Sputtering Deposition of TiO2 Thin Film Coatings for Fiber Optic Sensors

Detalhes bibliográficos
Autor(a) principal: Silva, Daniela
Data de Publicação: 2022
Outros Autores: Monteiro, Catarina S., Silva, Susana O., Frazão, Orlando, Pinto, Joana V., Raposo, Maria, Ribeiro, Paulo A., Sério, Susana
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/10362/143214
Resumo: Funding: The research leading to these results has received funding from the Portuguese funding agency FCT—Fundação para a Ciência e a Tecnologia—within project UID/FIS/04559/2020 to LIB-Phys-UNL and from the FCT/MCTES/PIDDAC. Publisher Copyright: © 2022 by the authors. Licensee MDPI, Basel, Switzerland.
id RCAP_d95a1d08ee3e8f39f7203f8935575747
oai_identifier_str oai:run.unl.pt:10362/143214
network_acronym_str RCAP
network_name_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository_id_str 7160
spelling Sputtering Deposition of TiO2 Thin Film Coatings for Fiber Optic Sensorsfiber optic sensorsmagnetron sputteringthin filmstitanium dioxideAtomic and Molecular Physics, and OpticsInstrumentationRadiology Nuclear Medicine and imagingFunding: The research leading to these results has received funding from the Portuguese funding agency FCT—Fundação para a Ciência e a Tecnologia—within project UID/FIS/04559/2020 to LIB-Phys-UNL and from the FCT/MCTES/PIDDAC. Publisher Copyright: © 2022 by the authors. Licensee MDPI, Basel, Switzerland.Thin films of titanium dioxide (TiO2) and titanium (Ti) were deposited onto glass and optical fiber supports through DC magnetron sputtering, and their transmission was characterized with regard to their use in optical fiber-based sensors. Deposition parameters such as oxygen partial pressure, working pressure, and sputtering power were optimized to attain films with a high reflectance. The films deposited on glass supports were characterized by UV-Vis spectroscopy, X-ray diffraction (XRD), and scanning electron microscopy (SEM). Regarding the deposition parameters, all three parameters were tested simultaneously, changing the working pressure, the sputtering power, and the oxygen percentage. It was possible to conclude that a lower working pressure and higher applied power lead to films with a higher reflectance. Through the analysis of the as-sputtered thin films using X-ray diffraction, the deposition of both Ti and TiO2 films was confirmed. To study the applicability of TiO2 and Ti in fiber sensing, several thin films were deposited in single mode fibers (SMFs) using the sputtering conditions that revealed the most promising results in the glass supports. The sputtered TiO2 and Ti thin films were used as mirrors to increase the visibility of a low-finesse Fabry–Perot cavity and the possible sensing applications were studied.DF – Departamento de FísicaDCM - Departamento de Ciência dos MateriaisCENIMAT-i3N - Centro de Investigação de Materiais (Lab. Associado I3N)UNINOVA-Instituto de Desenvolvimento de Novas TecnologiasLIBPhys-UNLRUNSilva, DanielaMonteiro, Catarina S.Silva, Susana O.Frazão, OrlandoPinto, Joana V.Raposo, MariaRibeiro, Paulo A.Sério, Susana2022-08-23T22:19:32Z2022-05-132022-05-13T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/article15application/pdfhttp://hdl.handle.net/10362/143214eng2304-6732PURE: 45375200https://doi.org/10.3390/photonics9050342info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2024-03-11T05:21:24Zoai:run.unl.pt:10362/143214Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-20T03:50:45.749941Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv Sputtering Deposition of TiO2 Thin Film Coatings for Fiber Optic Sensors
title Sputtering Deposition of TiO2 Thin Film Coatings for Fiber Optic Sensors
spellingShingle Sputtering Deposition of TiO2 Thin Film Coatings for Fiber Optic Sensors
Silva, Daniela
fiber optic sensors
magnetron sputtering
thin films
titanium dioxide
Atomic and Molecular Physics, and Optics
Instrumentation
Radiology Nuclear Medicine and imaging
title_short Sputtering Deposition of TiO2 Thin Film Coatings for Fiber Optic Sensors
title_full Sputtering Deposition of TiO2 Thin Film Coatings for Fiber Optic Sensors
title_fullStr Sputtering Deposition of TiO2 Thin Film Coatings for Fiber Optic Sensors
title_full_unstemmed Sputtering Deposition of TiO2 Thin Film Coatings for Fiber Optic Sensors
title_sort Sputtering Deposition of TiO2 Thin Film Coatings for Fiber Optic Sensors
author Silva, Daniela
author_facet Silva, Daniela
Monteiro, Catarina S.
Silva, Susana O.
Frazão, Orlando
Pinto, Joana V.
Raposo, Maria
Ribeiro, Paulo A.
Sério, Susana
author_role author
author2 Monteiro, Catarina S.
Silva, Susana O.
Frazão, Orlando
Pinto, Joana V.
Raposo, Maria
Ribeiro, Paulo A.
Sério, Susana
author2_role author
author
author
author
author
author
author
dc.contributor.none.fl_str_mv DF – Departamento de Física
DCM - Departamento de Ciência dos Materiais
CENIMAT-i3N - Centro de Investigação de Materiais (Lab. Associado I3N)
UNINOVA-Instituto de Desenvolvimento de Novas Tecnologias
LIBPhys-UNL
RUN
dc.contributor.author.fl_str_mv Silva, Daniela
Monteiro, Catarina S.
Silva, Susana O.
Frazão, Orlando
Pinto, Joana V.
Raposo, Maria
Ribeiro, Paulo A.
Sério, Susana
dc.subject.por.fl_str_mv fiber optic sensors
magnetron sputtering
thin films
titanium dioxide
Atomic and Molecular Physics, and Optics
Instrumentation
Radiology Nuclear Medicine and imaging
topic fiber optic sensors
magnetron sputtering
thin films
titanium dioxide
Atomic and Molecular Physics, and Optics
Instrumentation
Radiology Nuclear Medicine and imaging
description Funding: The research leading to these results has received funding from the Portuguese funding agency FCT—Fundação para a Ciência e a Tecnologia—within project UID/FIS/04559/2020 to LIB-Phys-UNL and from the FCT/MCTES/PIDDAC. Publisher Copyright: © 2022 by the authors. Licensee MDPI, Basel, Switzerland.
publishDate 2022
dc.date.none.fl_str_mv 2022-08-23T22:19:32Z
2022-05-13
2022-05-13T00:00:00Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/10362/143214
url http://hdl.handle.net/10362/143214
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 2304-6732
PURE: 45375200
https://doi.org/10.3390/photonics9050342
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv 15
application/pdf
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
repository.mail.fl_str_mv
_version_ 1799138103354458112

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