The role of modulated IR radiometry measurements in the characterization of Zr-O-N thin films

Detalhes bibliográficos
Autor(a) principal: Macedo, Francisco
Data de Publicação: 2009
Outros Autores: Carvalho, Pedro, Cunha, L., Vaz, F., Gibkes, Juergen, Bein, Bruno K., Plezl, Josef
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/1822/13634
Resumo: This work is devoted to the investigation of relevant thermal transport parameters of multifunctional ZrOxNy thin films, prepared in strict controlled conditions. Composition and structural characterizations revealed the existence of two different types of films, with a structural change from fcc ZrN to Zr3N4-type. Modulated IR radiometry was used to screen out these internal changes, and also to prove its importance and application viability within complicate systems such as thin films. The thermal diffusion time of the coatings and the ratio of the thermal effusivities coating-to-substrate were directly determined. Empirical correlations between processing conditions, the films’ composition and structure, and thermal transport properties were found.
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spelling The role of modulated IR radiometry measurements in the characterization of Zr-O-N thin filmsCoatingsDc magnetron sputteringModulated IR radiometryThermal propertiesZr-O-NScience & TechnologyThis work is devoted to the investigation of relevant thermal transport parameters of multifunctional ZrOxNy thin films, prepared in strict controlled conditions. Composition and structural characterizations revealed the existence of two different types of films, with a structural change from fcc ZrN to Zr3N4-type. Modulated IR radiometry was used to screen out these internal changes, and also to prove its importance and application viability within complicate systems such as thin films. The thermal diffusion time of the coatings and the ratio of the thermal effusivities coating-to-substrate were directly determined. Empirical correlations between processing conditions, the films’ composition and structure, and thermal transport properties were found.WileyUniversidade do MinhoMacedo, FranciscoCarvalho, PedroCunha, L.Vaz, F.Gibkes, JuergenBein, Bruno K.Plezl, Josef20092009-01-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/13634eng1612-885010.1002/ppap.200931802http://onlinelibrary.wiley.com/doi/10.1002/ppap.200931802/abstractinfo:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:10:54Zoai:repositorium.sdum.uminho.pt:1822/13634Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T19:02:36.084442Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv The role of modulated IR radiometry measurements in the characterization of Zr-O-N thin films
title The role of modulated IR radiometry measurements in the characterization of Zr-O-N thin films
spellingShingle The role of modulated IR radiometry measurements in the characterization of Zr-O-N thin films
Macedo, Francisco
Coatings
Dc magnetron sputtering
Modulated IR radiometry
Thermal properties
Zr-O-N
Science & Technology
title_short The role of modulated IR radiometry measurements in the characterization of Zr-O-N thin films
title_full The role of modulated IR radiometry measurements in the characterization of Zr-O-N thin films
title_fullStr The role of modulated IR radiometry measurements in the characterization of Zr-O-N thin films
title_full_unstemmed The role of modulated IR radiometry measurements in the characterization of Zr-O-N thin films
title_sort The role of modulated IR radiometry measurements in the characterization of Zr-O-N thin films
author Macedo, Francisco
author_facet Macedo, Francisco
Carvalho, Pedro
Cunha, L.
Vaz, F.
Gibkes, Juergen
Bein, Bruno K.
Plezl, Josef
author_role author
author2 Carvalho, Pedro
Cunha, L.
Vaz, F.
Gibkes, Juergen
Bein, Bruno K.
Plezl, Josef
author2_role author
author
author
author
author
author
dc.contributor.none.fl_str_mv Universidade do Minho
dc.contributor.author.fl_str_mv Macedo, Francisco
Carvalho, Pedro
Cunha, L.
Vaz, F.
Gibkes, Juergen
Bein, Bruno K.
Plezl, Josef
dc.subject.por.fl_str_mv Coatings
Dc magnetron sputtering
Modulated IR radiometry
Thermal properties
Zr-O-N
Science & Technology
topic Coatings
Dc magnetron sputtering
Modulated IR radiometry
Thermal properties
Zr-O-N
Science & Technology
description This work is devoted to the investigation of relevant thermal transport parameters of multifunctional ZrOxNy thin films, prepared in strict controlled conditions. Composition and structural characterizations revealed the existence of two different types of films, with a structural change from fcc ZrN to Zr3N4-type. Modulated IR radiometry was used to screen out these internal changes, and also to prove its importance and application viability within complicate systems such as thin films. The thermal diffusion time of the coatings and the ratio of the thermal effusivities coating-to-substrate were directly determined. Empirical correlations between processing conditions, the films’ composition and structure, and thermal transport properties were found.
publishDate 2009
dc.date.none.fl_str_mv 2009
2009-01-01T00:00:00Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/1822/13634
url http://hdl.handle.net/1822/13634
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 1612-8850
10.1002/ppap.200931802
http://onlinelibrary.wiley.com/doi/10.1002/ppap.200931802/abstract
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Wiley
publisher.none.fl_str_mv Wiley
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
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