Interferometric measurements of nanometric displacements in a Piezoelectric Flextensional Actuator by using the new J1...J5 method

Detalhes bibliográficos
Autor(a) principal: Marcal, Luiz A. P. [UNESP]
Data de Publicação: 2012
Outros Autores: Galeti, Jose Henrique [UNESP], Higuti, Ricardo T. [UNESP], Kitano, Claudio [UNESP], Silva, Emilio C. N.
Tipo de documento: Artigo de conferência
Idioma: eng
Título da fonte: Repositório Institucional da UNESP
Texto Completo: http://dx.doi.org/10.1109/INDUSCON.2012.6452451
http://hdl.handle.net/11449/130571
Resumo: In this work, nanometric displacement amplitudes of a Piezoelectric Flextensional Actuator (PFA) designed using the topology optimization technique and operating in its linear range are measured by using a homodyne Michelson interferometer. A new improved version of the J1...J4 method for optical phase measurements, named J1...J5 method, is presented, which is of easier implementation than the original one. This is a passive phase detection scheme, unaffected by signal fading, source instabilities and changes in visibility. Experimental results using this improvement were compared with those obtained by using the J1... J4, J1...J6(pos) and J1...J 6(neg) methods, concluding that the dynamic range is increased while maintaining the sensitivity. Analysis based on the 1/f voltage noise and random fading show the new method is more stable to phase drift than all those methods. © 2012 IEEE.
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spelling Interferometric measurements of nanometric displacements in a Piezoelectric Flextensional Actuator by using the new J1...J5 methodDynamic rangeFlextensional actuatorHomodynesInterferometric measurementLinear rangeNanometric displacementsOptimization techniquesPassive phasePhase driftSignal fadingVoltage noiseActuatorsIndustrial applicationsMichelson interferometersSensitivity analysisPiezoelectricityIn this work, nanometric displacement amplitudes of a Piezoelectric Flextensional Actuator (PFA) designed using the topology optimization technique and operating in its linear range are measured by using a homodyne Michelson interferometer. A new improved version of the J1...J4 method for optical phase measurements, named J1...J5 method, is presented, which is of easier implementation than the original one. This is a passive phase detection scheme, unaffected by signal fading, source instabilities and changes in visibility. Experimental results using this improvement were compared with those obtained by using the J1... J4, J1...J6(pos) and J1...J 6(neg) methods, concluding that the dynamic range is increased while maintaining the sensitivity. Analysis based on the 1/f voltage noise and random fading show the new method is more stable to phase drift than all those methods. © 2012 IEEE.Department of Electrical Engineering Universidade Estadual Paulista - UNESP., Ilha Solteira, SPDepartment of Mechatronics and Mechanical Systems Engineering Escola Politécnica da Universidade de São Paulo - EPUSP, São PauloDepartment of Electrical Engineering Universidade Estadual Paulista - UNESP., Ilha Solteira, SPIEEEUniversidade Estadual Paulista (Unesp)Universidade de São Paulo (USP)Marcal, Luiz A. P. [UNESP]Galeti, Jose Henrique [UNESP]Higuti, Ricardo T. [UNESP]Kitano, Claudio [UNESP]Silva, Emilio C. N.2014-05-27T11:27:18Z2015-11-16T15:25:46Z2012-12-01info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/conferenceObject6http://dx.doi.org/10.1109/INDUSCON.2012.64524512012 10th IEEE/ias International Conference on Industry Applications (induscon). New York: IEEE, p. 6, 2012.http://hdl.handle.net/11449/13057110.1109/INDUSCON.2012.6452451WOS:0003180215000432-s2.0-84874438910288344035189516764053395108832030000-0003-4201-56170000-0001-6320-755XScopusreponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPeng2012 10th IEEE/IAS International Conference on Industry Applications, INDUSCON 2012info:eu-repo/semantics/openAccess2022-01-07T14:13:51Zoai:repositorio.unesp.br:11449/130571Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462022-01-07T14:13:51Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false
dc.title.none.fl_str_mv Interferometric measurements of nanometric displacements in a Piezoelectric Flextensional Actuator by using the new J1...J5 method
title Interferometric measurements of nanometric displacements in a Piezoelectric Flextensional Actuator by using the new J1...J5 method
spellingShingle Interferometric measurements of nanometric displacements in a Piezoelectric Flextensional Actuator by using the new J1...J5 method
Marcal, Luiz A. P. [UNESP]
Dynamic range
Flextensional actuator
Homodynes
Interferometric measurement
Linear range
Nanometric displacements
Optimization techniques
Passive phase
Phase drift
Signal fading
Voltage noise
Actuators
Industrial applications
Michelson interferometers
Sensitivity analysis
Piezoelectricity
title_short Interferometric measurements of nanometric displacements in a Piezoelectric Flextensional Actuator by using the new J1...J5 method
title_full Interferometric measurements of nanometric displacements in a Piezoelectric Flextensional Actuator by using the new J1...J5 method
title_fullStr Interferometric measurements of nanometric displacements in a Piezoelectric Flextensional Actuator by using the new J1...J5 method
title_full_unstemmed Interferometric measurements of nanometric displacements in a Piezoelectric Flextensional Actuator by using the new J1...J5 method
title_sort Interferometric measurements of nanometric displacements in a Piezoelectric Flextensional Actuator by using the new J1...J5 method
author Marcal, Luiz A. P. [UNESP]
author_facet Marcal, Luiz A. P. [UNESP]
Galeti, Jose Henrique [UNESP]
Higuti, Ricardo T. [UNESP]
Kitano, Claudio [UNESP]
Silva, Emilio C. N.
author_role author
author2 Galeti, Jose Henrique [UNESP]
Higuti, Ricardo T. [UNESP]
Kitano, Claudio [UNESP]
Silva, Emilio C. N.
author2_role author
author
author
author
dc.contributor.none.fl_str_mv Universidade Estadual Paulista (Unesp)
Universidade de São Paulo (USP)
dc.contributor.author.fl_str_mv Marcal, Luiz A. P. [UNESP]
Galeti, Jose Henrique [UNESP]
Higuti, Ricardo T. [UNESP]
Kitano, Claudio [UNESP]
Silva, Emilio C. N.
dc.subject.por.fl_str_mv Dynamic range
Flextensional actuator
Homodynes
Interferometric measurement
Linear range
Nanometric displacements
Optimization techniques
Passive phase
Phase drift
Signal fading
Voltage noise
Actuators
Industrial applications
Michelson interferometers
Sensitivity analysis
Piezoelectricity
topic Dynamic range
Flextensional actuator
Homodynes
Interferometric measurement
Linear range
Nanometric displacements
Optimization techniques
Passive phase
Phase drift
Signal fading
Voltage noise
Actuators
Industrial applications
Michelson interferometers
Sensitivity analysis
Piezoelectricity
description In this work, nanometric displacement amplitudes of a Piezoelectric Flextensional Actuator (PFA) designed using the topology optimization technique and operating in its linear range are measured by using a homodyne Michelson interferometer. A new improved version of the J1...J4 method for optical phase measurements, named J1...J5 method, is presented, which is of easier implementation than the original one. This is a passive phase detection scheme, unaffected by signal fading, source instabilities and changes in visibility. Experimental results using this improvement were compared with those obtained by using the J1... J4, J1...J6(pos) and J1...J 6(neg) methods, concluding that the dynamic range is increased while maintaining the sensitivity. Analysis based on the 1/f voltage noise and random fading show the new method is more stable to phase drift than all those methods. © 2012 IEEE.
publishDate 2012
dc.date.none.fl_str_mv 2012-12-01
2014-05-27T11:27:18Z
2015-11-16T15:25:46Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/conferenceObject
format conferenceObject
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://dx.doi.org/10.1109/INDUSCON.2012.6452451
2012 10th IEEE/ias International Conference on Industry Applications (induscon). New York: IEEE, p. 6, 2012.
http://hdl.handle.net/11449/130571
10.1109/INDUSCON.2012.6452451
WOS:000318021500043
2-s2.0-84874438910
2883440351895167
6405339510883203
0000-0003-4201-5617
0000-0001-6320-755X
url http://dx.doi.org/10.1109/INDUSCON.2012.6452451
http://hdl.handle.net/11449/130571
identifier_str_mv 2012 10th IEEE/ias International Conference on Industry Applications (induscon). New York: IEEE, p. 6, 2012.
10.1109/INDUSCON.2012.6452451
WOS:000318021500043
2-s2.0-84874438910
2883440351895167
6405339510883203
0000-0003-4201-5617
0000-0001-6320-755X
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 2012 10th IEEE/IAS International Conference on Industry Applications, INDUSCON 2012
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv 6
dc.publisher.none.fl_str_mv IEEE
publisher.none.fl_str_mv IEEE
dc.source.none.fl_str_mv Scopus
reponame:Repositório Institucional da UNESP
instname:Universidade Estadual Paulista (UNESP)
instacron:UNESP
instname_str Universidade Estadual Paulista (UNESP)
instacron_str UNESP
institution UNESP
reponame_str Repositório Institucional da UNESP
collection Repositório Institucional da UNESP
repository.name.fl_str_mv Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)
repository.mail.fl_str_mv
_version_ 1803649366904274944

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