Low-pressure small MEMS accelerometer using Sigma-Delta modulation

Detalhes bibliográficos
Autor(a) principal: Lima, Vasco
Data de Publicação: 2018
Outros Autores: Cabral, Jorge, Kuhlmann, Burkhard, Rocha, Luís Alexandre Machado
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/1822/60641
Resumo: Encapsulation of MEMS accelerometers in vacuum is advantageous, since it allows integration with other sensors, leading to size and cost reduction. One technique to operate MEMS accelerometers in vacuum is the use of closed-loop Sigma-Delta modulation, which has many advantages. In this paper, the design of a vacuum encapsulated small size MEMS accelerometer (0.2 mm<sup>2</sup>) and the preliminary measured results are presented. Experimental devices were fabricated and operated in 2nd and 3rd order Sigma-Delta modulators, achieving a noise figure of 389 µg/√Hz for a bandwidth of 200 Hz and a measurement range of at least ±1 g.
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spelling Low-pressure small MEMS accelerometer using Sigma-Delta modulationEncapsulation of MEMS accelerometers in vacuum is advantageous, since it allows integration with other sensors, leading to size and cost reduction. One technique to operate MEMS accelerometers in vacuum is the use of closed-loop Sigma-Delta modulation, which has many advantages. In this paper, the design of a vacuum encapsulated small size MEMS accelerometer (0.2 mm<sup>2</sup>) and the preliminary measured results are presented. Experimental devices were fabricated and operated in 2nd and 3rd order Sigma-Delta modulators, achieving a noise figure of 389 µg/√Hz for a bandwidth of 200 Hz and a measurement range of at least ±1 g.The first author is supported by FCT– Fundação para a Ciência e Tecnologia through the grant PDE/BDE/114563/2016. This work is supported by FCT with the reference project UID/EEA/04436/2013, COMPETE 2020 with the code POCI-01-0145-FEDER-006941.info:eu-repo/semantics/publishedVersionMultidisciplinary Digital Publishing InstituteUniversidade do MinhoLima, VascoCabral, JorgeKuhlmann, BurkhardRocha, Luís Alexandre Machado2018-11-132018-11-13T00:00:00Zconference paperinfo:eu-repo/semantics/publishedVersionapplication/pdfhttp://hdl.handle.net/1822/60641eng2504-390010.3390/proceedings2131029info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2024-05-11T07:28:30Zoai:repositorium.sdum.uminho.pt:1822/60641Portal AgregadorONGhttps://www.rcaap.pt/oai/openairemluisa.alvim@gmail.comopendoar:71602024-05-11T07:28:30Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv Low-pressure small MEMS accelerometer using Sigma-Delta modulation
title Low-pressure small MEMS accelerometer using Sigma-Delta modulation
spellingShingle Low-pressure small MEMS accelerometer using Sigma-Delta modulation
Lima, Vasco
title_short Low-pressure small MEMS accelerometer using Sigma-Delta modulation
title_full Low-pressure small MEMS accelerometer using Sigma-Delta modulation
title_fullStr Low-pressure small MEMS accelerometer using Sigma-Delta modulation
title_full_unstemmed Low-pressure small MEMS accelerometer using Sigma-Delta modulation
title_sort Low-pressure small MEMS accelerometer using Sigma-Delta modulation
author Lima, Vasco
author_facet Lima, Vasco
Cabral, Jorge
Kuhlmann, Burkhard
Rocha, Luís Alexandre Machado
author_role author
author2 Cabral, Jorge
Kuhlmann, Burkhard
Rocha, Luís Alexandre Machado
author2_role author
author
author
dc.contributor.none.fl_str_mv Universidade do Minho
dc.contributor.author.fl_str_mv Lima, Vasco
Cabral, Jorge
Kuhlmann, Burkhard
Rocha, Luís Alexandre Machado
description Encapsulation of MEMS accelerometers in vacuum is advantageous, since it allows integration with other sensors, leading to size and cost reduction. One technique to operate MEMS accelerometers in vacuum is the use of closed-loop Sigma-Delta modulation, which has many advantages. In this paper, the design of a vacuum encapsulated small size MEMS accelerometer (0.2 mm<sup>2</sup>) and the preliminary measured results are presented. Experimental devices were fabricated and operated in 2nd and 3rd order Sigma-Delta modulators, achieving a noise figure of 389 µg/√Hz for a bandwidth of 200 Hz and a measurement range of at least ±1 g.
publishDate 2018
dc.date.none.fl_str_mv 2018-11-13
2018-11-13T00:00:00Z
dc.type.driver.fl_str_mv conference paper
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/1822/60641
url http://hdl.handle.net/1822/60641
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 2504-3900
10.3390/proceedings2131029
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Multidisciplinary Digital Publishing Institute
publisher.none.fl_str_mv Multidisciplinary Digital Publishing Institute
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
repository.mail.fl_str_mv mluisa.alvim@gmail.com
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