The role of modulated IR radiometry measurements in the characterization of Zr-O-N thin films
Autor(a) principal: | |
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Data de Publicação: | 2009 |
Outros Autores: | , , , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | http://hdl.handle.net/1822/13634 |
Resumo: | This work is devoted to the investigation of relevant thermal transport parameters of multifunctional ZrOxNy thin films, prepared in strict controlled conditions. Composition and structural characterizations revealed the existence of two different types of films, with a structural change from fcc ZrN to Zr3N4-type. Modulated IR radiometry was used to screen out these internal changes, and also to prove its importance and application viability within complicate systems such as thin films. The thermal diffusion time of the coatings and the ratio of the thermal effusivities coating-to-substrate were directly determined. Empirical correlations between processing conditions, the films’ composition and structure, and thermal transport properties were found. |
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The role of modulated IR radiometry measurements in the characterization of Zr-O-N thin filmsCoatingsDc magnetron sputteringModulated IR radiometryThermal propertiesZr-O-NScience & TechnologyThis work is devoted to the investigation of relevant thermal transport parameters of multifunctional ZrOxNy thin films, prepared in strict controlled conditions. Composition and structural characterizations revealed the existence of two different types of films, with a structural change from fcc ZrN to Zr3N4-type. Modulated IR radiometry was used to screen out these internal changes, and also to prove its importance and application viability within complicate systems such as thin films. The thermal diffusion time of the coatings and the ratio of the thermal effusivities coating-to-substrate were directly determined. Empirical correlations between processing conditions, the films’ composition and structure, and thermal transport properties were found.WileyUniversidade do MinhoMacedo, FranciscoCarvalho, PedroCunha, L.Vaz, F.Gibkes, JuergenBein, Bruno K.Plezl, Josef20092009-01-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/13634eng1612-885010.1002/ppap.200931802http://onlinelibrary.wiley.com/doi/10.1002/ppap.200931802/abstractinfo:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:10:54Zoai:repositorium.sdum.uminho.pt:1822/13634Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T19:02:36.084442Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
The role of modulated IR radiometry measurements in the characterization of Zr-O-N thin films |
title |
The role of modulated IR radiometry measurements in the characterization of Zr-O-N thin films |
spellingShingle |
The role of modulated IR radiometry measurements in the characterization of Zr-O-N thin films Macedo, Francisco Coatings Dc magnetron sputtering Modulated IR radiometry Thermal properties Zr-O-N Science & Technology |
title_short |
The role of modulated IR radiometry measurements in the characterization of Zr-O-N thin films |
title_full |
The role of modulated IR radiometry measurements in the characterization of Zr-O-N thin films |
title_fullStr |
The role of modulated IR radiometry measurements in the characterization of Zr-O-N thin films |
title_full_unstemmed |
The role of modulated IR radiometry measurements in the characterization of Zr-O-N thin films |
title_sort |
The role of modulated IR radiometry measurements in the characterization of Zr-O-N thin films |
author |
Macedo, Francisco |
author_facet |
Macedo, Francisco Carvalho, Pedro Cunha, L. Vaz, F. Gibkes, Juergen Bein, Bruno K. Plezl, Josef |
author_role |
author |
author2 |
Carvalho, Pedro Cunha, L. Vaz, F. Gibkes, Juergen Bein, Bruno K. Plezl, Josef |
author2_role |
author author author author author author |
dc.contributor.none.fl_str_mv |
Universidade do Minho |
dc.contributor.author.fl_str_mv |
Macedo, Francisco Carvalho, Pedro Cunha, L. Vaz, F. Gibkes, Juergen Bein, Bruno K. Plezl, Josef |
dc.subject.por.fl_str_mv |
Coatings Dc magnetron sputtering Modulated IR radiometry Thermal properties Zr-O-N Science & Technology |
topic |
Coatings Dc magnetron sputtering Modulated IR radiometry Thermal properties Zr-O-N Science & Technology |
description |
This work is devoted to the investigation of relevant thermal transport parameters of multifunctional ZrOxNy thin films, prepared in strict controlled conditions. Composition and structural characterizations revealed the existence of two different types of films, with a structural change from fcc ZrN to Zr3N4-type. Modulated IR radiometry was used to screen out these internal changes, and also to prove its importance and application viability within complicate systems such as thin films. The thermal diffusion time of the coatings and the ratio of the thermal effusivities coating-to-substrate were directly determined. Empirical correlations between processing conditions, the films’ composition and structure, and thermal transport properties were found. |
publishDate |
2009 |
dc.date.none.fl_str_mv |
2009 2009-01-01T00:00:00Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/1822/13634 |
url |
http://hdl.handle.net/1822/13634 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
1612-8850 10.1002/ppap.200931802 http://onlinelibrary.wiley.com/doi/10.1002/ppap.200931802/abstract |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.publisher.none.fl_str_mv |
Wiley |
publisher.none.fl_str_mv |
Wiley |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
instname_str |
Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
instacron_str |
RCAAP |
institution |
RCAAP |
reponame_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
collection |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository.name.fl_str_mv |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
repository.mail.fl_str_mv |
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1799132429371310080 |