Feasibility of RF Sputtering and PIIID for production of thin films from red mud

Detalhes bibliográficos
Autor(a) principal: Antunes, Maria Lúcia Pereira [UNESP]
Data de Publicação: 2014
Outros Autores: Cruz, Nilson Cristino Da [UNESP], Delgado, Adriana De Oliveira, Durrant, Steven Frederick [UNESP], Bortoleto, José Roberto Ribeiro [UNESP], Lima, Vivian Faria [UNESP], Santana, Pericles Lopes [UNESP], Caseli, Luciano, Rangel, Elidiane Cipriano [UNESP]
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Institucional da UNESP
Texto Completo: http://dx.doi.org/10.1590/1516-1439.290714
http://hdl.handle.net/11449/114338
Resumo: During the extraction of aluminum from bauxite, a waste of oxides containing traces of heavy metals in a highly alkaline matrix, called Red Mud (RM), is produced. In this study RM is characterized and the feasibility of using it as a precursor for the production of thin films by Plasma Sputtering and by Plasma Immersion Ion Implantation and Deposition (PIIID) is demonstrated. The chemical structure and composition, surface morphology, topography, and wettability of the films prepared using such methodologies were investigated. The films consist mainly of the elements aluminum, silicon, iron and carbon. Infrared spectroscopic analyses reveal the presence of C=O, C-H2, Fe(OH), Al-O and Si-C functionalities. RF Sputtering produced films with smoother surfaces, whereas PIIID produced granular surface structures. Surface contact angle measurements showed that despite the presence of oxides and hydroxides, the films are hydrophobic, thus exhibiting an interesting link between the physical and thermodynamical properties.
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spelling Feasibility of RF Sputtering and PIIID for production of thin films from red mudred mudthin filmsplasma sputteringPIIIDDuring the extraction of aluminum from bauxite, a waste of oxides containing traces of heavy metals in a highly alkaline matrix, called Red Mud (RM), is produced. In this study RM is characterized and the feasibility of using it as a precursor for the production of thin films by Plasma Sputtering and by Plasma Immersion Ion Implantation and Deposition (PIIID) is demonstrated. The chemical structure and composition, surface morphology, topography, and wettability of the films prepared using such methodologies were investigated. The films consist mainly of the elements aluminum, silicon, iron and carbon. Infrared spectroscopic analyses reveal the presence of C=O, C-H2, Fe(OH), Al-O and Si-C functionalities. RF Sputtering produced films with smoother surfaces, whereas PIIID produced granular surface structures. Surface contact angle measurements showed that despite the presence of oxides and hydroxides, the films are hydrophobic, thus exhibiting an interesting link between the physical and thermodynamical properties.Fundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP)Conselho Nacional de Desenvolvimento Científico e Tecnológico (CNPq)Coordenação de Aperfeiçoamento de Pessoal de Nível Superior (CAPES)Universidade Estadual PaulistaUniversidade Federal de São CarlosUniversidade Federal de São PauloUniversidade Estadual PaulistaABM, ABC, ABPolUniversidade Estadual Paulista (Unesp)Universidade Federal de São Carlos (UFSCar)Universidade Federal de São Paulo (UNIFESP)Antunes, Maria Lúcia Pereira [UNESP]Cruz, Nilson Cristino Da [UNESP]Delgado, Adriana De OliveiraDurrant, Steven Frederick [UNESP]Bortoleto, José Roberto Ribeiro [UNESP]Lima, Vivian Faria [UNESP]Santana, Pericles Lopes [UNESP]Caseli, LucianoRangel, Elidiane Cipriano [UNESP]2015-02-02T12:39:27Z2015-02-02T12:39:27Z2014-10-01info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/article1316-1323application/pdfhttp://dx.doi.org/10.1590/1516-1439.290714Materials Research. ABM, ABC, ABPol, v. 17, n. 5, p. 1316-1323, 2014.1516-1439http://hdl.handle.net/11449/11433810.1590/1516-1439.290714S1516-14392014000500026S1516-14392014000500026.pdf71573272200481380000-0002-4511-3768SciELOreponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPengMaterials Research1.1030,398info:eu-repo/semantics/openAccess2023-12-18T06:17:04Zoai:repositorio.unesp.br:11449/114338Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462023-12-18T06:17:04Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false
dc.title.none.fl_str_mv Feasibility of RF Sputtering and PIIID for production of thin films from red mud
title Feasibility of RF Sputtering and PIIID for production of thin films from red mud
spellingShingle Feasibility of RF Sputtering and PIIID for production of thin films from red mud
Antunes, Maria Lúcia Pereira [UNESP]
red mud
thin films
plasma sputtering
PIIID
title_short Feasibility of RF Sputtering and PIIID for production of thin films from red mud
title_full Feasibility of RF Sputtering and PIIID for production of thin films from red mud
title_fullStr Feasibility of RF Sputtering and PIIID for production of thin films from red mud
title_full_unstemmed Feasibility of RF Sputtering and PIIID for production of thin films from red mud
title_sort Feasibility of RF Sputtering and PIIID for production of thin films from red mud
author Antunes, Maria Lúcia Pereira [UNESP]
author_facet Antunes, Maria Lúcia Pereira [UNESP]
Cruz, Nilson Cristino Da [UNESP]
Delgado, Adriana De Oliveira
Durrant, Steven Frederick [UNESP]
Bortoleto, José Roberto Ribeiro [UNESP]
Lima, Vivian Faria [UNESP]
Santana, Pericles Lopes [UNESP]
Caseli, Luciano
Rangel, Elidiane Cipriano [UNESP]
author_role author
author2 Cruz, Nilson Cristino Da [UNESP]
Delgado, Adriana De Oliveira
Durrant, Steven Frederick [UNESP]
Bortoleto, José Roberto Ribeiro [UNESP]
Lima, Vivian Faria [UNESP]
Santana, Pericles Lopes [UNESP]
Caseli, Luciano
Rangel, Elidiane Cipriano [UNESP]
author2_role author
author
author
author
author
author
author
author
dc.contributor.none.fl_str_mv Universidade Estadual Paulista (Unesp)
Universidade Federal de São Carlos (UFSCar)
Universidade Federal de São Paulo (UNIFESP)
dc.contributor.author.fl_str_mv Antunes, Maria Lúcia Pereira [UNESP]
Cruz, Nilson Cristino Da [UNESP]
Delgado, Adriana De Oliveira
Durrant, Steven Frederick [UNESP]
Bortoleto, José Roberto Ribeiro [UNESP]
Lima, Vivian Faria [UNESP]
Santana, Pericles Lopes [UNESP]
Caseli, Luciano
Rangel, Elidiane Cipriano [UNESP]
dc.subject.por.fl_str_mv red mud
thin films
plasma sputtering
PIIID
topic red mud
thin films
plasma sputtering
PIIID
description During the extraction of aluminum from bauxite, a waste of oxides containing traces of heavy metals in a highly alkaline matrix, called Red Mud (RM), is produced. In this study RM is characterized and the feasibility of using it as a precursor for the production of thin films by Plasma Sputtering and by Plasma Immersion Ion Implantation and Deposition (PIIID) is demonstrated. The chemical structure and composition, surface morphology, topography, and wettability of the films prepared using such methodologies were investigated. The films consist mainly of the elements aluminum, silicon, iron and carbon. Infrared spectroscopic analyses reveal the presence of C=O, C-H2, Fe(OH), Al-O and Si-C functionalities. RF Sputtering produced films with smoother surfaces, whereas PIIID produced granular surface structures. Surface contact angle measurements showed that despite the presence of oxides and hydroxides, the films are hydrophobic, thus exhibiting an interesting link between the physical and thermodynamical properties.
publishDate 2014
dc.date.none.fl_str_mv 2014-10-01
2015-02-02T12:39:27Z
2015-02-02T12:39:27Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://dx.doi.org/10.1590/1516-1439.290714
Materials Research. ABM, ABC, ABPol, v. 17, n. 5, p. 1316-1323, 2014.
1516-1439
http://hdl.handle.net/11449/114338
10.1590/1516-1439.290714
S1516-14392014000500026
S1516-14392014000500026.pdf
7157327220048138
0000-0002-4511-3768
url http://dx.doi.org/10.1590/1516-1439.290714
http://hdl.handle.net/11449/114338
identifier_str_mv Materials Research. ABM, ABC, ABPol, v. 17, n. 5, p. 1316-1323, 2014.
1516-1439
10.1590/1516-1439.290714
S1516-14392014000500026
S1516-14392014000500026.pdf
7157327220048138
0000-0002-4511-3768
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv Materials Research
1.103
0,398
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv 1316-1323
application/pdf
dc.publisher.none.fl_str_mv ABM, ABC, ABPol
publisher.none.fl_str_mv ABM, ABC, ABPol
dc.source.none.fl_str_mv SciELO
reponame:Repositório Institucional da UNESP
instname:Universidade Estadual Paulista (UNESP)
instacron:UNESP
instname_str Universidade Estadual Paulista (UNESP)
instacron_str UNESP
institution UNESP
reponame_str Repositório Institucional da UNESP
collection Repositório Institucional da UNESP
repository.name.fl_str_mv Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)
repository.mail.fl_str_mv
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