Analysis of linearity and frequency response of a novel piezoelectric flextensional actuator using a homodyne interferometer and the J1 - J4 method
Autor(a) principal: | |
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Data de Publicação: | 2007 |
Outros Autores: | , , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Institucional da UNESP |
Texto Completo: | http://dx.doi.org/10.1109/TIM.2007.894173 http://hdl.handle.net/11449/224908 |
Resumo: | Piezoelectric transducers are widely used in high-resolution positioning systems. This paper reports the experimental analysis of a novel piezoelectric flextensional actuator (PFA), which is designed by using the topology-optimization method through a low-cost homodyne Michelson interferometer. By applying the J1 - J4 method for signal demodulation, which provides a linear and direct measurement of dynamic optical phase shift independent of fading, the nanometric displacements of the PFA were determined. Linearity and frequency response of the PFA were evaluated up to 50 kHz. PFA calibration factor and amplification rate were determined for the PFA operating in the quasi-static regime. To confirm the observed frequencies of resonance, an impedance analyzer is also utilized to measure the magnitude and phase of the PFA admittance. © 2007 IEEE. |
id |
UNSP_b55c5660fa800b932125b3640aa2260c |
---|---|
oai_identifier_str |
oai:repositorio.unesp.br:11449/224908 |
network_acronym_str |
UNSP |
network_name_str |
Repositório Institucional da UNESP |
repository_id_str |
2946 |
spelling |
Analysis of linearity and frequency response of a novel piezoelectric flextensional actuator using a homodyne interferometer and the J1 - J4 methodHomodyne optical interferometerNanometric displacement measurementPiezoelectric flextensional actuator (PFA)Piezoelectric transducers are widely used in high-resolution positioning systems. This paper reports the experimental analysis of a novel piezoelectric flextensional actuator (PFA), which is designed by using the topology-optimization method through a low-cost homodyne Michelson interferometer. By applying the J1 - J4 method for signal demodulation, which provides a linear and direct measurement of dynamic optical phase shift independent of fading, the nanometric displacements of the PFA were determined. Linearity and frequency response of the PFA were evaluated up to 50 kHz. PFA calibration factor and amplification rate were determined for the PFA operating in the quasi-static regime. To confirm the observed frequencies of resonance, an impedance analyzer is also utilized to measure the magnitude and phase of the PFA admittance. © 2007 IEEE.Centro Universitário de Rio Preto, Sao Jose do Rio Preto 15025-400Centro Universitário Católico, Lins16401-371Centro Universitário de Lins, LinsInstituto de Pesquisas Tecnológicas, São Paulo 05508-900Department of Electrical Engineering Universidade Estadual Paulista, Ilha Solteira 15385-000Department of Mechatronics and Mechanical Systems Engineering Escola Politécnica da Universidade de São Paulo, São Paulo 05508-900Department of Electrical Engineering Universidade Estadual Paulista, Ilha Solteira 15385-000Centro Universitário de Rio PretoCentro Universitário CatólicoCentro Universitário de LinsInstituto de Pesquisas TecnológicasUniversidade Estadual Paulista (UNESP)Universidade de São Paulo (USP)Marca̧l, Luiz Antônio PereziLeão, José Vital FerrazNader, GilderHiguti, Ricardo Tokio [UNESP]Kitano, Cláudio [UNESP]Silva, Emílio Carlos Nelli2022-04-28T20:17:20Z2022-04-28T20:17:20Z2007-06-01info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/article954-961http://dx.doi.org/10.1109/TIM.2007.894173IEEE Transactions on Instrumentation and Measurement, v. 56, n. 3, p. 954-961, 2007.0018-9456http://hdl.handle.net/11449/22490810.1109/TIM.2007.8941732-s2.0-34249026343Scopusreponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPengIEEE Transactions on Instrumentation and Measurementinfo:eu-repo/semantics/openAccess2024-07-04T19:06:57Zoai:repositorio.unesp.br:11449/224908Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462024-08-05T23:53:51.507146Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false |
dc.title.none.fl_str_mv |
Analysis of linearity and frequency response of a novel piezoelectric flextensional actuator using a homodyne interferometer and the J1 - J4 method |
title |
Analysis of linearity and frequency response of a novel piezoelectric flextensional actuator using a homodyne interferometer and the J1 - J4 method |
spellingShingle |
Analysis of linearity and frequency response of a novel piezoelectric flextensional actuator using a homodyne interferometer and the J1 - J4 method Marca̧l, Luiz Antônio Perezi Homodyne optical interferometer Nanometric displacement measurement Piezoelectric flextensional actuator (PFA) |
title_short |
Analysis of linearity and frequency response of a novel piezoelectric flextensional actuator using a homodyne interferometer and the J1 - J4 method |
title_full |
Analysis of linearity and frequency response of a novel piezoelectric flextensional actuator using a homodyne interferometer and the J1 - J4 method |
title_fullStr |
Analysis of linearity and frequency response of a novel piezoelectric flextensional actuator using a homodyne interferometer and the J1 - J4 method |
title_full_unstemmed |
Analysis of linearity and frequency response of a novel piezoelectric flextensional actuator using a homodyne interferometer and the J1 - J4 method |
title_sort |
Analysis of linearity and frequency response of a novel piezoelectric flextensional actuator using a homodyne interferometer and the J1 - J4 method |
author |
Marca̧l, Luiz Antônio Perezi |
author_facet |
Marca̧l, Luiz Antônio Perezi Leão, José Vital Ferraz Nader, Gilder Higuti, Ricardo Tokio [UNESP] Kitano, Cláudio [UNESP] Silva, Emílio Carlos Nelli |
author_role |
author |
author2 |
Leão, José Vital Ferraz Nader, Gilder Higuti, Ricardo Tokio [UNESP] Kitano, Cláudio [UNESP] Silva, Emílio Carlos Nelli |
author2_role |
author author author author author |
dc.contributor.none.fl_str_mv |
Centro Universitário de Rio Preto Centro Universitário Católico Centro Universitário de Lins Instituto de Pesquisas Tecnológicas Universidade Estadual Paulista (UNESP) Universidade de São Paulo (USP) |
dc.contributor.author.fl_str_mv |
Marca̧l, Luiz Antônio Perezi Leão, José Vital Ferraz Nader, Gilder Higuti, Ricardo Tokio [UNESP] Kitano, Cláudio [UNESP] Silva, Emílio Carlos Nelli |
dc.subject.por.fl_str_mv |
Homodyne optical interferometer Nanometric displacement measurement Piezoelectric flextensional actuator (PFA) |
topic |
Homodyne optical interferometer Nanometric displacement measurement Piezoelectric flextensional actuator (PFA) |
description |
Piezoelectric transducers are widely used in high-resolution positioning systems. This paper reports the experimental analysis of a novel piezoelectric flextensional actuator (PFA), which is designed by using the topology-optimization method through a low-cost homodyne Michelson interferometer. By applying the J1 - J4 method for signal demodulation, which provides a linear and direct measurement of dynamic optical phase shift independent of fading, the nanometric displacements of the PFA were determined. Linearity and frequency response of the PFA were evaluated up to 50 kHz. PFA calibration factor and amplification rate were determined for the PFA operating in the quasi-static regime. To confirm the observed frequencies of resonance, an impedance analyzer is also utilized to measure the magnitude and phase of the PFA admittance. © 2007 IEEE. |
publishDate |
2007 |
dc.date.none.fl_str_mv |
2007-06-01 2022-04-28T20:17:20Z 2022-04-28T20:17:20Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://dx.doi.org/10.1109/TIM.2007.894173 IEEE Transactions on Instrumentation and Measurement, v. 56, n. 3, p. 954-961, 2007. 0018-9456 http://hdl.handle.net/11449/224908 10.1109/TIM.2007.894173 2-s2.0-34249026343 |
url |
http://dx.doi.org/10.1109/TIM.2007.894173 http://hdl.handle.net/11449/224908 |
identifier_str_mv |
IEEE Transactions on Instrumentation and Measurement, v. 56, n. 3, p. 954-961, 2007. 0018-9456 10.1109/TIM.2007.894173 2-s2.0-34249026343 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
IEEE Transactions on Instrumentation and Measurement |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
954-961 |
dc.source.none.fl_str_mv |
Scopus reponame:Repositório Institucional da UNESP instname:Universidade Estadual Paulista (UNESP) instacron:UNESP |
instname_str |
Universidade Estadual Paulista (UNESP) |
instacron_str |
UNESP |
institution |
UNESP |
reponame_str |
Repositório Institucional da UNESP |
collection |
Repositório Institucional da UNESP |
repository.name.fl_str_mv |
Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP) |
repository.mail.fl_str_mv |
|
_version_ |
1808129562865827840 |