INFLUENCE OF THE SILICON INTERLAYER ON DIAMOND-LIKE CARBON FILMS DEPOSITED ON GLASS SUBSTRATES

Detalhes bibliográficos
Autor(a) principal: Oliveira, Deiler Antonio Lima
Data de Publicação: 2012
Outros Autores: Corat, Evaldo José, Trava-Airoldi, Vladimir Jesus, Lobo, Anderson Oliveira, Marciano, Fernanda Roberta
Tipo de documento: Artigo
Idioma: por
Título da fonte: Revista UniVap (online)
Texto Completo: https://revista.univap.br/index.php/revistaunivap/article/view/50
Resumo: Diamond-like carbon (DLC) films as a hard protective coating have achieved great success in a diversity of technological applications. However, adhesion of DLC films to substrates can restrict their applications. The influence of a silicon interlayer in order to improve DLC adhesion on glass substrates was investigated. Amorphous silicon interlayer and DLC films were deposited using plasma enhanced chemical vapor deposition from silane and methane, respectively. The bonding structure, transmittance, refraction index, and adherence of the films were also evaluated regarding the thickness of the silicon interlayer. Raman scattering spectroscopy did not show any substantial difference in DLC structure due to the interlayer thickness of the silicon. Optical measurements showed a sharp decrease of transmittance in the ultra-violet region caused by the fundamental absorption of the light. In addition, the absorption edge of transmittance shifted toward longer wavelength side in the ultra-violet region as the thickness of the silicon interlayer increased. The tribological results showed an increase of DLC adherence as the silicon interlayer increased, which was characterized by less cracks around the grooves.
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spelling INFLUENCE OF THE SILICON INTERLAYER ON DIAMOND-LIKE CARBON FILMS DEPOSITED ON GLASS SUBSTRATESdiamond-like carbonsilicon interlayeradhesionoptical propertiesFilmes finosDiamond-like carbon (DLC) films as a hard protective coating have achieved great success in a diversity of technological applications. However, adhesion of DLC films to substrates can restrict their applications. The influence of a silicon interlayer in order to improve DLC adhesion on glass substrates was investigated. Amorphous silicon interlayer and DLC films were deposited using plasma enhanced chemical vapor deposition from silane and methane, respectively. The bonding structure, transmittance, refraction index, and adherence of the films were also evaluated regarding the thickness of the silicon interlayer. Raman scattering spectroscopy did not show any substantial difference in DLC structure due to the interlayer thickness of the silicon. Optical measurements showed a sharp decrease of transmittance in the ultra-violet region caused by the fundamental absorption of the light. In addition, the absorption edge of transmittance shifted toward longer wavelength side in the ultra-violet region as the thickness of the silicon interlayer increased. The tribological results showed an increase of DLC adherence as the silicon interlayer increased, which was characterized by less cracks around the grooves.IBICT2012-06-29info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionQuantitativoapplication/pdfhttps://revista.univap.br/index.php/revistaunivap/article/view/5010.18066/revunivap.v18i31.50Revista Univap; Vol. 18 No. 31 (2012): Revista Univap online / ISSN 2237-1753; 112-121Revista Univap; v. 18 n. 31 (2012): Revista Univap online / ISSN 2237-1753; 112-1212237-17531517-327510.18066/revunivap.v18i31reponame:Revista UniVap (online)instname:Universidade do Vale do Paraíba (Univap)instacron:UNIVAPporhttps://revista.univap.br/index.php/revistaunivap/article/view/50/129Oliveira, Deiler Antonio LimaCorat, Evaldo JoséTrava-Airoldi, Vladimir JesusLobo, Anderson OliveiraMarciano, Fernanda Robertainfo:eu-repo/semantics/openAccess2023-01-13T17:54:16Zoai:ojs.biblioteca.univap.br:article/50Revistahttps://revista.univap.br/index.php/revistaunivapPRIhttps://revista.univap.br/index.php/revistaunivap/oairevista@univap.br2237-17532237-1753opendoar:2023-01-13T17:54:16Revista UniVap (online) - Universidade do Vale do Paraíba (Univap)false
dc.title.none.fl_str_mv INFLUENCE OF THE SILICON INTERLAYER ON DIAMOND-LIKE CARBON FILMS DEPOSITED ON GLASS SUBSTRATES
title INFLUENCE OF THE SILICON INTERLAYER ON DIAMOND-LIKE CARBON FILMS DEPOSITED ON GLASS SUBSTRATES
spellingShingle INFLUENCE OF THE SILICON INTERLAYER ON DIAMOND-LIKE CARBON FILMS DEPOSITED ON GLASS SUBSTRATES
Oliveira, Deiler Antonio Lima
diamond-like carbon
silicon interlayer
adhesion
optical properties
Filmes finos
title_short INFLUENCE OF THE SILICON INTERLAYER ON DIAMOND-LIKE CARBON FILMS DEPOSITED ON GLASS SUBSTRATES
title_full INFLUENCE OF THE SILICON INTERLAYER ON DIAMOND-LIKE CARBON FILMS DEPOSITED ON GLASS SUBSTRATES
title_fullStr INFLUENCE OF THE SILICON INTERLAYER ON DIAMOND-LIKE CARBON FILMS DEPOSITED ON GLASS SUBSTRATES
title_full_unstemmed INFLUENCE OF THE SILICON INTERLAYER ON DIAMOND-LIKE CARBON FILMS DEPOSITED ON GLASS SUBSTRATES
title_sort INFLUENCE OF THE SILICON INTERLAYER ON DIAMOND-LIKE CARBON FILMS DEPOSITED ON GLASS SUBSTRATES
author Oliveira, Deiler Antonio Lima
author_facet Oliveira, Deiler Antonio Lima
Corat, Evaldo José
Trava-Airoldi, Vladimir Jesus
Lobo, Anderson Oliveira
Marciano, Fernanda Roberta
author_role author
author2 Corat, Evaldo José
Trava-Airoldi, Vladimir Jesus
Lobo, Anderson Oliveira
Marciano, Fernanda Roberta
author2_role author
author
author
author
dc.contributor.author.fl_str_mv Oliveira, Deiler Antonio Lima
Corat, Evaldo José
Trava-Airoldi, Vladimir Jesus
Lobo, Anderson Oliveira
Marciano, Fernanda Roberta
dc.subject.por.fl_str_mv diamond-like carbon
silicon interlayer
adhesion
optical properties
Filmes finos
topic diamond-like carbon
silicon interlayer
adhesion
optical properties
Filmes finos
description Diamond-like carbon (DLC) films as a hard protective coating have achieved great success in a diversity of technological applications. However, adhesion of DLC films to substrates can restrict their applications. The influence of a silicon interlayer in order to improve DLC adhesion on glass substrates was investigated. Amorphous silicon interlayer and DLC films were deposited using plasma enhanced chemical vapor deposition from silane and methane, respectively. The bonding structure, transmittance, refraction index, and adherence of the films were also evaluated regarding the thickness of the silicon interlayer. Raman scattering spectroscopy did not show any substantial difference in DLC structure due to the interlayer thickness of the silicon. Optical measurements showed a sharp decrease of transmittance in the ultra-violet region caused by the fundamental absorption of the light. In addition, the absorption edge of transmittance shifted toward longer wavelength side in the ultra-violet region as the thickness of the silicon interlayer increased. The tribological results showed an increase of DLC adherence as the silicon interlayer increased, which was characterized by less cracks around the grooves.
publishDate 2012
dc.date.none.fl_str_mv 2012-06-29
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
info:eu-repo/semantics/publishedVersion
Quantitativo
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv https://revista.univap.br/index.php/revistaunivap/article/view/50
10.18066/revunivap.v18i31.50
url https://revista.univap.br/index.php/revistaunivap/article/view/50
identifier_str_mv 10.18066/revunivap.v18i31.50
dc.language.iso.fl_str_mv por
language por
dc.relation.none.fl_str_mv https://revista.univap.br/index.php/revistaunivap/article/view/50/129
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv IBICT
publisher.none.fl_str_mv IBICT
dc.source.none.fl_str_mv Revista Univap; Vol. 18 No. 31 (2012): Revista Univap online / ISSN 2237-1753; 112-121
Revista Univap; v. 18 n. 31 (2012): Revista Univap online / ISSN 2237-1753; 112-121
2237-1753
1517-3275
10.18066/revunivap.v18i31
reponame:Revista UniVap (online)
instname:Universidade do Vale do Paraíba (Univap)
instacron:UNIVAP
instname_str Universidade do Vale do Paraíba (Univap)
instacron_str UNIVAP
institution UNIVAP
reponame_str Revista UniVap (online)
collection Revista UniVap (online)
repository.name.fl_str_mv Revista UniVap (online) - Universidade do Vale do Paraíba (Univap)
repository.mail.fl_str_mv revista@univap.br
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