Femtosecond laser induced periodic surface structures on hydrogenated amorphous silicon thin films
| Autor(a) principal: | |
|---|---|
| Data de Publicação: | 2013 |
| Outros Autores: | , , , , , , |
| Tipo de documento: | Artigo de conferência |
| Idioma: | eng |
| Título da fonte: | Repositório Institucional da UNESP |
| Texto Completo: | http://hdl.handle.net/11449/227697 |
Resumo: | We report a study of fs-laser micromachining on the structure and surface morphology of hydrogenated amorphous silicon thin films using Raman spectroscopy and scanning electron and atomic force microscopy. © OSA 2013. |
| id |
UNSP_9a8bbdd220ffca7263030717573f8a30 |
|---|---|
| oai_identifier_str |
oai:repositorio.unesp.br:11449/227697 |
| network_acronym_str |
UNSP |
| network_name_str |
Repositório Institucional da UNESP |
| repository_id_str |
2946 |
| spelling |
Femtosecond laser induced periodic surface structures on hydrogenated amorphous silicon thin filmsWe report a study of fs-laser micromachining on the structure and surface morphology of hydrogenated amorphous silicon thin films using Raman spectroscopy and scanning electron and atomic force microscopy. © OSA 2013.Instituto de Física de São Carlos, Universidade de São Paulo, São Carlos, 13560-970, SPDepartamento de Física Química e Biologia, Faculdade de Ciência e Tecnologias, Universidade Estadual Paulista, Presidente Prudente 19060-900, SPDepartamento de Ciências Exatas, Universidade Federal de Feira de Santana, Feira de Santana, 44031-460, BADepartamento de Física Química e Biologia, Faculdade de Ciência e Tecnologias, Universidade Estadual Paulista, Presidente Prudente 19060-900, SPUniversidade de São Paulo (USP)Universidade Estadual Paulista (UNESP)Almeida, G. F.B.Cardoso, M. R.Constantino, C. J.L. [UNESP]Aoki, P. H.B. [UNESP]Rodrigues, C. A.Lima, J. J.D.Costa, L.Da F.Mendonça, C. R.2022-04-29T07:14:33Z2022-04-29T07:14:33Z2013-01-01info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/conferenceObjectOptics InfoBase Conference Papers.2162-2701http://hdl.handle.net/11449/2276972-s2.0-84898636023Scopusreponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPengOptics InfoBase Conference Papersinfo:eu-repo/semantics/openAccess2022-04-29T07:14:33Zoai:repositorio.unesp.br:11449/227697Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462022-04-29T07:14:33Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false |
| dc.title.none.fl_str_mv |
Femtosecond laser induced periodic surface structures on hydrogenated amorphous silicon thin films |
| title |
Femtosecond laser induced periodic surface structures on hydrogenated amorphous silicon thin films |
| spellingShingle |
Femtosecond laser induced periodic surface structures on hydrogenated amorphous silicon thin films Almeida, G. F.B. |
| title_short |
Femtosecond laser induced periodic surface structures on hydrogenated amorphous silicon thin films |
| title_full |
Femtosecond laser induced periodic surface structures on hydrogenated amorphous silicon thin films |
| title_fullStr |
Femtosecond laser induced periodic surface structures on hydrogenated amorphous silicon thin films |
| title_full_unstemmed |
Femtosecond laser induced periodic surface structures on hydrogenated amorphous silicon thin films |
| title_sort |
Femtosecond laser induced periodic surface structures on hydrogenated amorphous silicon thin films |
| author |
Almeida, G. F.B. |
| author_facet |
Almeida, G. F.B. Cardoso, M. R. Constantino, C. J.L. [UNESP] Aoki, P. H.B. [UNESP] Rodrigues, C. A. Lima, J. J.D. Costa, L.Da F. Mendonça, C. R. |
| author_role |
author |
| author2 |
Cardoso, M. R. Constantino, C. J.L. [UNESP] Aoki, P. H.B. [UNESP] Rodrigues, C. A. Lima, J. J.D. Costa, L.Da F. Mendonça, C. R. |
| author2_role |
author author author author author author author |
| dc.contributor.none.fl_str_mv |
Universidade de São Paulo (USP) Universidade Estadual Paulista (UNESP) |
| dc.contributor.author.fl_str_mv |
Almeida, G. F.B. Cardoso, M. R. Constantino, C. J.L. [UNESP] Aoki, P. H.B. [UNESP] Rodrigues, C. A. Lima, J. J.D. Costa, L.Da F. Mendonça, C. R. |
| description |
We report a study of fs-laser micromachining on the structure and surface morphology of hydrogenated amorphous silicon thin films using Raman spectroscopy and scanning electron and atomic force microscopy. © OSA 2013. |
| publishDate |
2013 |
| dc.date.none.fl_str_mv |
2013-01-01 2022-04-29T07:14:33Z 2022-04-29T07:14:33Z |
| dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
| dc.type.driver.fl_str_mv |
info:eu-repo/semantics/conferenceObject |
| format |
conferenceObject |
| status_str |
publishedVersion |
| dc.identifier.uri.fl_str_mv |
Optics InfoBase Conference Papers. 2162-2701 http://hdl.handle.net/11449/227697 2-s2.0-84898636023 |
| identifier_str_mv |
Optics InfoBase Conference Papers. 2162-2701 2-s2.0-84898636023 |
| url |
http://hdl.handle.net/11449/227697 |
| dc.language.iso.fl_str_mv |
eng |
| language |
eng |
| dc.relation.none.fl_str_mv |
Optics InfoBase Conference Papers |
| dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
| eu_rights_str_mv |
openAccess |
| dc.source.none.fl_str_mv |
Scopus reponame:Repositório Institucional da UNESP instname:Universidade Estadual Paulista (UNESP) instacron:UNESP |
| instname_str |
Universidade Estadual Paulista (UNESP) |
| instacron_str |
UNESP |
| institution |
UNESP |
| reponame_str |
Repositório Institucional da UNESP |
| collection |
Repositório Institucional da UNESP |
| repository.name.fl_str_mv |
Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP) |
| repository.mail.fl_str_mv |
|
| _version_ |
1799965085689446400 |