Femtosecond laser induced periodic surface structures on hydrogenated amorphous silicon thin films

Detalhes bibliográficos
Autor(a) principal: Almeida, G. F.B.
Data de Publicação: 2013
Outros Autores: Cardoso, M. R., Constantino, C. J.L. [UNESP], Aoki, P. H.B. [UNESP], Rodrigues, C. A., Lima, J. J.D., Costa, L. da F., Mendonça, C. R.
Tipo de documento: Artigo de conferência
Idioma: eng
Título da fonte: Repositório Institucional da UNESP
Texto Completo: http://dx.doi.org/10.1364/fio.2013.jw3a.33
http://hdl.handle.net/11449/228806
Resumo: We report a study of fs-laser micromachining on the structure and surface morphology of hydrogenated amorphous silicon thin films using Raman spectroscopy and scanning electron and atomic force microscopy. © OSA 2013.
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spelling Femtosecond laser induced periodic surface structures on hydrogenated amorphous silicon thin filmsWe report a study of fs-laser micromachining on the structure and surface morphology of hydrogenated amorphous silicon thin films using Raman spectroscopy and scanning electron and atomic force microscopy. © OSA 2013.Instituto de Física de São Carlos Universidade de São Paulo, São Carlos, 13560-970, SPDepartamento de Física Química e Biologia Faculdade de Ciência e Tecnologias Universidade Estadual Paulista, Presidente Prudente, 19060-900, SPDepartamento de Ciências Exatas Universidade Federal de Feira de Santana, Feira de Santana, 44031-460, BADepartamento de Física Química e Biologia Faculdade de Ciência e Tecnologias Universidade Estadual Paulista, Presidente Prudente, 19060-900, SPUniversidade de São Paulo (USP)Universidade Estadual Paulista (UNESP)Universidade Federal de Feira de SantanaAlmeida, G. F.B.Cardoso, M. R.Constantino, C. J.L. [UNESP]Aoki, P. H.B. [UNESP]Rodrigues, C. A.Lima, J. J.D.Costa, L. da F.Mendonça, C. R.2022-04-29T08:28:50Z2022-04-29T08:28:50Z2013-01-01info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/conferenceObjecthttp://dx.doi.org/10.1364/fio.2013.jw3a.33Optics InfoBase Conference Papers.2162-2701http://hdl.handle.net/11449/22880610.1364/fio.2013.jw3a.332-s2.0-85085780473Scopusreponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPengOptics InfoBase Conference Papersinfo:eu-repo/semantics/openAccess2024-06-19T12:46:01Zoai:repositorio.unesp.br:11449/228806Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462024-06-19T12:46:01Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false
dc.title.none.fl_str_mv Femtosecond laser induced periodic surface structures on hydrogenated amorphous silicon thin films
title Femtosecond laser induced periodic surface structures on hydrogenated amorphous silicon thin films
spellingShingle Femtosecond laser induced periodic surface structures on hydrogenated amorphous silicon thin films
Almeida, G. F.B.
title_short Femtosecond laser induced periodic surface structures on hydrogenated amorphous silicon thin films
title_full Femtosecond laser induced periodic surface structures on hydrogenated amorphous silicon thin films
title_fullStr Femtosecond laser induced periodic surface structures on hydrogenated amorphous silicon thin films
title_full_unstemmed Femtosecond laser induced periodic surface structures on hydrogenated amorphous silicon thin films
title_sort Femtosecond laser induced periodic surface structures on hydrogenated amorphous silicon thin films
author Almeida, G. F.B.
author_facet Almeida, G. F.B.
Cardoso, M. R.
Constantino, C. J.L. [UNESP]
Aoki, P. H.B. [UNESP]
Rodrigues, C. A.
Lima, J. J.D.
Costa, L. da F.
Mendonça, C. R.
author_role author
author2 Cardoso, M. R.
Constantino, C. J.L. [UNESP]
Aoki, P. H.B. [UNESP]
Rodrigues, C. A.
Lima, J. J.D.
Costa, L. da F.
Mendonça, C. R.
author2_role author
author
author
author
author
author
author
dc.contributor.none.fl_str_mv Universidade de São Paulo (USP)
Universidade Estadual Paulista (UNESP)
Universidade Federal de Feira de Santana
dc.contributor.author.fl_str_mv Almeida, G. F.B.
Cardoso, M. R.
Constantino, C. J.L. [UNESP]
Aoki, P. H.B. [UNESP]
Rodrigues, C. A.
Lima, J. J.D.
Costa, L. da F.
Mendonça, C. R.
description We report a study of fs-laser micromachining on the structure and surface morphology of hydrogenated amorphous silicon thin films using Raman spectroscopy and scanning electron and atomic force microscopy. © OSA 2013.
publishDate 2013
dc.date.none.fl_str_mv 2013-01-01
2022-04-29T08:28:50Z
2022-04-29T08:28:50Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/conferenceObject
format conferenceObject
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://dx.doi.org/10.1364/fio.2013.jw3a.33
Optics InfoBase Conference Papers.
2162-2701
http://hdl.handle.net/11449/228806
10.1364/fio.2013.jw3a.33
2-s2.0-85085780473
url http://dx.doi.org/10.1364/fio.2013.jw3a.33
http://hdl.handle.net/11449/228806
identifier_str_mv Optics InfoBase Conference Papers.
2162-2701
10.1364/fio.2013.jw3a.33
2-s2.0-85085780473
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv Optics InfoBase Conference Papers
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eu_rights_str_mv openAccess
dc.source.none.fl_str_mv Scopus
reponame:Repositório Institucional da UNESP
instname:Universidade Estadual Paulista (UNESP)
instacron:UNESP
instname_str Universidade Estadual Paulista (UNESP)
instacron_str UNESP
institution UNESP
reponame_str Repositório Institucional da UNESP
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repository.name.fl_str_mv Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)
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