Feasibility of RF Sputtering and PIIID for production of thin films from red mud

Detalhes bibliográficos
Autor(a) principal: Antunes, Maria Lúcia Pereira
Data de Publicação: 2014
Outros Autores: Cruz, Nilson Cristino Da, Delgado, Adriana De Oliveira, Durrant, Steven Frederick, Bortoleto, José Roberto Ribeiro, Lima, Vivian Faria, Santana, Pericles Lopes, Caseli, Luciano [UNIFESP], Rangel, Elidiane Cipriano
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Institucional da UNIFESP
dARK ID: ark:/48912/0013000013fmd
DOI: 10.1590/1516-1439.290714
Texto Completo: http://dx.doi.org/10.1590/1516-1439.290714
http://repositorio.unifesp.br/handle/11600/8602
Resumo: During the extraction of aluminum from bauxite, a waste of oxides containing traces of heavy metals in a highly alkaline matrix, called Red Mud (RM), is produced. In this study RM is characterized and the feasibility of using it as a precursor for the production of thin films by Plasma Sputtering and by Plasma Immersion Ion Implantation and Deposition (PIIID) is demonstrated. The chemical structure and composition, surface morphology, topography, and wettability of the films prepared using such methodologies were investigated. The films consist mainly of the elements aluminum, silicon, iron and carbon. Infrared spectroscopic analyses reveal the presence of C=O, C-H2, Fe(OH), Al-O and Si-C functionalities. RF Sputtering produced films with smoother surfaces, whereas PIIID produced granular surface structures. Surface contact angle measurements showed that despite the presence of oxides and hydroxides, the films are hydrophobic, thus exhibiting an interesting link between the physical and thermodynamical properties.
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spelling Feasibility of RF Sputtering and PIIID for production of thin films from red mudred mudthin filmsplasma sputteringPIIIDDuring the extraction of aluminum from bauxite, a waste of oxides containing traces of heavy metals in a highly alkaline matrix, called Red Mud (RM), is produced. In this study RM is characterized and the feasibility of using it as a precursor for the production of thin films by Plasma Sputtering and by Plasma Immersion Ion Implantation and Deposition (PIIID) is demonstrated. The chemical structure and composition, surface morphology, topography, and wettability of the films prepared using such methodologies were investigated. The films consist mainly of the elements aluminum, silicon, iron and carbon. Infrared spectroscopic analyses reveal the presence of C=O, C-H2, Fe(OH), Al-O and Si-C functionalities. RF Sputtering produced films with smoother surfaces, whereas PIIID produced granular surface structures. Surface contact angle measurements showed that despite the presence of oxides and hydroxides, the films are hydrophobic, thus exhibiting an interesting link between the physical and thermodynamical properties.Universidade Estadual PaulistaUniversidade Federal de São CarlosUniversidade Federal de São Paulo (UNIFESP)UNIFESPSciELOFundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP)Conselho Nacional de Desenvolvimento Científico e Tecnológico (CNPq)ABM, ABC, ABPolUniversidade Estadual Paulista (UNESP)Universidade Federal de São CarlosUniversidade Federal de São Paulo (UNIFESP)Antunes, Maria Lúcia PereiraCruz, Nilson Cristino DaDelgado, Adriana De OliveiraDurrant, Steven FrederickBortoleto, José Roberto RibeiroLima, Vivian FariaSantana, Pericles LopesCaseli, Luciano [UNIFESP]Rangel, Elidiane Cipriano2015-06-14T13:47:18Z2015-06-14T13:47:18Z2014-10-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersion1316-1323application/pdfhttp://dx.doi.org/10.1590/1516-1439.290714Materials Research. ABM, ABC, ABPol, v. 17, n. 5, p. 1316-1323, 2014.10.1590/1516-1439.290714S1516-14392014000500026.pdf1516-1439S1516-14392014000500026http://repositorio.unifesp.br/handle/11600/8602ark:/48912/0013000013fmdengMaterials Researchinfo:eu-repo/semantics/openAccessreponame:Repositório Institucional da UNIFESPinstname:Universidade Federal de São Paulo (UNIFESP)instacron:UNIFESP2024-08-05T08:23:41Zoai:repositorio.unifesp.br/:11600/8602Repositório InstitucionalPUBhttp://www.repositorio.unifesp.br/oai/requestbiblioteca.csp@unifesp.bropendoar:34652024-12-11T20:53:35.497325Repositório Institucional da UNIFESP - Universidade Federal de São Paulo (UNIFESP)false
dc.title.none.fl_str_mv Feasibility of RF Sputtering and PIIID for production of thin films from red mud
title Feasibility of RF Sputtering and PIIID for production of thin films from red mud
spellingShingle Feasibility of RF Sputtering and PIIID for production of thin films from red mud
Feasibility of RF Sputtering and PIIID for production of thin films from red mud
Antunes, Maria Lúcia Pereira
red mud
thin films
plasma sputtering
PIIID
Antunes, Maria Lúcia Pereira
red mud
thin films
plasma sputtering
PIIID
title_short Feasibility of RF Sputtering and PIIID for production of thin films from red mud
title_full Feasibility of RF Sputtering and PIIID for production of thin films from red mud
title_fullStr Feasibility of RF Sputtering and PIIID for production of thin films from red mud
Feasibility of RF Sputtering and PIIID for production of thin films from red mud
title_full_unstemmed Feasibility of RF Sputtering and PIIID for production of thin films from red mud
Feasibility of RF Sputtering and PIIID for production of thin films from red mud
title_sort Feasibility of RF Sputtering and PIIID for production of thin films from red mud
author Antunes, Maria Lúcia Pereira
author_facet Antunes, Maria Lúcia Pereira
Antunes, Maria Lúcia Pereira
Cruz, Nilson Cristino Da
Delgado, Adriana De Oliveira
Durrant, Steven Frederick
Bortoleto, José Roberto Ribeiro
Lima, Vivian Faria
Santana, Pericles Lopes
Caseli, Luciano [UNIFESP]
Rangel, Elidiane Cipriano
Cruz, Nilson Cristino Da
Delgado, Adriana De Oliveira
Durrant, Steven Frederick
Bortoleto, José Roberto Ribeiro
Lima, Vivian Faria
Santana, Pericles Lopes
Caseli, Luciano [UNIFESP]
Rangel, Elidiane Cipriano
author_role author
author2 Cruz, Nilson Cristino Da
Delgado, Adriana De Oliveira
Durrant, Steven Frederick
Bortoleto, José Roberto Ribeiro
Lima, Vivian Faria
Santana, Pericles Lopes
Caseli, Luciano [UNIFESP]
Rangel, Elidiane Cipriano
author2_role author
author
author
author
author
author
author
author
dc.contributor.none.fl_str_mv Universidade Estadual Paulista (UNESP)
Universidade Federal de São Carlos
Universidade Federal de São Paulo (UNIFESP)
dc.contributor.author.fl_str_mv Antunes, Maria Lúcia Pereira
Cruz, Nilson Cristino Da
Delgado, Adriana De Oliveira
Durrant, Steven Frederick
Bortoleto, José Roberto Ribeiro
Lima, Vivian Faria
Santana, Pericles Lopes
Caseli, Luciano [UNIFESP]
Rangel, Elidiane Cipriano
dc.subject.por.fl_str_mv red mud
thin films
plasma sputtering
PIIID
topic red mud
thin films
plasma sputtering
PIIID
description During the extraction of aluminum from bauxite, a waste of oxides containing traces of heavy metals in a highly alkaline matrix, called Red Mud (RM), is produced. In this study RM is characterized and the feasibility of using it as a precursor for the production of thin films by Plasma Sputtering and by Plasma Immersion Ion Implantation and Deposition (PIIID) is demonstrated. The chemical structure and composition, surface morphology, topography, and wettability of the films prepared using such methodologies were investigated. The films consist mainly of the elements aluminum, silicon, iron and carbon. Infrared spectroscopic analyses reveal the presence of C=O, C-H2, Fe(OH), Al-O and Si-C functionalities. RF Sputtering produced films with smoother surfaces, whereas PIIID produced granular surface structures. Surface contact angle measurements showed that despite the presence of oxides and hydroxides, the films are hydrophobic, thus exhibiting an interesting link between the physical and thermodynamical properties.
publishDate 2014
dc.date.none.fl_str_mv 2014-10-01
2015-06-14T13:47:18Z
2015-06-14T13:47:18Z
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://dx.doi.org/10.1590/1516-1439.290714
Materials Research. ABM, ABC, ABPol, v. 17, n. 5, p. 1316-1323, 2014.
10.1590/1516-1439.290714
S1516-14392014000500026.pdf
1516-1439
S1516-14392014000500026
http://repositorio.unifesp.br/handle/11600/8602
dc.identifier.dark.fl_str_mv ark:/48912/0013000013fmd
url http://dx.doi.org/10.1590/1516-1439.290714
http://repositorio.unifesp.br/handle/11600/8602
identifier_str_mv Materials Research. ABM, ABC, ABPol, v. 17, n. 5, p. 1316-1323, 2014.
10.1590/1516-1439.290714
S1516-14392014000500026.pdf
1516-1439
S1516-14392014000500026
ark:/48912/0013000013fmd
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv Materials Research
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv 1316-1323
application/pdf
dc.publisher.none.fl_str_mv ABM, ABC, ABPol
publisher.none.fl_str_mv ABM, ABC, ABPol
dc.source.none.fl_str_mv reponame:Repositório Institucional da UNIFESP
instname:Universidade Federal de São Paulo (UNIFESP)
instacron:UNIFESP
instname_str Universidade Federal de São Paulo (UNIFESP)
instacron_str UNIFESP
institution UNIFESP
reponame_str Repositório Institucional da UNIFESP
collection Repositório Institucional da UNIFESP
repository.name.fl_str_mv Repositório Institucional da UNIFESP - Universidade Federal de São Paulo (UNIFESP)
repository.mail.fl_str_mv biblioteca.csp@unifesp.br
_version_ 1822182293739929600
dc.identifier.doi.none.fl_str_mv 10.1590/1516-1439.290714