Oxygen species in HfO/sub 2/ films : an in situ x-ray photoelectron spectroscopy study
Autor(a) principal: | |
---|---|
Data de Publicação: | 2007 |
Outros Autores: | , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Institucional da UFRGS |
Texto Completo: | http://hdl.handle.net/10183/96098 |
Resumo: | The chemical bonding of O atoms in HfO2 films on Si was investigated by in situ x-ray photoelectron spectroscopy in the O 1s spectral region. In addition to trivial O forming only O-Hf bonds, O 1s signals corresponding to nontrivial secondary O (Osec) were also observed. By ruling out possible roles of impurities as well as by comparing O 1s signals for different thermochemical processing routes, Osec chemical origins were inferred. Moreover, angle-resolved photoelectron analysis was employed to quantitatively separate surface and bulk Osec contributions. Surface Osec was assigned to surface O-H groups generated either by room temperature water vapor exposure or by 600 °C H2 annealing. Bulk Osec was assigned to O-O or O-H bonds and, as indicated by thermodynamic calculations and complementary structural analysis, is located in HfO2 amorphous regions and grain boundaries. This bulk Osec can be partly removed by annealing in reducing atmospheres. For some of the processing routes employed here, we observed additional, water-induced bulk Osec, which was attributed to dissociative water absorption in HfO2 amorphous regions and O-depleted grain boundaries. |
id |
UFRGS-2_3d8fe33d63567e62ed40defb9a9277d1 |
---|---|
oai_identifier_str |
oai:www.lume.ufrgs.br:10183/96098 |
network_acronym_str |
UFRGS-2 |
network_name_str |
Repositório Institucional da UFRGS |
repository_id_str |
|
spelling |
Driemeier, Carlos EduardoWallace, Robert M.Baumvol, Israel Jacob Rabin2014-06-06T02:06:23Z20070021-8979http://hdl.handle.net/10183/96098000603841The chemical bonding of O atoms in HfO2 films on Si was investigated by in situ x-ray photoelectron spectroscopy in the O 1s spectral region. In addition to trivial O forming only O-Hf bonds, O 1s signals corresponding to nontrivial secondary O (Osec) were also observed. By ruling out possible roles of impurities as well as by comparing O 1s signals for different thermochemical processing routes, Osec chemical origins were inferred. Moreover, angle-resolved photoelectron analysis was employed to quantitatively separate surface and bulk Osec contributions. Surface Osec was assigned to surface O-H groups generated either by room temperature water vapor exposure or by 600 °C H2 annealing. Bulk Osec was assigned to O-O or O-H bonds and, as indicated by thermodynamic calculations and complementary structural analysis, is located in HfO2 amorphous regions and grain boundaries. This bulk Osec can be partly removed by annealing in reducing atmospheres. For some of the processing routes employed here, we observed additional, water-induced bulk Osec, which was attributed to dissociative water absorption in HfO2 amorphous regions and O-depleted grain boundaries.application/pdfengJournal of applied physics. Vol. 102, no. 2 (July 2007), 024112 8p.Espectro de fotoeletrons produzidos por raios-xÓxido de háfnioOxygen species in HfO/sub 2/ films : an in situ x-ray photoelectron spectroscopy studyEstrangeiroinfo:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/openAccessreponame:Repositório Institucional da UFRGSinstname:Universidade Federal do Rio Grande do Sul (UFRGS)instacron:UFRGSORIGINAL000603841.pdf000603841.pdfTexto completo (inglês)application/pdf484894http://www.lume.ufrgs.br/bitstream/10183/96098/1/000603841.pdfedb817b78b277396cb0d736f33102fb0MD51TEXT000603841.pdf.txt000603841.pdf.txtExtracted Texttext/plain42680http://www.lume.ufrgs.br/bitstream/10183/96098/2/000603841.pdf.txta10fc6b71f2cfba6bd703781cde6dd83MD52THUMBNAIL000603841.pdf.jpg000603841.pdf.jpgGenerated Thumbnailimage/jpeg1568http://www.lume.ufrgs.br/bitstream/10183/96098/3/000603841.pdf.jpgafe0fa4e336777afe1d6d418385da734MD5310183/960982018-10-17 08:14:37.538oai:www.lume.ufrgs.br:10183/96098Repositório de PublicaçõesPUBhttps://lume.ufrgs.br/oai/requestopendoar:2018-10-17T11:14:37Repositório Institucional da UFRGS - Universidade Federal do Rio Grande do Sul (UFRGS)false |
dc.title.pt_BR.fl_str_mv |
Oxygen species in HfO/sub 2/ films : an in situ x-ray photoelectron spectroscopy study |
title |
Oxygen species in HfO/sub 2/ films : an in situ x-ray photoelectron spectroscopy study |
spellingShingle |
Oxygen species in HfO/sub 2/ films : an in situ x-ray photoelectron spectroscopy study Driemeier, Carlos Eduardo Espectro de fotoeletrons produzidos por raios-x Óxido de háfnio |
title_short |
Oxygen species in HfO/sub 2/ films : an in situ x-ray photoelectron spectroscopy study |
title_full |
Oxygen species in HfO/sub 2/ films : an in situ x-ray photoelectron spectroscopy study |
title_fullStr |
Oxygen species in HfO/sub 2/ films : an in situ x-ray photoelectron spectroscopy study |
title_full_unstemmed |
Oxygen species in HfO/sub 2/ films : an in situ x-ray photoelectron spectroscopy study |
title_sort |
Oxygen species in HfO/sub 2/ films : an in situ x-ray photoelectron spectroscopy study |
author |
Driemeier, Carlos Eduardo |
author_facet |
Driemeier, Carlos Eduardo Wallace, Robert M. Baumvol, Israel Jacob Rabin |
author_role |
author |
author2 |
Wallace, Robert M. Baumvol, Israel Jacob Rabin |
author2_role |
author author |
dc.contributor.author.fl_str_mv |
Driemeier, Carlos Eduardo Wallace, Robert M. Baumvol, Israel Jacob Rabin |
dc.subject.por.fl_str_mv |
Espectro de fotoeletrons produzidos por raios-x Óxido de háfnio |
topic |
Espectro de fotoeletrons produzidos por raios-x Óxido de háfnio |
description |
The chemical bonding of O atoms in HfO2 films on Si was investigated by in situ x-ray photoelectron spectroscopy in the O 1s spectral region. In addition to trivial O forming only O-Hf bonds, O 1s signals corresponding to nontrivial secondary O (Osec) were also observed. By ruling out possible roles of impurities as well as by comparing O 1s signals for different thermochemical processing routes, Osec chemical origins were inferred. Moreover, angle-resolved photoelectron analysis was employed to quantitatively separate surface and bulk Osec contributions. Surface Osec was assigned to surface O-H groups generated either by room temperature water vapor exposure or by 600 °C H2 annealing. Bulk Osec was assigned to O-O or O-H bonds and, as indicated by thermodynamic calculations and complementary structural analysis, is located in HfO2 amorphous regions and grain boundaries. This bulk Osec can be partly removed by annealing in reducing atmospheres. For some of the processing routes employed here, we observed additional, water-induced bulk Osec, which was attributed to dissociative water absorption in HfO2 amorphous regions and O-depleted grain boundaries. |
publishDate |
2007 |
dc.date.issued.fl_str_mv |
2007 |
dc.date.accessioned.fl_str_mv |
2014-06-06T02:06:23Z |
dc.type.driver.fl_str_mv |
Estrangeiro info:eu-repo/semantics/article |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/10183/96098 |
dc.identifier.issn.pt_BR.fl_str_mv |
0021-8979 |
dc.identifier.nrb.pt_BR.fl_str_mv |
000603841 |
identifier_str_mv |
0021-8979 000603841 |
url |
http://hdl.handle.net/10183/96098 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.ispartof.pt_BR.fl_str_mv |
Journal of applied physics. Vol. 102, no. 2 (July 2007), 024112 8p. |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.source.none.fl_str_mv |
reponame:Repositório Institucional da UFRGS instname:Universidade Federal do Rio Grande do Sul (UFRGS) instacron:UFRGS |
instname_str |
Universidade Federal do Rio Grande do Sul (UFRGS) |
instacron_str |
UFRGS |
institution |
UFRGS |
reponame_str |
Repositório Institucional da UFRGS |
collection |
Repositório Institucional da UFRGS |
bitstream.url.fl_str_mv |
http://www.lume.ufrgs.br/bitstream/10183/96098/1/000603841.pdf http://www.lume.ufrgs.br/bitstream/10183/96098/2/000603841.pdf.txt http://www.lume.ufrgs.br/bitstream/10183/96098/3/000603841.pdf.jpg |
bitstream.checksum.fl_str_mv |
edb817b78b277396cb0d736f33102fb0 a10fc6b71f2cfba6bd703781cde6dd83 afe0fa4e336777afe1d6d418385da734 |
bitstream.checksumAlgorithm.fl_str_mv |
MD5 MD5 MD5 |
repository.name.fl_str_mv |
Repositório Institucional da UFRGS - Universidade Federal do Rio Grande do Sul (UFRGS) |
repository.mail.fl_str_mv |
|
_version_ |
1801224835756457984 |