The effect of the ion beam energy on the properties of indium tin oxide thin films prepared by ion beam assisted deposition

Detalhes bibliográficos
Autor(a) principal: Meng Lijian
Data de Publicação: 2008
Outros Autores: Gao Jinsong, Santos, M. P. dos, Wang Xiaoyi, Wang Tongtong
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/1822/13705
Resumo: Indium tin oxide (ITO) thin films have been deposited onto polycarbonate substrates by ion beam assisted deposition technique at room temperature. The structural, optical and electrical properties of the films have been characterized by X-ray diffraction, atomic force microscopy, optical transmittance, ellipsometric and Hall effect measurements. The effect of the ion beam energy on the properties of the films has been studied. The optical parameters have been obtained by fitting the ellipsometric spectra. It has been found that high quality ITO film (low electrical resistivity and high optical transmittance) can be obtained at low ion beam energy. In addition, the ITO film prepared at low ion beam energy gives a high reflectance in IR region which is useful for some electromagnetic wave shielding applications.
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spelling The effect of the ion beam energy on the properties of indium tin oxide thin films prepared by ion beam assisted depositionITOThin filmPolycarbonateIon beam assisted depositionScience & TechnologyIndium tin oxide (ITO) thin films have been deposited onto polycarbonate substrates by ion beam assisted deposition technique at room temperature. The structural, optical and electrical properties of the films have been characterized by X-ray diffraction, atomic force microscopy, optical transmittance, ellipsometric and Hall effect measurements. The effect of the ion beam energy on the properties of the films has been studied. The optical parameters have been obtained by fitting the ellipsometric spectra. It has been found that high quality ITO film (low electrical resistivity and high optical transmittance) can be obtained at low ion beam energy. In addition, the ITO film prepared at low ion beam energy gives a high reflectance in IR region which is useful for some electromagnetic wave shielding applications.Fundação Calouste GulbenkianElsevierUniversidade do MinhoMeng LijianGao JinsongSantos, M. P. dosWang XiaoyiWang Tongtong2008-02-152008-02-15T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/13705eng0040-609010.1016/j.tsf.2007.04.159http://www.sciencedirect.com/science/article/pii/S0040609007007493info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T11:55:38Zoai:repositorium.sdum.uminho.pt:1822/13705Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T18:45:11.321566Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv The effect of the ion beam energy on the properties of indium tin oxide thin films prepared by ion beam assisted deposition
title The effect of the ion beam energy on the properties of indium tin oxide thin films prepared by ion beam assisted deposition
spellingShingle The effect of the ion beam energy on the properties of indium tin oxide thin films prepared by ion beam assisted deposition
Meng Lijian
ITO
Thin film
Polycarbonate
Ion beam assisted deposition
Science & Technology
title_short The effect of the ion beam energy on the properties of indium tin oxide thin films prepared by ion beam assisted deposition
title_full The effect of the ion beam energy on the properties of indium tin oxide thin films prepared by ion beam assisted deposition
title_fullStr The effect of the ion beam energy on the properties of indium tin oxide thin films prepared by ion beam assisted deposition
title_full_unstemmed The effect of the ion beam energy on the properties of indium tin oxide thin films prepared by ion beam assisted deposition
title_sort The effect of the ion beam energy on the properties of indium tin oxide thin films prepared by ion beam assisted deposition
author Meng Lijian
author_facet Meng Lijian
Gao Jinsong
Santos, M. P. dos
Wang Xiaoyi
Wang Tongtong
author_role author
author2 Gao Jinsong
Santos, M. P. dos
Wang Xiaoyi
Wang Tongtong
author2_role author
author
author
author
dc.contributor.none.fl_str_mv Universidade do Minho
dc.contributor.author.fl_str_mv Meng Lijian
Gao Jinsong
Santos, M. P. dos
Wang Xiaoyi
Wang Tongtong
dc.subject.por.fl_str_mv ITO
Thin film
Polycarbonate
Ion beam assisted deposition
Science & Technology
topic ITO
Thin film
Polycarbonate
Ion beam assisted deposition
Science & Technology
description Indium tin oxide (ITO) thin films have been deposited onto polycarbonate substrates by ion beam assisted deposition technique at room temperature. The structural, optical and electrical properties of the films have been characterized by X-ray diffraction, atomic force microscopy, optical transmittance, ellipsometric and Hall effect measurements. The effect of the ion beam energy on the properties of the films has been studied. The optical parameters have been obtained by fitting the ellipsometric spectra. It has been found that high quality ITO film (low electrical resistivity and high optical transmittance) can be obtained at low ion beam energy. In addition, the ITO film prepared at low ion beam energy gives a high reflectance in IR region which is useful for some electromagnetic wave shielding applications.
publishDate 2008
dc.date.none.fl_str_mv 2008-02-15
2008-02-15T00:00:00Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/1822/13705
url http://hdl.handle.net/1822/13705
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 0040-6090
10.1016/j.tsf.2007.04.159
http://www.sciencedirect.com/science/article/pii/S0040609007007493
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Elsevier
publisher.none.fl_str_mv Elsevier
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
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