Study on Needles and Cracks of Tin-doped Indium Oxide Tablets for Electron Beam Evaporation Process
Autor(a) principal: | |
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Data de Publicação: | 2015 |
Outros Autores: | , , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Materials research (São Carlos. Online) |
Texto Completo: | http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392015000300519 |
Resumo: | Tin-doped indium oxide (ITO) tablets were used to deposit ITO films on p-GaN layer of light-emitting diodes. Needles and cracks in ITO tablets generated during electron beam evaporation process were deeply investigated. The formation of needles is predominantly resulted from the scanning trace, which is controlled by x and y axes scanning singles. The needles can be eliminated by controlling electron beam scanning trace. The loose microstructure with uniform grains and pores in the ITO tablets results in weak bonding strength, which leads to cracks under the thermal shock of high energy electron beam. A three-dimensional reticulated skeleton structure with strong bonding strength can restrain these cracks. |
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Study on Needles and Cracks of Tin-doped Indium Oxide Tablets for Electron Beam Evaporation ProcessneedlecrackITOelectron beam evaporationTin-doped indium oxide (ITO) tablets were used to deposit ITO films on p-GaN layer of light-emitting diodes. Needles and cracks in ITO tablets generated during electron beam evaporation process were deeply investigated. The formation of needles is predominantly resulted from the scanning trace, which is controlled by x and y axes scanning singles. The needles can be eliminated by controlling electron beam scanning trace. The loose microstructure with uniform grains and pores in the ITO tablets results in weak bonding strength, which leads to cracks under the thermal shock of high energy electron beam. A three-dimensional reticulated skeleton structure with strong bonding strength can restrain these cracks.ABM, ABC, ABPol2015-06-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersiontext/htmlhttp://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392015000300519Materials Research v.18 n.3 2015reponame:Materials research (São Carlos. Online)instname:Universidade Federal de São Carlos (UFSCAR)instacron:ABM ABC ABPOL10.1590/1516-1439.310714info:eu-repo/semantics/openAccessXu,JiwenYang,ZupeiZhang,XiaowenYang,LingXu,HuaruiWang,Huaeng2015-08-04T00:00:00Zoai:scielo:S1516-14392015000300519Revistahttp://www.scielo.br/mrPUBhttps://old.scielo.br/oai/scielo-oai.phpdedz@power.ufscar.br1980-53731516-1439opendoar:2015-08-04T00:00Materials research (São Carlos. Online) - Universidade Federal de São Carlos (UFSCAR)false |
dc.title.none.fl_str_mv |
Study on Needles and Cracks of Tin-doped Indium Oxide Tablets for Electron Beam Evaporation Process |
title |
Study on Needles and Cracks of Tin-doped Indium Oxide Tablets for Electron Beam Evaporation Process |
spellingShingle |
Study on Needles and Cracks of Tin-doped Indium Oxide Tablets for Electron Beam Evaporation Process Xu,Jiwen needle crack ITO electron beam evaporation |
title_short |
Study on Needles and Cracks of Tin-doped Indium Oxide Tablets for Electron Beam Evaporation Process |
title_full |
Study on Needles and Cracks of Tin-doped Indium Oxide Tablets for Electron Beam Evaporation Process |
title_fullStr |
Study on Needles and Cracks of Tin-doped Indium Oxide Tablets for Electron Beam Evaporation Process |
title_full_unstemmed |
Study on Needles and Cracks of Tin-doped Indium Oxide Tablets for Electron Beam Evaporation Process |
title_sort |
Study on Needles and Cracks of Tin-doped Indium Oxide Tablets for Electron Beam Evaporation Process |
author |
Xu,Jiwen |
author_facet |
Xu,Jiwen Yang,Zupei Zhang,Xiaowen Yang,Ling Xu,Huarui Wang,Hua |
author_role |
author |
author2 |
Yang,Zupei Zhang,Xiaowen Yang,Ling Xu,Huarui Wang,Hua |
author2_role |
author author author author author |
dc.contributor.author.fl_str_mv |
Xu,Jiwen Yang,Zupei Zhang,Xiaowen Yang,Ling Xu,Huarui Wang,Hua |
dc.subject.por.fl_str_mv |
needle crack ITO electron beam evaporation |
topic |
needle crack ITO electron beam evaporation |
description |
Tin-doped indium oxide (ITO) tablets were used to deposit ITO films on p-GaN layer of light-emitting diodes. Needles and cracks in ITO tablets generated during electron beam evaporation process were deeply investigated. The formation of needles is predominantly resulted from the scanning trace, which is controlled by x and y axes scanning singles. The needles can be eliminated by controlling electron beam scanning trace. The loose microstructure with uniform grains and pores in the ITO tablets results in weak bonding strength, which leads to cracks under the thermal shock of high energy electron beam. A three-dimensional reticulated skeleton structure with strong bonding strength can restrain these cracks. |
publishDate |
2015 |
dc.date.none.fl_str_mv |
2015-06-01 |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392015000300519 |
url |
http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392015000300519 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
10.1590/1516-1439.310714 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
text/html |
dc.publisher.none.fl_str_mv |
ABM, ABC, ABPol |
publisher.none.fl_str_mv |
ABM, ABC, ABPol |
dc.source.none.fl_str_mv |
Materials Research v.18 n.3 2015 reponame:Materials research (São Carlos. Online) instname:Universidade Federal de São Carlos (UFSCAR) instacron:ABM ABC ABPOL |
instname_str |
Universidade Federal de São Carlos (UFSCAR) |
instacron_str |
ABM ABC ABPOL |
institution |
ABM ABC ABPOL |
reponame_str |
Materials research (São Carlos. Online) |
collection |
Materials research (São Carlos. Online) |
repository.name.fl_str_mv |
Materials research (São Carlos. Online) - Universidade Federal de São Carlos (UFSCAR) |
repository.mail.fl_str_mv |
dedz@power.ufscar.br |
_version_ |
1754212665470746624 |