Molybdenum oxide thin films grown on flexible ITO-coated PET substrates
Autor(a) principal: | |
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Data de Publicação: | 2021 |
Outros Autores: | , , , , , , , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | http://hdl.handle.net/1822/72549 |
Resumo: | Molybdenum oxide thin films were deposited on stiff and flexible substrates by reactive DC magnetron sputtering. Two sets of samples were prepared. The first with different O<sub>2</sub>/Ar flow rate ratios and the second, fixing the oxygen content, with different time of deposition. As the O<sub>2</sub>/Ar flow rate ratio varies from 0 up to 0.56, a threshold was found, ranging from crystalline to amorphous nature, and from a nontransparent appearance with metallic-like electrical conductivity to transparent and dielectric behaviour. From the second set, all transparent, the MoO<sub>x</sub> films present a compact/dense and featureless morphology with thickness from 190 up to 910 nm, depending on the time of deposition. Their structure was corroborated by XPS and Rutherford Backscattering Spectrometry (RBS) and density measurements were performed by RBS and X-ray reflectivity (XRR), revealing a value of 2.4 g/cm<sup>3</sup>. The surface roughness is in the order of a few nanometers and the maxima optical transmission, in the visible range, is around 89%. Electrochemical cyclic voltammograms showed noticeable color reversibility and reproducibility on the flexible substrates opening new framework possibilities for new electrochomic devices. |
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Molybdenum oxide thin films grown on flexible ITO-coated PET substratesMoOxFlexible substratesElectrochromicDC magnetron sputteringScience & TechnologyMolybdenum oxide thin films were deposited on stiff and flexible substrates by reactive DC magnetron sputtering. Two sets of samples were prepared. The first with different O<sub>2</sub>/Ar flow rate ratios and the second, fixing the oxygen content, with different time of deposition. As the O<sub>2</sub>/Ar flow rate ratio varies from 0 up to 0.56, a threshold was found, ranging from crystalline to amorphous nature, and from a nontransparent appearance with metallic-like electrical conductivity to transparent and dielectric behaviour. From the second set, all transparent, the MoO<sub>x</sub> films present a compact/dense and featureless morphology with thickness from 190 up to 910 nm, depending on the time of deposition. Their structure was corroborated by XPS and Rutherford Backscattering Spectrometry (RBS) and density measurements were performed by RBS and X-ray reflectivity (XRR), revealing a value of 2.4 g/cm<sup>3</sup>. The surface roughness is in the order of a few nanometers and the maxima optical transmission, in the visible range, is around 89%. Electrochemical cyclic voltammograms showed noticeable color reversibility and reproducibility on the flexible substrates opening new framework possibilities for new electrochomic devices.This work was partially supported by FEDER funds through the COMPETE 2020 Programme and National Funds through FCTPortuguese Foundation for Science and Technology under the project UID/CTM/50025/2019. It was also developed within the scope of the project CICECOAveiro Institute of Materials, UIDB/50011/2020 & UIDP/50011/2020, financed by national funds through the Portuguese Foundation for Science and Technology/MCTES and by FCT-Fundação para a Ciência e a Tecnologia, I.P., in the scope of the framework contract foreseen in the numbers 4, 5 and 6 of the article 23, of the Decree-Law 57/2016, of 29 August, changed by Law 57/2017, of 19 July. This research was also partially funded by the Portuguese Foundation for Science and Technology (FCT) in the framework of the Strategic Funding UID/FIS/04650/2019 and by the project NANO4BIO, POCI-01-0145-FEDER-032299 and FCT reference PTDC/FIS-MAC/32299/2017.Multidisciplinary Digital Publishing Institute (MDPI)Universidade do MinhoMarciel, AliceGraça, ManuelBastos, AlexandrePereira, LuizSuresh Kumar, JakkaBorges, JoelVaz, F.Peres, MarcoMagalhães, SergioLorenz, KatharinaSilva, Rui2021-02-092021-02-09T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/72549engMarciel, A.; Graça, M.; Bastos, A.; Pereira, L.; Suresh Kumar, J.; Borges, J.; Vaz, F.; Peres, M.; Magalhães, S.; Lorenz, K.; Silva, R. Molybdenum Oxide Thin Films Grown on Flexible ITO-Coated PET Substrates. Materials 2021, 14, 821. https://doi.org/10.3390/ma140408211996-194410.3390/ma14040821https://www.mdpi.com/1996-1944/14/4/821info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:42:15Zoai:repositorium.sdum.uminho.pt:1822/72549Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T19:39:27.746184Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
Molybdenum oxide thin films grown on flexible ITO-coated PET substrates |
title |
Molybdenum oxide thin films grown on flexible ITO-coated PET substrates |
spellingShingle |
Molybdenum oxide thin films grown on flexible ITO-coated PET substrates Marciel, Alice MoOx Flexible substrates Electrochromic DC magnetron sputtering Science & Technology |
title_short |
Molybdenum oxide thin films grown on flexible ITO-coated PET substrates |
title_full |
Molybdenum oxide thin films grown on flexible ITO-coated PET substrates |
title_fullStr |
Molybdenum oxide thin films grown on flexible ITO-coated PET substrates |
title_full_unstemmed |
Molybdenum oxide thin films grown on flexible ITO-coated PET substrates |
title_sort |
Molybdenum oxide thin films grown on flexible ITO-coated PET substrates |
author |
Marciel, Alice |
author_facet |
Marciel, Alice Graça, Manuel Bastos, Alexandre Pereira, Luiz Suresh Kumar, Jakka Borges, Joel Vaz, F. Peres, Marco Magalhães, Sergio Lorenz, Katharina Silva, Rui |
author_role |
author |
author2 |
Graça, Manuel Bastos, Alexandre Pereira, Luiz Suresh Kumar, Jakka Borges, Joel Vaz, F. Peres, Marco Magalhães, Sergio Lorenz, Katharina Silva, Rui |
author2_role |
author author author author author author author author author author |
dc.contributor.none.fl_str_mv |
Universidade do Minho |
dc.contributor.author.fl_str_mv |
Marciel, Alice Graça, Manuel Bastos, Alexandre Pereira, Luiz Suresh Kumar, Jakka Borges, Joel Vaz, F. Peres, Marco Magalhães, Sergio Lorenz, Katharina Silva, Rui |
dc.subject.por.fl_str_mv |
MoOx Flexible substrates Electrochromic DC magnetron sputtering Science & Technology |
topic |
MoOx Flexible substrates Electrochromic DC magnetron sputtering Science & Technology |
description |
Molybdenum oxide thin films were deposited on stiff and flexible substrates by reactive DC magnetron sputtering. Two sets of samples were prepared. The first with different O<sub>2</sub>/Ar flow rate ratios and the second, fixing the oxygen content, with different time of deposition. As the O<sub>2</sub>/Ar flow rate ratio varies from 0 up to 0.56, a threshold was found, ranging from crystalline to amorphous nature, and from a nontransparent appearance with metallic-like electrical conductivity to transparent and dielectric behaviour. From the second set, all transparent, the MoO<sub>x</sub> films present a compact/dense and featureless morphology with thickness from 190 up to 910 nm, depending on the time of deposition. Their structure was corroborated by XPS and Rutherford Backscattering Spectrometry (RBS) and density measurements were performed by RBS and X-ray reflectivity (XRR), revealing a value of 2.4 g/cm<sup>3</sup>. The surface roughness is in the order of a few nanometers and the maxima optical transmission, in the visible range, is around 89%. Electrochemical cyclic voltammograms showed noticeable color reversibility and reproducibility on the flexible substrates opening new framework possibilities for new electrochomic devices. |
publishDate |
2021 |
dc.date.none.fl_str_mv |
2021-02-09 2021-02-09T00:00:00Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/1822/72549 |
url |
http://hdl.handle.net/1822/72549 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
Marciel, A.; Graça, M.; Bastos, A.; Pereira, L.; Suresh Kumar, J.; Borges, J.; Vaz, F.; Peres, M.; Magalhães, S.; Lorenz, K.; Silva, R. Molybdenum Oxide Thin Films Grown on Flexible ITO-Coated PET Substrates. Materials 2021, 14, 821. https://doi.org/10.3390/ma14040821 1996-1944 10.3390/ma14040821 https://www.mdpi.com/1996-1944/14/4/821 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.publisher.none.fl_str_mv |
Multidisciplinary Digital Publishing Institute (MDPI) |
publisher.none.fl_str_mv |
Multidisciplinary Digital Publishing Institute (MDPI) |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
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Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
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RCAAP |
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RCAAP |
reponame_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
collection |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository.name.fl_str_mv |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
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1799132935754874880 |