators for surface treatment by plasma immersion ion implantation
Autor(a) principal: | |
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Data de Publicação: | 2004 |
Outros Autores: | , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Brazilian Journal of Physics |
Texto Completo: | http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332004000800011 |
Resumo: | The treatment of surfaces by plasma immersion ion implantation requires pulsed power modulators to provide negative high voltage pulses. To achieve this requirement, we have developed three basic circuit configurations in our laboratory: pulse forming network (PFN), hard-tube pulser (HT) and Blumlein line. In this paper we discuss these three types of circuit topologies.As experimental results, first we present the voltage/current characteristic waveforms of PFN and HT pulsers in the PIII treatment of different materials (aluminum, silicon and stainless steel) as well we describe the surface characterization of the materials thereof treated.And finally,we show recent high voltage tests of a high voltage Blumlein pulser (150kV/300A/1mus) to be used in surface treatments of polymers and aluminum alloys. |
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Brazilian Journal of Physics |
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Pulsed power modulators for surface treatment by plasma immersion ion implantationThe treatment of surfaces by plasma immersion ion implantation requires pulsed power modulators to provide negative high voltage pulses. To achieve this requirement, we have developed three basic circuit configurations in our laboratory: pulse forming network (PFN), hard-tube pulser (HT) and Blumlein line. In this paper we discuss these three types of circuit topologies.As experimental results, first we present the voltage/current characteristic waveforms of PFN and HT pulsers in the PIII treatment of different materials (aluminum, silicon and stainless steel) as well we describe the surface characterization of the materials thereof treated.And finally,we show recent high voltage tests of a high voltage Blumlein pulser (150kV/300A/1mus) to be used in surface treatments of polymers and aluminum alloys.Sociedade Brasileira de Física2004-12-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersiontext/htmlhttp://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332004000800011Brazilian Journal of Physics v.34 n.4b 2004reponame:Brazilian Journal of Physicsinstname:Sociedade Brasileira de Física (SBF)instacron:SBF10.1590/S0103-97332004000800011info:eu-repo/semantics/openAccessRossi,J. O.Ueda,M.Barroso,J. J.eng2005-03-01T00:00:00Zoai:scielo:S0103-97332004000800011Revistahttp://www.sbfisica.org.br/v1/home/index.php/pt/ONGhttps://old.scielo.br/oai/scielo-oai.phpsbfisica@sbfisica.org.br||sbfisica@sbfisica.org.br1678-44480103-9733opendoar:2005-03-01T00:00Brazilian Journal of Physics - Sociedade Brasileira de Física (SBF)false |
dc.title.none.fl_str_mv |
Pulsed power modulators for surface treatment by plasma immersion ion implantation |
title |
Pulsed power modulators for surface treatment by plasma immersion ion implantation |
spellingShingle |
Pulsed power modulators for surface treatment by plasma immersion ion implantation Rossi,J. O. |
title_short |
Pulsed power modulators for surface treatment by plasma immersion ion implantation |
title_full |
Pulsed power modulators for surface treatment by plasma immersion ion implantation |
title_fullStr |
Pulsed power modulators for surface treatment by plasma immersion ion implantation |
title_full_unstemmed |
Pulsed power modulators for surface treatment by plasma immersion ion implantation |
title_sort |
Pulsed power modulators for surface treatment by plasma immersion ion implantation |
author |
Rossi,J. O. |
author_facet |
Rossi,J. O. Ueda,M. Barroso,J. J. |
author_role |
author |
author2 |
Ueda,M. Barroso,J. J. |
author2_role |
author author |
dc.contributor.author.fl_str_mv |
Rossi,J. O. Ueda,M. Barroso,J. J. |
description |
The treatment of surfaces by plasma immersion ion implantation requires pulsed power modulators to provide negative high voltage pulses. To achieve this requirement, we have developed three basic circuit configurations in our laboratory: pulse forming network (PFN), hard-tube pulser (HT) and Blumlein line. In this paper we discuss these three types of circuit topologies.As experimental results, first we present the voltage/current characteristic waveforms of PFN and HT pulsers in the PIII treatment of different materials (aluminum, silicon and stainless steel) as well we describe the surface characterization of the materials thereof treated.And finally,we show recent high voltage tests of a high voltage Blumlein pulser (150kV/300A/1mus) to be used in surface treatments of polymers and aluminum alloys. |
publishDate |
2004 |
dc.date.none.fl_str_mv |
2004-12-01 |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332004000800011 |
url |
http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332004000800011 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
10.1590/S0103-97332004000800011 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
text/html |
dc.publisher.none.fl_str_mv |
Sociedade Brasileira de Física |
publisher.none.fl_str_mv |
Sociedade Brasileira de Física |
dc.source.none.fl_str_mv |
Brazilian Journal of Physics v.34 n.4b 2004 reponame:Brazilian Journal of Physics instname:Sociedade Brasileira de Física (SBF) instacron:SBF |
instname_str |
Sociedade Brasileira de Física (SBF) |
instacron_str |
SBF |
institution |
SBF |
reponame_str |
Brazilian Journal of Physics |
collection |
Brazilian Journal of Physics |
repository.name.fl_str_mv |
Brazilian Journal of Physics - Sociedade Brasileira de Física (SBF) |
repository.mail.fl_str_mv |
sbfisica@sbfisica.org.br||sbfisica@sbfisica.org.br |
_version_ |
1754734861593083904 |