Thin film deposition with time-varying temperature
Autor(a) principal: | |
---|---|
Data de Publicação: | 2013 |
Outros Autores: | |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Institucional da UFBA |
Texto Completo: | http://repositorio.ufba.br/ri/handle/ri/15019 |
Resumo: | Texto completo: acesso restrito. p. 1-19 |
id |
UFBA-2_df9b3616cd75c5eec058e94b572f8e03 |
---|---|
oai_identifier_str |
oai:repositorio.ufba.br:ri/15019 |
network_acronym_str |
UFBA-2 |
network_name_str |
Repositório Institucional da UFBA |
repository_id_str |
1932 |
spelling |
Assis, Thiago Albuquerque deReis, F. D. A. AarãoAssis, Thiago Albuquerque deReis, F. D. A. Aarão2014-05-26T13:51:27Z20131742-5468http://repositorio.ufba.br/ri/handle/ri/15019Texto completo: acesso restrito. p. 1-19We study the effects of time-dependent substrate/film temperature in the deposition of a mesoscopically thick film using a statistical model that accounts for diffusion of adatoms without lateral neighbors whose coefficients depend on an activation energy and temperature. Dynamic scaling with fixed temperature is extended to predict conditions in which the temperature variation significantly affects surface roughness scaling. It agrees with computer simulation results for deposition of up to 104 atomic layers and maximal temperature changes of 30 K, near or below room temperature. If the temperature decreases during the growth, the global roughness may have a rapid growth, with effective exponents larger than 1/2 due to the time-decreasing adatom mobility. The local roughness in small box size shows typical evidence of anomalous scaling, with anomaly exponents depending on the particular form of temperature decrease. If the temperature increases during the growth, a non-monotonic evolution of the global roughness may be observed, which is explained by the competition of kinetic roughening and the smoothing effect of increasing diffusion lengths. The extension of the theoretical approach to film deposition with other activation energy barriers shows that similar conditions on temperature variation may lead to the same morphological features. Equivalent results may also be observed by controlling the deposition flux.Submitted by Suelen Reis (suziy.ellen@gmail.com) on 2014-04-24T13:25:37Z No. of bitstreams: 1 1742-5468_2013_10_P10008.pdf: 1541353 bytes, checksum: eab8f746be2f308fadc90f5477cb2c20 (MD5)Approved for entry into archive by Alda Lima da Silva (sivalda@ufba.br) on 2014-05-26T13:51:27Z (GMT) No. of bitstreams: 1 1742-5468_2013_10_P10008.pdf: 1541353 bytes, checksum: eab8f746be2f308fadc90f5477cb2c20 (MD5)Made available in DSpace on 2014-05-26T13:51:27Z (GMT). No. of bitstreams: 1 1742-5468_2013_10_P10008.pdf: 1541353 bytes, checksum: eab8f746be2f308fadc90f5477cb2c20 (MD5) Previous issue date: 2013http://dx.doi.org/10.1088/1742-5468/2013/10/P10008reponame:Repositório Institucional da UFBAinstname:Universidade Federal da Bahia (UFBA)instacron:UFBAChemical vapor deposition (theory)Kinetic roughening (theory)Surface di usion (theory)Thin lm deposition (theory)Thin film deposition with time-varying temperatureJournal of Statistical Mechanics: Theory and Experimentinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/article10000-01-01info:eu-repo/semantics/openAccessengORIGINAL1742-5468_2013_10_P10008.pdf1742-5468_2013_10_P10008.pdfapplication/pdf1541353https://repositorio.ufba.br/bitstream/ri/15019/1/1742-5468_2013_10_P10008.pdfeab8f746be2f308fadc90f5477cb2c20MD51LICENSElicense.txtlicense.txttext/plain1345https://repositorio.ufba.br/bitstream/ri/15019/2/license.txt0d4b811ef71182510d2015daa7c8a900MD52TEXT1742-5468_2013_10_P10008.pdf.txt1742-5468_2013_10_P10008.pdf.txtExtracted texttext/plain47069https://repositorio.ufba.br/bitstream/ri/15019/3/1742-5468_2013_10_P10008.pdf.txtbadd05f7f0d56eafab5822c8334911d9MD53ri/150192022-07-05 14:03:48.989oai:repositorio.ufba.br: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Repositório InstitucionalPUBhttp://192.188.11.11:8080/oai/requestopendoar:19322022-07-05T17:03:48Repositório Institucional da UFBA - Universidade Federal da Bahia (UFBA)false |
dc.title.pt_BR.fl_str_mv |
Thin film deposition with time-varying temperature |
dc.title.alternative.pt_BR.fl_str_mv |
Journal of Statistical Mechanics: Theory and Experiment |
title |
Thin film deposition with time-varying temperature |
spellingShingle |
Thin film deposition with time-varying temperature Assis, Thiago Albuquerque de Chemical vapor deposition (theory) Kinetic roughening (theory) Surface di usion (theory) Thin lm deposition (theory) |
title_short |
Thin film deposition with time-varying temperature |
title_full |
Thin film deposition with time-varying temperature |
title_fullStr |
Thin film deposition with time-varying temperature |
title_full_unstemmed |
Thin film deposition with time-varying temperature |
title_sort |
Thin film deposition with time-varying temperature |
author |
Assis, Thiago Albuquerque de |
author_facet |
Assis, Thiago Albuquerque de Reis, F. D. A. Aarão |
author_role |
author |
author2 |
Reis, F. D. A. Aarão |
author2_role |
author |
dc.contributor.author.fl_str_mv |
Assis, Thiago Albuquerque de Reis, F. D. A. Aarão Assis, Thiago Albuquerque de Reis, F. D. A. Aarão |
dc.subject.por.fl_str_mv |
Chemical vapor deposition (theory) Kinetic roughening (theory) Surface di usion (theory) Thin lm deposition (theory) |
topic |
Chemical vapor deposition (theory) Kinetic roughening (theory) Surface di usion (theory) Thin lm deposition (theory) |
description |
Texto completo: acesso restrito. p. 1-19 |
publishDate |
2013 |
dc.date.issued.fl_str_mv |
2013 |
dc.date.accessioned.fl_str_mv |
2014-05-26T13:51:27Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://repositorio.ufba.br/ri/handle/ri/15019 |
dc.identifier.issn.none.fl_str_mv |
1742-5468 |
identifier_str_mv |
1742-5468 |
url |
http://repositorio.ufba.br/ri/handle/ri/15019 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.source.pt_BR.fl_str_mv |
http://dx.doi.org/10.1088/1742-5468/2013/10/P10008 |
dc.source.none.fl_str_mv |
reponame:Repositório Institucional da UFBA instname:Universidade Federal da Bahia (UFBA) instacron:UFBA |
instname_str |
Universidade Federal da Bahia (UFBA) |
instacron_str |
UFBA |
institution |
UFBA |
reponame_str |
Repositório Institucional da UFBA |
collection |
Repositório Institucional da UFBA |
bitstream.url.fl_str_mv |
https://repositorio.ufba.br/bitstream/ri/15019/1/1742-5468_2013_10_P10008.pdf https://repositorio.ufba.br/bitstream/ri/15019/2/license.txt https://repositorio.ufba.br/bitstream/ri/15019/3/1742-5468_2013_10_P10008.pdf.txt |
bitstream.checksum.fl_str_mv |
eab8f746be2f308fadc90f5477cb2c20 0d4b811ef71182510d2015daa7c8a900 badd05f7f0d56eafab5822c8334911d9 |
bitstream.checksumAlgorithm.fl_str_mv |
MD5 MD5 MD5 |
repository.name.fl_str_mv |
Repositório Institucional da UFBA - Universidade Federal da Bahia (UFBA) |
repository.mail.fl_str_mv |
|
_version_ |
1808459476221558784 |