The potentialities of ultrasound as an alternative to chemical etching for proton beam writing micropatterning
Autor(a) principal: | |
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Data de Publicação: | 2022 |
Outros Autores: | , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Institucional da UFRGS |
Texto Completo: | http://hdl.handle.net/10183/240946 |
Resumo: | In this paper, we explore the potentialities of using ultrasound waves as a post-irradiation treatment after proton beam writing (PBW) patterning of PTFE. To that end, 2-mm-thick foils of PTFE were irradiated with 2.2 MeV protons with an average current of 50 pA. Straight line structures were patterned on the polymer with a 3.5 × 3.5 μm2 focused proton beam. Post-irradiation polymers were placed in a heat bath at 60 °C and immersed either in distilled water or in a 6 M solution of NaOH under the action of 40 kHz ultrasound waves for developing the patterned structures. The results indicate that distilled water submitted to ultrasound waves is very efficient for removing rough structures created by the proton irradiation and thus providing a good aspect ratio to the PBW microstructures. On the other hand, the use of 6 M NaOH instead of water did not improve the quality of the structures patterned with the proton beam. The results are discussed in terms of the parameters that characterize the interaction of ultrasound waves with the liquid media and the polymer. |
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Bauer, Deiverti de VilaDebastiani, RafaelaSouza, Cláudia Telles deAmaral, LivioDias, Johnny Ferraz2022-06-25T05:01:41Z20220021-8995http://hdl.handle.net/10183/240946001143460In this paper, we explore the potentialities of using ultrasound waves as a post-irradiation treatment after proton beam writing (PBW) patterning of PTFE. To that end, 2-mm-thick foils of PTFE were irradiated with 2.2 MeV protons with an average current of 50 pA. Straight line structures were patterned on the polymer with a 3.5 × 3.5 μm2 focused proton beam. Post-irradiation polymers were placed in a heat bath at 60 °C and immersed either in distilled water or in a 6 M solution of NaOH under the action of 40 kHz ultrasound waves for developing the patterned structures. The results indicate that distilled water submitted to ultrasound waves is very efficient for removing rough structures created by the proton irradiation and thus providing a good aspect ratio to the PBW microstructures. On the other hand, the use of 6 M NaOH instead of water did not improve the quality of the structures patterned with the proton beam. The results are discussed in terms of the parameters that characterize the interaction of ultrasound waves with the liquid media and the polymer.application/pdfengJournal of applied polymer science. New York. Vol. 139, n. 25 (July 2022), e52407, 8 p.UltrassomFeixes de íonsPolitetrafluoretilenoPBWProton beam writingPTFEUltrasoundThe potentialities of ultrasound as an alternative to chemical etching for proton beam writing micropatterningEstrangeiroinfo:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/openAccessreponame:Repositório Institucional da UFRGSinstname:Universidade Federal do Rio Grande do Sul (UFRGS)instacron:UFRGSTEXT001143460.pdf.txt001143460.pdf.txtExtracted Texttext/plain29858http://www.lume.ufrgs.br/bitstream/10183/240946/2/001143460.pdf.txt8efdac235a4b56585a09e35a7c8236fdMD52ORIGINAL001143460.pdfTexto completo (inglês)application/pdf2961462http://www.lume.ufrgs.br/bitstream/10183/240946/1/001143460.pdf6c5979591e0424aa5be4dd8c5230a31dMD5110183/2409462024-04-20 06:33:41.209532oai:www.lume.ufrgs.br:10183/240946Repositório de PublicaçõesPUBhttps://lume.ufrgs.br/oai/requestopendoar:2024-04-20T09:33:41Repositório Institucional da UFRGS - Universidade Federal do Rio Grande do Sul (UFRGS)false |
dc.title.pt_BR.fl_str_mv |
The potentialities of ultrasound as an alternative to chemical etching for proton beam writing micropatterning |
title |
The potentialities of ultrasound as an alternative to chemical etching for proton beam writing micropatterning |
spellingShingle |
The potentialities of ultrasound as an alternative to chemical etching for proton beam writing micropatterning Bauer, Deiverti de Vila Ultrassom Feixes de íons Politetrafluoretileno PBW Proton beam writing PTFE Ultrasound |
title_short |
The potentialities of ultrasound as an alternative to chemical etching for proton beam writing micropatterning |
title_full |
The potentialities of ultrasound as an alternative to chemical etching for proton beam writing micropatterning |
title_fullStr |
The potentialities of ultrasound as an alternative to chemical etching for proton beam writing micropatterning |
title_full_unstemmed |
The potentialities of ultrasound as an alternative to chemical etching for proton beam writing micropatterning |
title_sort |
The potentialities of ultrasound as an alternative to chemical etching for proton beam writing micropatterning |
author |
Bauer, Deiverti de Vila |
author_facet |
Bauer, Deiverti de Vila Debastiani, Rafaela Souza, Cláudia Telles de Amaral, Livio Dias, Johnny Ferraz |
author_role |
author |
author2 |
Debastiani, Rafaela Souza, Cláudia Telles de Amaral, Livio Dias, Johnny Ferraz |
author2_role |
author author author author |
dc.contributor.author.fl_str_mv |
Bauer, Deiverti de Vila Debastiani, Rafaela Souza, Cláudia Telles de Amaral, Livio Dias, Johnny Ferraz |
dc.subject.por.fl_str_mv |
Ultrassom Feixes de íons Politetrafluoretileno |
topic |
Ultrassom Feixes de íons Politetrafluoretileno PBW Proton beam writing PTFE Ultrasound |
dc.subject.eng.fl_str_mv |
PBW Proton beam writing PTFE Ultrasound |
description |
In this paper, we explore the potentialities of using ultrasound waves as a post-irradiation treatment after proton beam writing (PBW) patterning of PTFE. To that end, 2-mm-thick foils of PTFE were irradiated with 2.2 MeV protons with an average current of 50 pA. Straight line structures were patterned on the polymer with a 3.5 × 3.5 μm2 focused proton beam. Post-irradiation polymers were placed in a heat bath at 60 °C and immersed either in distilled water or in a 6 M solution of NaOH under the action of 40 kHz ultrasound waves for developing the patterned structures. The results indicate that distilled water submitted to ultrasound waves is very efficient for removing rough structures created by the proton irradiation and thus providing a good aspect ratio to the PBW microstructures. On the other hand, the use of 6 M NaOH instead of water did not improve the quality of the structures patterned with the proton beam. The results are discussed in terms of the parameters that characterize the interaction of ultrasound waves with the liquid media and the polymer. |
publishDate |
2022 |
dc.date.accessioned.fl_str_mv |
2022-06-25T05:01:41Z |
dc.date.issued.fl_str_mv |
2022 |
dc.type.driver.fl_str_mv |
Estrangeiro info:eu-repo/semantics/article |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/10183/240946 |
dc.identifier.issn.pt_BR.fl_str_mv |
0021-8995 |
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001143460 |
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http://hdl.handle.net/10183/240946 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.ispartof.pt_BR.fl_str_mv |
Journal of applied polymer science. New York. Vol. 139, n. 25 (July 2022), e52407, 8 p. |
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info:eu-repo/semantics/openAccess |
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openAccess |
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