Molybdenum oxide thin films grown on flexible ITO-coated PET substrates

Detalhes bibliográficos
Autor(a) principal: Marciel, Alice
Data de Publicação: 2021
Outros Autores: Graça, Manuel, Bastos, Alexandre, Pereira, Luiz, Suresh Kumar, Jakka, Borges, Joel, Vaz, F., Peres, Marco, Magalhães, Sergio, Lorenz, Katharina, Silva, Rui
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/1822/72549
Resumo: Molybdenum oxide thin films were deposited on stiff and flexible substrates by reactive DC magnetron sputtering. Two sets of samples were prepared. The first with different O<sub>2</sub>/Ar flow rate ratios and the second, fixing the oxygen content, with different time of deposition. As the O<sub>2</sub>/Ar flow rate ratio varies from 0 up to 0.56, a threshold was found, ranging from crystalline to amorphous nature, and from a nontransparent appearance with metallic-like electrical conductivity to transparent and dielectric behaviour. From the second set, all transparent, the MoO<sub>x</sub> films present a compact/dense and featureless morphology with thickness from 190 up to 910 nm, depending on the time of deposition. Their structure was corroborated by XPS and Rutherford Backscattering Spectrometry (RBS) and density measurements were performed by RBS and X-ray reflectivity (XRR), revealing a value of 2.4 g/cm<sup>3</sup>. The surface roughness is in the order of a few nanometers and the maxima optical transmission, in the visible range, is around 89%. Electrochemical cyclic voltammograms showed noticeable color reversibility and reproducibility on the flexible substrates opening new framework possibilities for new electrochomic devices.
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spelling Molybdenum oxide thin films grown on flexible ITO-coated PET substratesMoOxFlexible substratesElectrochromicDC magnetron sputteringScience & TechnologyMolybdenum oxide thin films were deposited on stiff and flexible substrates by reactive DC magnetron sputtering. Two sets of samples were prepared. The first with different O<sub>2</sub>/Ar flow rate ratios and the second, fixing the oxygen content, with different time of deposition. As the O<sub>2</sub>/Ar flow rate ratio varies from 0 up to 0.56, a threshold was found, ranging from crystalline to amorphous nature, and from a nontransparent appearance with metallic-like electrical conductivity to transparent and dielectric behaviour. From the second set, all transparent, the MoO<sub>x</sub> films present a compact/dense and featureless morphology with thickness from 190 up to 910 nm, depending on the time of deposition. Their structure was corroborated by XPS and Rutherford Backscattering Spectrometry (RBS) and density measurements were performed by RBS and X-ray reflectivity (XRR), revealing a value of 2.4 g/cm<sup>3</sup>. The surface roughness is in the order of a few nanometers and the maxima optical transmission, in the visible range, is around 89%. Electrochemical cyclic voltammograms showed noticeable color reversibility and reproducibility on the flexible substrates opening new framework possibilities for new electrochomic devices.This work was partially supported by FEDER funds through the COMPETE 2020 Programme and National Funds through FCTPortuguese Foundation for Science and Technology under the project UID/CTM/50025/2019. It was also developed within the scope of the project CICECOAveiro Institute of Materials, UIDB/50011/2020 & UIDP/50011/2020, financed by national funds through the Portuguese Foundation for Science and Technology/MCTES and by FCT-Fundação para a Ciência e a Tecnologia, I.P., in the scope of the framework contract foreseen in the numbers 4, 5 and 6 of the article 23, of the Decree-Law 57/2016, of 29 August, changed by Law 57/2017, of 19 July. This research was also partially funded by the Portuguese Foundation for Science and Technology (FCT) in the framework of the Strategic Funding UID/FIS/04650/2019 and by the project NANO4BIO, POCI-01-0145-FEDER-032299 and FCT reference PTDC/FIS-MAC/32299/2017.Multidisciplinary Digital Publishing Institute (MDPI)Universidade do MinhoMarciel, AliceGraça, ManuelBastos, AlexandrePereira, LuizSuresh Kumar, JakkaBorges, JoelVaz, F.Peres, MarcoMagalhães, SergioLorenz, KatharinaSilva, Rui2021-02-092021-02-09T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/72549engMarciel, A.; Graça, M.; Bastos, A.; Pereira, L.; Suresh Kumar, J.; Borges, J.; Vaz, F.; Peres, M.; Magalhães, S.; Lorenz, K.; Silva, R. Molybdenum Oxide Thin Films Grown on Flexible ITO-Coated PET Substrates. Materials 2021, 14, 821. https://doi.org/10.3390/ma140408211996-194410.3390/ma14040821https://www.mdpi.com/1996-1944/14/4/821info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:42:15Zoai:repositorium.sdum.uminho.pt:1822/72549Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T19:39:27.746184Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv Molybdenum oxide thin films grown on flexible ITO-coated PET substrates
title Molybdenum oxide thin films grown on flexible ITO-coated PET substrates
spellingShingle Molybdenum oxide thin films grown on flexible ITO-coated PET substrates
Marciel, Alice
MoOx
Flexible substrates
Electrochromic
DC magnetron sputtering
Science & Technology
title_short Molybdenum oxide thin films grown on flexible ITO-coated PET substrates
title_full Molybdenum oxide thin films grown on flexible ITO-coated PET substrates
title_fullStr Molybdenum oxide thin films grown on flexible ITO-coated PET substrates
title_full_unstemmed Molybdenum oxide thin films grown on flexible ITO-coated PET substrates
title_sort Molybdenum oxide thin films grown on flexible ITO-coated PET substrates
author Marciel, Alice
author_facet Marciel, Alice
Graça, Manuel
Bastos, Alexandre
Pereira, Luiz
Suresh Kumar, Jakka
Borges, Joel
Vaz, F.
Peres, Marco
Magalhães, Sergio
Lorenz, Katharina
Silva, Rui
author_role author
author2 Graça, Manuel
Bastos, Alexandre
Pereira, Luiz
Suresh Kumar, Jakka
Borges, Joel
Vaz, F.
Peres, Marco
Magalhães, Sergio
Lorenz, Katharina
Silva, Rui
author2_role author
author
author
author
author
author
author
author
author
author
dc.contributor.none.fl_str_mv Universidade do Minho
dc.contributor.author.fl_str_mv Marciel, Alice
Graça, Manuel
Bastos, Alexandre
Pereira, Luiz
Suresh Kumar, Jakka
Borges, Joel
Vaz, F.
Peres, Marco
Magalhães, Sergio
Lorenz, Katharina
Silva, Rui
dc.subject.por.fl_str_mv MoOx
Flexible substrates
Electrochromic
DC magnetron sputtering
Science & Technology
topic MoOx
Flexible substrates
Electrochromic
DC magnetron sputtering
Science & Technology
description Molybdenum oxide thin films were deposited on stiff and flexible substrates by reactive DC magnetron sputtering. Two sets of samples were prepared. The first with different O<sub>2</sub>/Ar flow rate ratios and the second, fixing the oxygen content, with different time of deposition. As the O<sub>2</sub>/Ar flow rate ratio varies from 0 up to 0.56, a threshold was found, ranging from crystalline to amorphous nature, and from a nontransparent appearance with metallic-like electrical conductivity to transparent and dielectric behaviour. From the second set, all transparent, the MoO<sub>x</sub> films present a compact/dense and featureless morphology with thickness from 190 up to 910 nm, depending on the time of deposition. Their structure was corroborated by XPS and Rutherford Backscattering Spectrometry (RBS) and density measurements were performed by RBS and X-ray reflectivity (XRR), revealing a value of 2.4 g/cm<sup>3</sup>. The surface roughness is in the order of a few nanometers and the maxima optical transmission, in the visible range, is around 89%. Electrochemical cyclic voltammograms showed noticeable color reversibility and reproducibility on the flexible substrates opening new framework possibilities for new electrochomic devices.
publishDate 2021
dc.date.none.fl_str_mv 2021-02-09
2021-02-09T00:00:00Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/1822/72549
url http://hdl.handle.net/1822/72549
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv Marciel, A.; Graça, M.; Bastos, A.; Pereira, L.; Suresh Kumar, J.; Borges, J.; Vaz, F.; Peres, M.; Magalhães, S.; Lorenz, K.; Silva, R. Molybdenum Oxide Thin Films Grown on Flexible ITO-Coated PET Substrates. Materials 2021, 14, 821. https://doi.org/10.3390/ma14040821
1996-1944
10.3390/ma14040821
https://www.mdpi.com/1996-1944/14/4/821
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Multidisciplinary Digital Publishing Institute (MDPI)
publisher.none.fl_str_mv Multidisciplinary Digital Publishing Institute (MDPI)
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
repository.mail.fl_str_mv
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