Sputtering Deposition of TiO2 Thin Film Coatings for Fiber Optic Sensors
Autor(a) principal: | |
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Data de Publicação: | 2022 |
Outros Autores: | , , , , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | http://hdl.handle.net/10362/143214 |
Resumo: | Funding: The research leading to these results has received funding from the Portuguese funding agency FCT—Fundação para a Ciência e a Tecnologia—within project UID/FIS/04559/2020 to LIB-Phys-UNL and from the FCT/MCTES/PIDDAC. Publisher Copyright: © 2022 by the authors. Licensee MDPI, Basel, Switzerland. |
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Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
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7160 |
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Sputtering Deposition of TiO2 Thin Film Coatings for Fiber Optic Sensorsfiber optic sensorsmagnetron sputteringthin filmstitanium dioxideAtomic and Molecular Physics, and OpticsInstrumentationRadiology Nuclear Medicine and imagingFunding: The research leading to these results has received funding from the Portuguese funding agency FCT—Fundação para a Ciência e a Tecnologia—within project UID/FIS/04559/2020 to LIB-Phys-UNL and from the FCT/MCTES/PIDDAC. Publisher Copyright: © 2022 by the authors. Licensee MDPI, Basel, Switzerland.Thin films of titanium dioxide (TiO2) and titanium (Ti) were deposited onto glass and optical fiber supports through DC magnetron sputtering, and their transmission was characterized with regard to their use in optical fiber-based sensors. Deposition parameters such as oxygen partial pressure, working pressure, and sputtering power were optimized to attain films with a high reflectance. The films deposited on glass supports were characterized by UV-Vis spectroscopy, X-ray diffraction (XRD), and scanning electron microscopy (SEM). Regarding the deposition parameters, all three parameters were tested simultaneously, changing the working pressure, the sputtering power, and the oxygen percentage. It was possible to conclude that a lower working pressure and higher applied power lead to films with a higher reflectance. Through the analysis of the as-sputtered thin films using X-ray diffraction, the deposition of both Ti and TiO2 films was confirmed. To study the applicability of TiO2 and Ti in fiber sensing, several thin films were deposited in single mode fibers (SMFs) using the sputtering conditions that revealed the most promising results in the glass supports. The sputtered TiO2 and Ti thin films were used as mirrors to increase the visibility of a low-finesse Fabry–Perot cavity and the possible sensing applications were studied.DF – Departamento de FísicaDCM - Departamento de Ciência dos MateriaisCENIMAT-i3N - Centro de Investigação de Materiais (Lab. Associado I3N)UNINOVA-Instituto de Desenvolvimento de Novas TecnologiasLIBPhys-UNLRUNSilva, DanielaMonteiro, Catarina S.Silva, Susana O.Frazão, OrlandoPinto, Joana V.Raposo, MariaRibeiro, Paulo A.Sério, Susana2022-08-23T22:19:32Z2022-05-132022-05-13T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/article15application/pdfhttp://hdl.handle.net/10362/143214eng2304-6732PURE: 45375200https://doi.org/10.3390/photonics9050342info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2024-03-11T05:21:24Zoai:run.unl.pt:10362/143214Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-20T03:50:45.749941Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
Sputtering Deposition of TiO2 Thin Film Coatings for Fiber Optic Sensors |
title |
Sputtering Deposition of TiO2 Thin Film Coatings for Fiber Optic Sensors |
spellingShingle |
Sputtering Deposition of TiO2 Thin Film Coatings for Fiber Optic Sensors Silva, Daniela fiber optic sensors magnetron sputtering thin films titanium dioxide Atomic and Molecular Physics, and Optics Instrumentation Radiology Nuclear Medicine and imaging |
title_short |
Sputtering Deposition of TiO2 Thin Film Coatings for Fiber Optic Sensors |
title_full |
Sputtering Deposition of TiO2 Thin Film Coatings for Fiber Optic Sensors |
title_fullStr |
Sputtering Deposition of TiO2 Thin Film Coatings for Fiber Optic Sensors |
title_full_unstemmed |
Sputtering Deposition of TiO2 Thin Film Coatings for Fiber Optic Sensors |
title_sort |
Sputtering Deposition of TiO2 Thin Film Coatings for Fiber Optic Sensors |
author |
Silva, Daniela |
author_facet |
Silva, Daniela Monteiro, Catarina S. Silva, Susana O. Frazão, Orlando Pinto, Joana V. Raposo, Maria Ribeiro, Paulo A. Sério, Susana |
author_role |
author |
author2 |
Monteiro, Catarina S. Silva, Susana O. Frazão, Orlando Pinto, Joana V. Raposo, Maria Ribeiro, Paulo A. Sério, Susana |
author2_role |
author author author author author author author |
dc.contributor.none.fl_str_mv |
DF – Departamento de Física DCM - Departamento de Ciência dos Materiais CENIMAT-i3N - Centro de Investigação de Materiais (Lab. Associado I3N) UNINOVA-Instituto de Desenvolvimento de Novas Tecnologias LIBPhys-UNL RUN |
dc.contributor.author.fl_str_mv |
Silva, Daniela Monteiro, Catarina S. Silva, Susana O. Frazão, Orlando Pinto, Joana V. Raposo, Maria Ribeiro, Paulo A. Sério, Susana |
dc.subject.por.fl_str_mv |
fiber optic sensors magnetron sputtering thin films titanium dioxide Atomic and Molecular Physics, and Optics Instrumentation Radiology Nuclear Medicine and imaging |
topic |
fiber optic sensors magnetron sputtering thin films titanium dioxide Atomic and Molecular Physics, and Optics Instrumentation Radiology Nuclear Medicine and imaging |
description |
Funding: The research leading to these results has received funding from the Portuguese funding agency FCT—Fundação para a Ciência e a Tecnologia—within project UID/FIS/04559/2020 to LIB-Phys-UNL and from the FCT/MCTES/PIDDAC. Publisher Copyright: © 2022 by the authors. Licensee MDPI, Basel, Switzerland. |
publishDate |
2022 |
dc.date.none.fl_str_mv |
2022-08-23T22:19:32Z 2022-05-13 2022-05-13T00:00:00Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/10362/143214 |
url |
http://hdl.handle.net/10362/143214 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
2304-6732 PURE: 45375200 https://doi.org/10.3390/photonics9050342 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
15 application/pdf |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
instname_str |
Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
instacron_str |
RCAAP |
institution |
RCAAP |
reponame_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
collection |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository.name.fl_str_mv |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
repository.mail.fl_str_mv |
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1799138103354458112 |