Metastable acceptor centers in boron implanted silicon
Autor(a) principal: | |
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Data de Publicação: | 1995 |
Outros Autores: | |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Institucional da UFRGS |
Texto Completo: | http://hdl.handle.net/10183/140717 |
Resumo: | The evolution of the electrical activation with the annealing time in B1 implanted (5.0 31014 cm22, 50 keV! Si was studied as a function of the annealing temperature. Electrical activation yields of 15%–30% were observed after annealing for 2 s at temperatures above 550 °C. Prolonging the annealing time from 2 to 900 s we observed that the electrical activation evolves differently according to the temperature: ~i! at 550 °C,T,700 °C it decreases toward an equilibrium level, ~ii! at 700 °C,T,800 °C it decreases during the first minutes and subsequently increases again, and ~iii! at temperatures ,550 °C or T.800 °C it increases continuously. In order to explain the carrier removal observed during annealing at 550–800 °C we proposed that metastable acceptor centers are formed during the B1 implantation and/or the initial period of the annealing time. Interaction of Si self-interstitial atoms with these centers leads to their neutralization and/or dissociation with consequent decreasing of the carrier concentration. |
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Souza, Joel Pereira deBoudinov, Henri Ivanov2016-05-11T02:10:26Z19950003-6951http://hdl.handle.net/10183/140717000262599The evolution of the electrical activation with the annealing time in B1 implanted (5.0 31014 cm22, 50 keV! Si was studied as a function of the annealing temperature. Electrical activation yields of 15%–30% were observed after annealing for 2 s at temperatures above 550 °C. Prolonging the annealing time from 2 to 900 s we observed that the electrical activation evolves differently according to the temperature: ~i! at 550 °C,T,700 °C it decreases toward an equilibrium level, ~ii! at 700 °C,T,800 °C it decreases during the first minutes and subsequently increases again, and ~iii! at temperatures ,550 °C or T.800 °C it increases continuously. In order to explain the carrier removal observed during annealing at 550–800 °C we proposed that metastable acceptor centers are formed during the B1 implantation and/or the initial period of the annealing time. Interaction of Si self-interstitial atoms with these centers leads to their neutralization and/or dissociation with consequent decreasing of the carrier concentration.application/pdfengApplied physics letters. New York. Vol. 66, n. 23 (June 1995), p. 3173-3175Física da matéria condensadaImplantação de íonsDopagem de semicondutoresDislocacoesIonizaçãoMetastable acceptor centers in boron implanted siliconEstrangeiroinfo:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/openAccessreponame:Repositório Institucional da UFRGSinstname:Universidade Federal do Rio Grande do Sul (UFRGS)instacron:UFRGSORIGINAL000262599.pdf000262599.pdfTexto completo (inglês)application/pdf406395http://www.lume.ufrgs.br/bitstream/10183/140717/1/000262599.pdf93d1fe5c06ccabfbf7751781e38f928cMD51TEXT000262599.pdf.txt000262599.pdf.txtExtracted Texttext/plain14438http://www.lume.ufrgs.br/bitstream/10183/140717/2/000262599.pdf.txt79ccf6a1493c9e68e16ce17af18c712fMD52THUMBNAIL000262599.pdf.jpg000262599.pdf.jpgGenerated Thumbnailimage/jpeg2002http://www.lume.ufrgs.br/bitstream/10183/140717/3/000262599.pdf.jpgea01c3fdfe6d5f94917151622c30aa9bMD5310183/1407172022-02-22 04:50:37.380379oai:www.lume.ufrgs.br:10183/140717Repositório de PublicaçõesPUBhttps://lume.ufrgs.br/oai/requestopendoar:2022-02-22T07:50:37Repositório Institucional da UFRGS - Universidade Federal do Rio Grande do Sul (UFRGS)false |
dc.title.pt_BR.fl_str_mv |
Metastable acceptor centers in boron implanted silicon |
title |
Metastable acceptor centers in boron implanted silicon |
spellingShingle |
Metastable acceptor centers in boron implanted silicon Souza, Joel Pereira de Física da matéria condensada Implantação de íons Dopagem de semicondutores Dislocacoes Ionização |
title_short |
Metastable acceptor centers in boron implanted silicon |
title_full |
Metastable acceptor centers in boron implanted silicon |
title_fullStr |
Metastable acceptor centers in boron implanted silicon |
title_full_unstemmed |
Metastable acceptor centers in boron implanted silicon |
title_sort |
Metastable acceptor centers in boron implanted silicon |
author |
Souza, Joel Pereira de |
author_facet |
Souza, Joel Pereira de Boudinov, Henri Ivanov |
author_role |
author |
author2 |
Boudinov, Henri Ivanov |
author2_role |
author |
dc.contributor.author.fl_str_mv |
Souza, Joel Pereira de Boudinov, Henri Ivanov |
dc.subject.por.fl_str_mv |
Física da matéria condensada Implantação de íons Dopagem de semicondutores Dislocacoes Ionização |
topic |
Física da matéria condensada Implantação de íons Dopagem de semicondutores Dislocacoes Ionização |
description |
The evolution of the electrical activation with the annealing time in B1 implanted (5.0 31014 cm22, 50 keV! Si was studied as a function of the annealing temperature. Electrical activation yields of 15%–30% were observed after annealing for 2 s at temperatures above 550 °C. Prolonging the annealing time from 2 to 900 s we observed that the electrical activation evolves differently according to the temperature: ~i! at 550 °C,T,700 °C it decreases toward an equilibrium level, ~ii! at 700 °C,T,800 °C it decreases during the first minutes and subsequently increases again, and ~iii! at temperatures ,550 °C or T.800 °C it increases continuously. In order to explain the carrier removal observed during annealing at 550–800 °C we proposed that metastable acceptor centers are formed during the B1 implantation and/or the initial period of the annealing time. Interaction of Si self-interstitial atoms with these centers leads to their neutralization and/or dissociation with consequent decreasing of the carrier concentration. |
publishDate |
1995 |
dc.date.issued.fl_str_mv |
1995 |
dc.date.accessioned.fl_str_mv |
2016-05-11T02:10:26Z |
dc.type.driver.fl_str_mv |
Estrangeiro info:eu-repo/semantics/article |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/10183/140717 |
dc.identifier.issn.pt_BR.fl_str_mv |
0003-6951 |
dc.identifier.nrb.pt_BR.fl_str_mv |
000262599 |
identifier_str_mv |
0003-6951 000262599 |
url |
http://hdl.handle.net/10183/140717 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.ispartof.pt_BR.fl_str_mv |
Applied physics letters. New York. Vol. 66, n. 23 (June 1995), p. 3173-3175 |
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info:eu-repo/semantics/openAccess |
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openAccess |
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application/pdf |
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