INFLUENCE OF THE SILICON INTERLAYER ON DIAMOND-LIKE CARBON FILMS DEPOSITED ON GLASS SUBSTRATES
Autor(a) principal: | |
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Data de Publicação: | 2012 |
Outros Autores: | , , , |
Tipo de documento: | Artigo |
Idioma: | por |
Título da fonte: | Revista UniVap (online) |
Texto Completo: | https://revista.univap.br/index.php/revistaunivap/article/view/50 |
Resumo: | Diamond-like carbon (DLC) films as a hard protective coating have achieved great success in a diversity of technological applications. However, adhesion of DLC films to substrates can restrict their applications. The influence of a silicon interlayer in order to improve DLC adhesion on glass substrates was investigated. Amorphous silicon interlayer and DLC films were deposited using plasma enhanced chemical vapor deposition from silane and methane, respectively. The bonding structure, transmittance, refraction index, and adherence of the films were also evaluated regarding the thickness of the silicon interlayer. Raman scattering spectroscopy did not show any substantial difference in DLC structure due to the interlayer thickness of the silicon. Optical measurements showed a sharp decrease of transmittance in the ultra-violet region caused by the fundamental absorption of the light. In addition, the absorption edge of transmittance shifted toward longer wavelength side in the ultra-violet region as the thickness of the silicon interlayer increased. The tribological results showed an increase of DLC adherence as the silicon interlayer increased, which was characterized by less cracks around the grooves. |
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INFLUENCE OF THE SILICON INTERLAYER ON DIAMOND-LIKE CARBON FILMS DEPOSITED ON GLASS SUBSTRATESdiamond-like carbonsilicon interlayeradhesionoptical propertiesFilmes finosDiamond-like carbon (DLC) films as a hard protective coating have achieved great success in a diversity of technological applications. However, adhesion of DLC films to substrates can restrict their applications. The influence of a silicon interlayer in order to improve DLC adhesion on glass substrates was investigated. Amorphous silicon interlayer and DLC films were deposited using plasma enhanced chemical vapor deposition from silane and methane, respectively. The bonding structure, transmittance, refraction index, and adherence of the films were also evaluated regarding the thickness of the silicon interlayer. Raman scattering spectroscopy did not show any substantial difference in DLC structure due to the interlayer thickness of the silicon. Optical measurements showed a sharp decrease of transmittance in the ultra-violet region caused by the fundamental absorption of the light. In addition, the absorption edge of transmittance shifted toward longer wavelength side in the ultra-violet region as the thickness of the silicon interlayer increased. The tribological results showed an increase of DLC adherence as the silicon interlayer increased, which was characterized by less cracks around the grooves.IBICT2012-06-29info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionQuantitativoapplication/pdfhttps://revista.univap.br/index.php/revistaunivap/article/view/5010.18066/revunivap.v18i31.50Revista Univap; Vol. 18 No. 31 (2012): Revista Univap online / ISSN 2237-1753; 112-121Revista Univap; v. 18 n. 31 (2012): Revista Univap online / ISSN 2237-1753; 112-1212237-17531517-327510.18066/revunivap.v18i31reponame:Revista UniVap (online)instname:Universidade do Vale do Paraíba (Univap)instacron:UNIVAPporhttps://revista.univap.br/index.php/revistaunivap/article/view/50/129Oliveira, Deiler Antonio LimaCorat, Evaldo JoséTrava-Airoldi, Vladimir JesusLobo, Anderson OliveiraMarciano, Fernanda Robertainfo:eu-repo/semantics/openAccess2023-01-13T17:54:16Zoai:ojs.biblioteca.univap.br:article/50Revistahttps://revista.univap.br/index.php/revistaunivapPRIhttps://revista.univap.br/index.php/revistaunivap/oairevista@univap.br2237-17532237-1753opendoar:2023-01-13T17:54:16Revista UniVap (online) - Universidade do Vale do Paraíba (Univap)false |
dc.title.none.fl_str_mv |
INFLUENCE OF THE SILICON INTERLAYER ON DIAMOND-LIKE CARBON FILMS DEPOSITED ON GLASS SUBSTRATES |
title |
INFLUENCE OF THE SILICON INTERLAYER ON DIAMOND-LIKE CARBON FILMS DEPOSITED ON GLASS SUBSTRATES |
spellingShingle |
INFLUENCE OF THE SILICON INTERLAYER ON DIAMOND-LIKE CARBON FILMS DEPOSITED ON GLASS SUBSTRATES Oliveira, Deiler Antonio Lima diamond-like carbon silicon interlayer adhesion optical properties Filmes finos |
title_short |
INFLUENCE OF THE SILICON INTERLAYER ON DIAMOND-LIKE CARBON FILMS DEPOSITED ON GLASS SUBSTRATES |
title_full |
INFLUENCE OF THE SILICON INTERLAYER ON DIAMOND-LIKE CARBON FILMS DEPOSITED ON GLASS SUBSTRATES |
title_fullStr |
INFLUENCE OF THE SILICON INTERLAYER ON DIAMOND-LIKE CARBON FILMS DEPOSITED ON GLASS SUBSTRATES |
title_full_unstemmed |
INFLUENCE OF THE SILICON INTERLAYER ON DIAMOND-LIKE CARBON FILMS DEPOSITED ON GLASS SUBSTRATES |
title_sort |
INFLUENCE OF THE SILICON INTERLAYER ON DIAMOND-LIKE CARBON FILMS DEPOSITED ON GLASS SUBSTRATES |
author |
Oliveira, Deiler Antonio Lima |
author_facet |
Oliveira, Deiler Antonio Lima Corat, Evaldo José Trava-Airoldi, Vladimir Jesus Lobo, Anderson Oliveira Marciano, Fernanda Roberta |
author_role |
author |
author2 |
Corat, Evaldo José Trava-Airoldi, Vladimir Jesus Lobo, Anderson Oliveira Marciano, Fernanda Roberta |
author2_role |
author author author author |
dc.contributor.author.fl_str_mv |
Oliveira, Deiler Antonio Lima Corat, Evaldo José Trava-Airoldi, Vladimir Jesus Lobo, Anderson Oliveira Marciano, Fernanda Roberta |
dc.subject.por.fl_str_mv |
diamond-like carbon silicon interlayer adhesion optical properties Filmes finos |
topic |
diamond-like carbon silicon interlayer adhesion optical properties Filmes finos |
description |
Diamond-like carbon (DLC) films as a hard protective coating have achieved great success in a diversity of technological applications. However, adhesion of DLC films to substrates can restrict their applications. The influence of a silicon interlayer in order to improve DLC adhesion on glass substrates was investigated. Amorphous silicon interlayer and DLC films were deposited using plasma enhanced chemical vapor deposition from silane and methane, respectively. The bonding structure, transmittance, refraction index, and adherence of the films were also evaluated regarding the thickness of the silicon interlayer. Raman scattering spectroscopy did not show any substantial difference in DLC structure due to the interlayer thickness of the silicon. Optical measurements showed a sharp decrease of transmittance in the ultra-violet region caused by the fundamental absorption of the light. In addition, the absorption edge of transmittance shifted toward longer wavelength side in the ultra-violet region as the thickness of the silicon interlayer increased. The tribological results showed an increase of DLC adherence as the silicon interlayer increased, which was characterized by less cracks around the grooves. |
publishDate |
2012 |
dc.date.none.fl_str_mv |
2012-06-29 |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion Quantitativo |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
https://revista.univap.br/index.php/revistaunivap/article/view/50 10.18066/revunivap.v18i31.50 |
url |
https://revista.univap.br/index.php/revistaunivap/article/view/50 |
identifier_str_mv |
10.18066/revunivap.v18i31.50 |
dc.language.iso.fl_str_mv |
por |
language |
por |
dc.relation.none.fl_str_mv |
https://revista.univap.br/index.php/revistaunivap/article/view/50/129 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.publisher.none.fl_str_mv |
IBICT |
publisher.none.fl_str_mv |
IBICT |
dc.source.none.fl_str_mv |
Revista Univap; Vol. 18 No. 31 (2012): Revista Univap online / ISSN 2237-1753; 112-121 Revista Univap; v. 18 n. 31 (2012): Revista Univap online / ISSN 2237-1753; 112-121 2237-1753 1517-3275 10.18066/revunivap.v18i31 reponame:Revista UniVap (online) instname:Universidade do Vale do Paraíba (Univap) instacron:UNIVAP |
instname_str |
Universidade do Vale do Paraíba (Univap) |
instacron_str |
UNIVAP |
institution |
UNIVAP |
reponame_str |
Revista UniVap (online) |
collection |
Revista UniVap (online) |
repository.name.fl_str_mv |
Revista UniVap (online) - Universidade do Vale do Paraíba (Univap) |
repository.mail.fl_str_mv |
revista@univap.br |
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1797042284771934208 |