Formação de texturas cristalográficas em filmes finos de NbN
Autor(a) principal: | |
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Data de Publicação: | 2017 |
Tipo de documento: | Dissertação |
Idioma: | por |
Título da fonte: | Manancial - Repositório Digital da UFSM |
Texto Completo: | http://repositorio.ufsm.br/handle/1/13950 |
Resumo: | Niobium nitride (NbN) thin films can be hard and resistant not only to mechanical wear but also to chemically aggressive atmospheres. Additionally, they can present a superconducting transition in temperatures that are larger than classical BCS materials. But all these properties of the NbN thin film, and its performance in devices, strongly depends not only on its crystallographic structure, but also on the presence of crystallographic textures. In this work we approach the texture formation as a function of the thickness, in NbN thin films prepared by reactive magnetron sputtering onto Si substrates held at 300, 400, and 500°C. A transmition electron microscopy (TEM) image shows a columnar type morphology for the NbN deposited under our experimental conditions. The crystal structure and degree of texturization, for each thickness and temperature, were stablished by X-Ray diffractometry in the Bragg-Brentano configuration. Independent of the temperature of the substrate, two crystallographic textures of the cubic NbN ((200) and (111)) can be identified, but with contributions to the total volume that depends on the film thickness. Up to 300 nm, value that is almost independent of the substrate temperature, the grow of NbN with (111) planes parallel to the substrate dominates. Above this point, the picture inverts, and the material is mainly deposited along the h200i direction. This two-steps process is present even for the films deposite at 500°C, where the invertion in the process occurs together with the formation of NbN with hexagonal symmetry. Althought a similar behavior have been reported to TiN, this process was not up to now identified in NbN thin films. The results are discussed in terms of the models traditionally used for explain the formation of textures in nitrides. |
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Formação de texturas cristalográficas em filmes finos de NbNFormation of crystallographic textures in thin films of NbNNitreto de nióbioOrientação preferencialFilmes finosNiobium nitridePreferred orientationThin filmsCNPQ::CIENCIAS EXATAS E DA TERRA::FISICANiobium nitride (NbN) thin films can be hard and resistant not only to mechanical wear but also to chemically aggressive atmospheres. Additionally, they can present a superconducting transition in temperatures that are larger than classical BCS materials. But all these properties of the NbN thin film, and its performance in devices, strongly depends not only on its crystallographic structure, but also on the presence of crystallographic textures. In this work we approach the texture formation as a function of the thickness, in NbN thin films prepared by reactive magnetron sputtering onto Si substrates held at 300, 400, and 500°C. A transmition electron microscopy (TEM) image shows a columnar type morphology for the NbN deposited under our experimental conditions. The crystal structure and degree of texturization, for each thickness and temperature, were stablished by X-Ray diffractometry in the Bragg-Brentano configuration. Independent of the temperature of the substrate, two crystallographic textures of the cubic NbN ((200) and (111)) can be identified, but with contributions to the total volume that depends on the film thickness. Up to 300 nm, value that is almost independent of the substrate temperature, the grow of NbN with (111) planes parallel to the substrate dominates. Above this point, the picture inverts, and the material is mainly deposited along the h200i direction. This two-steps process is present even for the films deposite at 500°C, where the invertion in the process occurs together with the formation of NbN with hexagonal symmetry. Althought a similar behavior have been reported to TiN, this process was not up to now identified in NbN thin films. The results are discussed in terms of the models traditionally used for explain the formation of textures in nitrides.Conselho Nacional de Pesquisa e Desenvolvimento Científico e Tecnológico - CNPqFilmes finos de nitreto de nióbio (NbN) podem ter alta dureza e resistência ao desgaste mecânico e à atmosferas quimicamente reativas. Além disso, podem apresentar transição supercondutora para temperaturas relativamente altas se comparadas a de outros supercondutores BCS tradicionais. Entretanto, suas propriedades e seu desempenho em dispositivos depende muito, tanto da estrutura cristalográfica assumida pelo material, como da formação de texturas cristalográficas. Neste trabalho avaliamos a formação de texturas em função da espessura em filmes finos preparados por magnetron sputtering reativo sobre substratos de Si mantidos durante a deposição a 300, 400 e 500°C. Uma imagem de microscopia de transmissão eletrônica (TEM) mostra a formação de filmes com estrutura colunar. A estrutura cristalográfica e as texturas, para cada espessura e temperatura de deposição foram estabelecidas por difratometria de RX na configuração Bragg-Brentano. Para todas as temperaturas, duas orientações preferenciais do NbN cúbico ((200) e (111)) aparecem, mas seus percentuais sobre o volume total da amostra variam com a espessura. Até uma espessura próxima de 300 nm, valor que dependente pouco da temperatura, a formação do filme com planos (111) paralelos ao substrato é favorecida. Para espessuras maiores o processo é invertido e os cristais com direção h200i passam a predominar no crescimento. Este processo em duas etapas mantém mesmo a 500°C, onde é inversão é acompanhada da formação de NbN com estrutura hexagonal. Tal evolução em duas etapas, semelhante a outra identificada em TiN, não foi até aqui reportada na literatura para filmes finos de NbN. Os resultados são discutidos em termos dos modelos tradicionalmente utilizados para explicar a formação de texturas em nitretos.Universidade Federal de Santa MariaBrasilFísicaUFSMPrograma de Pós-Graduação em FísicaCentro de Ciências Naturais e ExatasDorneles, Lucio Strazzaboscohttp://lattes.cnpq.br/7244173039310066Tumelero, Milton Andrehttp://lattes.cnpq.br/0041450594172893Zimmer, Fábio Mallmannhttp://lattes.cnpq.br/6328420212181284Schneider, Angélica Daiane2018-07-30T19:17:04Z2018-07-30T19:17:04Z2017-12-20info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/masterThesisapplication/pdfhttp://repositorio.ufsm.br/handle/1/13950porAttribution-NonCommercial-NoDerivatives 4.0 Internationalhttp://creativecommons.org/licenses/by-nc-nd/4.0/info:eu-repo/semantics/openAccessreponame:Manancial - Repositório Digital da UFSMinstname:Universidade Federal de Santa Maria (UFSM)instacron:UFSM2022-08-12T15:26:52Zoai:repositorio.ufsm.br:1/13950Biblioteca Digital de Teses e Dissertaçõeshttps://repositorio.ufsm.br/ONGhttps://repositorio.ufsm.br/oai/requestatendimento.sib@ufsm.br||tedebc@gmail.comopendoar:2022-08-12T15:26:52Manancial - Repositório Digital da UFSM - Universidade Federal de Santa Maria (UFSM)false |
dc.title.none.fl_str_mv |
Formação de texturas cristalográficas em filmes finos de NbN Formation of crystallographic textures in thin films of NbN |
title |
Formação de texturas cristalográficas em filmes finos de NbN |
spellingShingle |
Formação de texturas cristalográficas em filmes finos de NbN Schneider, Angélica Daiane Nitreto de nióbio Orientação preferencial Filmes finos Niobium nitride Preferred orientation Thin films CNPQ::CIENCIAS EXATAS E DA TERRA::FISICA |
title_short |
Formação de texturas cristalográficas em filmes finos de NbN |
title_full |
Formação de texturas cristalográficas em filmes finos de NbN |
title_fullStr |
Formação de texturas cristalográficas em filmes finos de NbN |
title_full_unstemmed |
Formação de texturas cristalográficas em filmes finos de NbN |
title_sort |
Formação de texturas cristalográficas em filmes finos de NbN |
author |
Schneider, Angélica Daiane |
author_facet |
Schneider, Angélica Daiane |
author_role |
author |
dc.contributor.none.fl_str_mv |
Dorneles, Lucio Strazzabosco http://lattes.cnpq.br/7244173039310066 Tumelero, Milton Andre http://lattes.cnpq.br/0041450594172893 Zimmer, Fábio Mallmann http://lattes.cnpq.br/6328420212181284 |
dc.contributor.author.fl_str_mv |
Schneider, Angélica Daiane |
dc.subject.por.fl_str_mv |
Nitreto de nióbio Orientação preferencial Filmes finos Niobium nitride Preferred orientation Thin films CNPQ::CIENCIAS EXATAS E DA TERRA::FISICA |
topic |
Nitreto de nióbio Orientação preferencial Filmes finos Niobium nitride Preferred orientation Thin films CNPQ::CIENCIAS EXATAS E DA TERRA::FISICA |
description |
Niobium nitride (NbN) thin films can be hard and resistant not only to mechanical wear but also to chemically aggressive atmospheres. Additionally, they can present a superconducting transition in temperatures that are larger than classical BCS materials. But all these properties of the NbN thin film, and its performance in devices, strongly depends not only on its crystallographic structure, but also on the presence of crystallographic textures. In this work we approach the texture formation as a function of the thickness, in NbN thin films prepared by reactive magnetron sputtering onto Si substrates held at 300, 400, and 500°C. A transmition electron microscopy (TEM) image shows a columnar type morphology for the NbN deposited under our experimental conditions. The crystal structure and degree of texturization, for each thickness and temperature, were stablished by X-Ray diffractometry in the Bragg-Brentano configuration. Independent of the temperature of the substrate, two crystallographic textures of the cubic NbN ((200) and (111)) can be identified, but with contributions to the total volume that depends on the film thickness. Up to 300 nm, value that is almost independent of the substrate temperature, the grow of NbN with (111) planes parallel to the substrate dominates. Above this point, the picture inverts, and the material is mainly deposited along the h200i direction. This two-steps process is present even for the films deposite at 500°C, where the invertion in the process occurs together with the formation of NbN with hexagonal symmetry. Althought a similar behavior have been reported to TiN, this process was not up to now identified in NbN thin films. The results are discussed in terms of the models traditionally used for explain the formation of textures in nitrides. |
publishDate |
2017 |
dc.date.none.fl_str_mv |
2017-12-20 2018-07-30T19:17:04Z 2018-07-30T19:17:04Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/masterThesis |
format |
masterThesis |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://repositorio.ufsm.br/handle/1/13950 |
url |
http://repositorio.ufsm.br/handle/1/13950 |
dc.language.iso.fl_str_mv |
por |
language |
por |
dc.rights.driver.fl_str_mv |
Attribution-NonCommercial-NoDerivatives 4.0 International http://creativecommons.org/licenses/by-nc-nd/4.0/ info:eu-repo/semantics/openAccess |
rights_invalid_str_mv |
Attribution-NonCommercial-NoDerivatives 4.0 International http://creativecommons.org/licenses/by-nc-nd/4.0/ |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.publisher.none.fl_str_mv |
Universidade Federal de Santa Maria Brasil Física UFSM Programa de Pós-Graduação em Física Centro de Ciências Naturais e Exatas |
publisher.none.fl_str_mv |
Universidade Federal de Santa Maria Brasil Física UFSM Programa de Pós-Graduação em Física Centro de Ciências Naturais e Exatas |
dc.source.none.fl_str_mv |
reponame:Manancial - Repositório Digital da UFSM instname:Universidade Federal de Santa Maria (UFSM) instacron:UFSM |
instname_str |
Universidade Federal de Santa Maria (UFSM) |
instacron_str |
UFSM |
institution |
UFSM |
reponame_str |
Manancial - Repositório Digital da UFSM |
collection |
Manancial - Repositório Digital da UFSM |
repository.name.fl_str_mv |
Manancial - Repositório Digital da UFSM - Universidade Federal de Santa Maria (UFSM) |
repository.mail.fl_str_mv |
atendimento.sib@ufsm.br||tedebc@gmail.com |
_version_ |
1805922141577674752 |