Environment of hafnium and silicon in Hf-based dielectric films : an atomistic study by x-ray absorption spectroscopy and x-ray diffraction

Detalhes bibliográficos
Autor(a) principal: Morais, Jonder
Data de Publicação: 2005
Outros Autores: Miotti, Leonardo, Bastos, Karen Paz, Teixeira, Sergio Ribeiro, Baumvol, Israel Jacob Rabin, Rotondaro, Antonio L.P., Chambers, James Joseph, Visokay, Mark R., Colombo, Luigi, Alves, Maria do Carmo Martins
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Institucional da UFRGS
Texto Completo: http://hdl.handle.net/10183/141313
Resumo: The atomic structure of HfSiO and HfSiON was investigated before and after thermal annealing using x-ray diffraction and x-ray absorption spectroscopy. In HfSiO, the Hf atoms are arranged in a monoclinic HfO2 structure with Hf as second nearest neighbors, while Si is in a SiO2 environment. Thermal annealing induces crystallization of HfSiO with subtle changes in Hf–Hf distances. In the case of HfSiON, a stable structure is observed around the Hf atoms, which remains unaffected after annealing. Nitrogen is present in the first coordination shell of the Hf atoms, with Si in a SiON environment.
id UFRGS-2_f47b8d1b0799284ecba64b512acdca9d
oai_identifier_str oai:www.lume.ufrgs.br:10183/141313
network_acronym_str UFRGS-2
network_name_str Repositório Institucional da UFRGS
repository_id_str
spelling Morais, JonderMiotti, LeonardoBastos, Karen PazTeixeira, Sergio RibeiroBaumvol, Israel Jacob RabinRotondaro, Antonio L.P.Chambers, James JosephVisokay, Mark R.Colombo, LuigiAlves, Maria do Carmo Martins2016-05-19T02:09:40Z20050003-6951http://hdl.handle.net/10183/141313000469582The atomic structure of HfSiO and HfSiON was investigated before and after thermal annealing using x-ray diffraction and x-ray absorption spectroscopy. In HfSiO, the Hf atoms are arranged in a monoclinic HfO2 structure with Hf as second nearest neighbors, while Si is in a SiO2 environment. Thermal annealing induces crystallization of HfSiO with subtle changes in Hf–Hf distances. In the case of HfSiON, a stable structure is observed around the Hf atoms, which remains unaffected after annealing. Nitrogen is present in the first coordination shell of the Hf atoms, with Si in a SiON environment.application/pdfengApplied physics letters. New York. Vol. 86, no. 21 (May 2005), 212906, 3 p.Espectroscopia de absorçãoEspectroscopia de raio xRaios X : DifraçãoEstrutura cristalinaCristalizaçãoFilmes finos dieletricosCompostos de silícioEspectros de absorção de raios-xDifração de raios XSilícioEnvironment of hafnium and silicon in Hf-based dielectric films : an atomistic study by x-ray absorption spectroscopy and x-ray diffractionEstrangeiroinfo:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/openAccessreponame:Repositório Institucional da UFRGSinstname:Universidade Federal do Rio Grande do Sul (UFRGS)instacron:UFRGSORIGINAL000469582.pdf000469582.pdfTexto completo (inglês)application/pdf402682http://www.lume.ufrgs.br/bitstream/10183/141313/1/000469582.pdf2f5dbbaf35eefee23da1532a98d1e19fMD51TEXT000469582.pdf.txt000469582.pdf.txtExtracted Texttext/plain18905http://www.lume.ufrgs.br/bitstream/10183/141313/2/000469582.pdf.txt6373fc4e57bb094397a7e85dbf469925MD52THUMBNAIL000469582.pdf.jpg000469582.pdf.jpgGenerated Thumbnailimage/jpeg2322http://www.lume.ufrgs.br/bitstream/10183/141313/3/000469582.pdf.jpgef7dea246aa623af65ff908211f49e67MD5310183/1413132024-07-20 06:21:33.671191oai:www.lume.ufrgs.br:10183/141313Repositório InstitucionalPUBhttps://lume.ufrgs.br/oai/requestlume@ufrgs.bropendoar:2024-07-20T09:21:33Repositório Institucional da UFRGS - Universidade Federal do Rio Grande do Sul (UFRGS)false
dc.title.pt_BR.fl_str_mv Environment of hafnium and silicon in Hf-based dielectric films : an atomistic study by x-ray absorption spectroscopy and x-ray diffraction
title Environment of hafnium and silicon in Hf-based dielectric films : an atomistic study by x-ray absorption spectroscopy and x-ray diffraction
spellingShingle Environment of hafnium and silicon in Hf-based dielectric films : an atomistic study by x-ray absorption spectroscopy and x-ray diffraction
Morais, Jonder
Espectroscopia de absorção
Espectroscopia de raio x
Raios X : Difração
Estrutura cristalina
Cristalização
Filmes finos dieletricos
Compostos de silício
Espectros de absorção de raios-x
Difração de raios X
Silício
title_short Environment of hafnium and silicon in Hf-based dielectric films : an atomistic study by x-ray absorption spectroscopy and x-ray diffraction
title_full Environment of hafnium and silicon in Hf-based dielectric films : an atomistic study by x-ray absorption spectroscopy and x-ray diffraction
title_fullStr Environment of hafnium and silicon in Hf-based dielectric films : an atomistic study by x-ray absorption spectroscopy and x-ray diffraction
title_full_unstemmed Environment of hafnium and silicon in Hf-based dielectric films : an atomistic study by x-ray absorption spectroscopy and x-ray diffraction
title_sort Environment of hafnium and silicon in Hf-based dielectric films : an atomistic study by x-ray absorption spectroscopy and x-ray diffraction
author Morais, Jonder
author_facet Morais, Jonder
Miotti, Leonardo
Bastos, Karen Paz
Teixeira, Sergio Ribeiro
Baumvol, Israel Jacob Rabin
Rotondaro, Antonio L.P.
Chambers, James Joseph
Visokay, Mark R.
Colombo, Luigi
Alves, Maria do Carmo Martins
author_role author
author2 Miotti, Leonardo
Bastos, Karen Paz
Teixeira, Sergio Ribeiro
Baumvol, Israel Jacob Rabin
Rotondaro, Antonio L.P.
Chambers, James Joseph
Visokay, Mark R.
Colombo, Luigi
Alves, Maria do Carmo Martins
author2_role author
author
author
author
author
author
author
author
author
dc.contributor.author.fl_str_mv Morais, Jonder
Miotti, Leonardo
Bastos, Karen Paz
Teixeira, Sergio Ribeiro
Baumvol, Israel Jacob Rabin
Rotondaro, Antonio L.P.
Chambers, James Joseph
Visokay, Mark R.
Colombo, Luigi
Alves, Maria do Carmo Martins
dc.subject.por.fl_str_mv Espectroscopia de absorção
Espectroscopia de raio x
Raios X : Difração
Estrutura cristalina
Cristalização
Filmes finos dieletricos
Compostos de silício
Espectros de absorção de raios-x
Difração de raios X
Silício
topic Espectroscopia de absorção
Espectroscopia de raio x
Raios X : Difração
Estrutura cristalina
Cristalização
Filmes finos dieletricos
Compostos de silício
Espectros de absorção de raios-x
Difração de raios X
Silício
description The atomic structure of HfSiO and HfSiON was investigated before and after thermal annealing using x-ray diffraction and x-ray absorption spectroscopy. In HfSiO, the Hf atoms are arranged in a monoclinic HfO2 structure with Hf as second nearest neighbors, while Si is in a SiO2 environment. Thermal annealing induces crystallization of HfSiO with subtle changes in Hf–Hf distances. In the case of HfSiON, a stable structure is observed around the Hf atoms, which remains unaffected after annealing. Nitrogen is present in the first coordination shell of the Hf atoms, with Si in a SiON environment.
publishDate 2005
dc.date.issued.fl_str_mv 2005
dc.date.accessioned.fl_str_mv 2016-05-19T02:09:40Z
dc.type.driver.fl_str_mv Estrangeiro
info:eu-repo/semantics/article
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/10183/141313
dc.identifier.issn.pt_BR.fl_str_mv 0003-6951
dc.identifier.nrb.pt_BR.fl_str_mv 000469582
identifier_str_mv 0003-6951
000469582
url http://hdl.handle.net/10183/141313
dc.language.iso.fl_str_mv eng
language eng
dc.relation.ispartof.pt_BR.fl_str_mv Applied physics letters. New York. Vol. 86, no. 21 (May 2005), 212906, 3 p.
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.source.none.fl_str_mv reponame:Repositório Institucional da UFRGS
instname:Universidade Federal do Rio Grande do Sul (UFRGS)
instacron:UFRGS
instname_str Universidade Federal do Rio Grande do Sul (UFRGS)
instacron_str UFRGS
institution UFRGS
reponame_str Repositório Institucional da UFRGS
collection Repositório Institucional da UFRGS
bitstream.url.fl_str_mv http://www.lume.ufrgs.br/bitstream/10183/141313/1/000469582.pdf
http://www.lume.ufrgs.br/bitstream/10183/141313/2/000469582.pdf.txt
http://www.lume.ufrgs.br/bitstream/10183/141313/3/000469582.pdf.jpg
bitstream.checksum.fl_str_mv 2f5dbbaf35eefee23da1532a98d1e19f
6373fc4e57bb094397a7e85dbf469925
ef7dea246aa623af65ff908211f49e67
bitstream.checksumAlgorithm.fl_str_mv MD5
MD5
MD5
repository.name.fl_str_mv Repositório Institucional da UFRGS - Universidade Federal do Rio Grande do Sul (UFRGS)
repository.mail.fl_str_mv lume@ufrgs.br
_version_ 1817724982689529856