Nano-displacement measurements of a new piezoelectric flextensional actuator by using a high dynamic range interferometry homodyne method
Autor(a) principal: | |
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Data de Publicação: | 2014 |
Outros Autores: | , , , |
Tipo de documento: | Artigo de conferência |
Idioma: | eng |
Título da fonte: | Repositório Institucional da UNESP |
Texto Completo: | http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6861002 http://hdl.handle.net/11449/130212 |
Resumo: | Piezoelectric flextensional actuator (PFA) devices consist in a technology in development, with increasing number of applications in precision mechanics such as nanotechnology equipments, electronic microscopy instruments, cell manipulation systems, microsurgery tools, and lens positioner for laser interferometer to name a few. In turn, optical interferometry is an adequate technique to measure nano/micro displacements and to characterize these PFAs. An efficient method for optical phase detection is the n-commuted Pernick method (n-CPM), where only a limited number of frequencies in the magnitude spectrum of the photo detected signal are used, without the need to know the phase spectrum. The n-CPM has the advantages of being passive homodyne, direct, self-consistent, and is immune to fading. The dynamic range for optical phase measurements is from 0.2 rad to 100 pi rad. In this work, by using the n-CPM, a new PFA prototype designed by topology-optimization method is tested in terms of displacement linearity (relative to applied voltage) and frequency response. |
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Nano-displacement measurements of a new piezoelectric flextensional actuator by using a high dynamic range interferometry homodyne methodNanometric displacement measurementsHomodyne phase detectionPiezoelectric flextensional actuatorPiezoelectric flextensional actuator (PFA) devices consist in a technology in development, with increasing number of applications in precision mechanics such as nanotechnology equipments, electronic microscopy instruments, cell manipulation systems, microsurgery tools, and lens positioner for laser interferometer to name a few. In turn, optical interferometry is an adequate technique to measure nano/micro displacements and to characterize these PFAs. An efficient method for optical phase detection is the n-commuted Pernick method (n-CPM), where only a limited number of frequencies in the magnitude spectrum of the photo detected signal are used, without the need to know the phase spectrum. The n-CPM has the advantages of being passive homodyne, direct, self-consistent, and is immune to fading. The dynamic range for optical phase measurements is from 0.2 rad to 100 pi rad. In this work, by using the n-CPM, a new PFA prototype designed by topology-optimization method is tested in terms of displacement linearity (relative to applied voltage) and frequency response.Conselho Nacional de Desenvolvimento Científico e Tecnológico (CNPq)Universidade Estadual Paulista (UNESP), Faculdade de Engenharia de Ilha Solteira (FEIS), Departamento de Engenharia Elétrica, Ilha Solteira, SP, BrasilUniversidade de São Paulo (USP), Escola Politécnica (POLI), Departamento de Engrenharia Mecatrônica e de Sistemas Mecânicos, São Paulo, SP, BrasilUniversidade Estadual Paulista (UNESP), Faculdade de Engenharia de Ilha Solteira (FEIS), Departamento de Engenharia Elétrica, Ilha Solteira, SP, BrasilCNPq: 478817/2012-6CNPq: 304121/2013-4IEEEUniversidade Estadual Paulista (Unesp)Universidade de São Paulo (USP)Berton, Paula Lalucci [UNESP]Galeti, Jose Henrique [UNESP]Higuti, Ricardo Tokio [UNESP]Kitano, Claudio [UNESP]Nelli Silva, Emilio Carlos2015-11-03T15:30:18Z2015-11-03T15:30:18Z2014-05-12info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/conferenceObject1533-1536http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=68610022014 IEEE International Instrumentation and Measurement Technology Conference (i2mtc) Proceedings. New York: IEEE, p. 1533-1536, 2014.1446-7598http://hdl.handle.net/11449/13021210.1109/I2MTC.2014.6861002WOS:000346477200303640533951088320328834403518951670000-0003-4201-56170000-0001-6320-755XWeb of Sciencereponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPeng2014 IEEE International Instrumentation And Measurement Technology Conference (i2mtc) Proceedingsinfo:eu-repo/semantics/openAccess2024-07-04T19:11:55Zoai:repositorio.unesp.br:11449/130212Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462024-08-05T23:21:51.238009Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false |
dc.title.none.fl_str_mv |
Nano-displacement measurements of a new piezoelectric flextensional actuator by using a high dynamic range interferometry homodyne method |
title |
Nano-displacement measurements of a new piezoelectric flextensional actuator by using a high dynamic range interferometry homodyne method |
spellingShingle |
Nano-displacement measurements of a new piezoelectric flextensional actuator by using a high dynamic range interferometry homodyne method Berton, Paula Lalucci [UNESP] Nanometric displacement measurements Homodyne phase detection Piezoelectric flextensional actuator |
title_short |
Nano-displacement measurements of a new piezoelectric flextensional actuator by using a high dynamic range interferometry homodyne method |
title_full |
Nano-displacement measurements of a new piezoelectric flextensional actuator by using a high dynamic range interferometry homodyne method |
title_fullStr |
Nano-displacement measurements of a new piezoelectric flextensional actuator by using a high dynamic range interferometry homodyne method |
title_full_unstemmed |
Nano-displacement measurements of a new piezoelectric flextensional actuator by using a high dynamic range interferometry homodyne method |
title_sort |
Nano-displacement measurements of a new piezoelectric flextensional actuator by using a high dynamic range interferometry homodyne method |
author |
Berton, Paula Lalucci [UNESP] |
author_facet |
Berton, Paula Lalucci [UNESP] Galeti, Jose Henrique [UNESP] Higuti, Ricardo Tokio [UNESP] Kitano, Claudio [UNESP] Nelli Silva, Emilio Carlos |
author_role |
author |
author2 |
Galeti, Jose Henrique [UNESP] Higuti, Ricardo Tokio [UNESP] Kitano, Claudio [UNESP] Nelli Silva, Emilio Carlos |
author2_role |
author author author author |
dc.contributor.none.fl_str_mv |
Universidade Estadual Paulista (Unesp) Universidade de São Paulo (USP) |
dc.contributor.author.fl_str_mv |
Berton, Paula Lalucci [UNESP] Galeti, Jose Henrique [UNESP] Higuti, Ricardo Tokio [UNESP] Kitano, Claudio [UNESP] Nelli Silva, Emilio Carlos |
dc.subject.por.fl_str_mv |
Nanometric displacement measurements Homodyne phase detection Piezoelectric flextensional actuator |
topic |
Nanometric displacement measurements Homodyne phase detection Piezoelectric flextensional actuator |
description |
Piezoelectric flextensional actuator (PFA) devices consist in a technology in development, with increasing number of applications in precision mechanics such as nanotechnology equipments, electronic microscopy instruments, cell manipulation systems, microsurgery tools, and lens positioner for laser interferometer to name a few. In turn, optical interferometry is an adequate technique to measure nano/micro displacements and to characterize these PFAs. An efficient method for optical phase detection is the n-commuted Pernick method (n-CPM), where only a limited number of frequencies in the magnitude spectrum of the photo detected signal are used, without the need to know the phase spectrum. The n-CPM has the advantages of being passive homodyne, direct, self-consistent, and is immune to fading. The dynamic range for optical phase measurements is from 0.2 rad to 100 pi rad. In this work, by using the n-CPM, a new PFA prototype designed by topology-optimization method is tested in terms of displacement linearity (relative to applied voltage) and frequency response. |
publishDate |
2014 |
dc.date.none.fl_str_mv |
2014-05-12 2015-11-03T15:30:18Z 2015-11-03T15:30:18Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/conferenceObject |
format |
conferenceObject |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6861002 2014 IEEE International Instrumentation and Measurement Technology Conference (i2mtc) Proceedings. New York: IEEE, p. 1533-1536, 2014. 1446-7598 http://hdl.handle.net/11449/130212 10.1109/I2MTC.2014.6861002 WOS:000346477200303 6405339510883203 2883440351895167 0000-0003-4201-5617 0000-0001-6320-755X |
url |
http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6861002 http://hdl.handle.net/11449/130212 |
identifier_str_mv |
2014 IEEE International Instrumentation and Measurement Technology Conference (i2mtc) Proceedings. New York: IEEE, p. 1533-1536, 2014. 1446-7598 10.1109/I2MTC.2014.6861002 WOS:000346477200303 6405339510883203 2883440351895167 0000-0003-4201-5617 0000-0001-6320-755X |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
2014 IEEE International Instrumentation And Measurement Technology Conference (i2mtc) Proceedings |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
1533-1536 |
dc.publisher.none.fl_str_mv |
IEEE |
publisher.none.fl_str_mv |
IEEE |
dc.source.none.fl_str_mv |
Web of Science reponame:Repositório Institucional da UNESP instname:Universidade Estadual Paulista (UNESP) instacron:UNESP |
instname_str |
Universidade Estadual Paulista (UNESP) |
instacron_str |
UNESP |
institution |
UNESP |
reponame_str |
Repositório Institucional da UNESP |
collection |
Repositório Institucional da UNESP |
repository.name.fl_str_mv |
Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP) |
repository.mail.fl_str_mv |
|
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1808129510467436544 |